Nishino, Saki; Tsuboi, Masatoshi; Okada, Jumpei; Saegusa, Yu; Omori, Kazuki; Yasuo, Kiyoshi; Seshimo, Kazuyoshi; Domura, Kazuyuki; Yamamoto, Masahiko
Nihon Hozen Gakkai Dai-17-Kai Gakujutsu Koenkai Yoshishu, p.541 - 548, 2021/07
no abstracts in English
Nishida, Satoru*; Nishino, Soichiro*; Sekine, Masahiko*; Oka, Yuki*; Harjo, S.; Kawasaki, Takuro; Suzuki, Hiroshi; Morii, Yukio*; Ishii, Yoshinobu*
Materials Transactions, 62(5), p.667 - 674, 2021/05
Nishikino, Masaharu; Ishino, Masahiko; Ichimaru, Satoshi*; Hatayama, Masatoshi*; Hasegawa, Noboru; Kawachi, Tetsuya
Reza Gakkai Dai-483-Kai Kenkyukai Hokoku; Tanhacho Ryoshi Bimu Hassei To Sono Oyo, p.25 - 28, 2015/12
X-ray ablation has been recently achieved using plasma soft X-ray lasers (SXRLs), laser plasma soft X-rays, and X-ray free electron lasers. In order to study the interactions between picosecond SXRL beams and material and multi-layered structure surfaces were irradiated with SXRL pulse. Following irradiation, the substrate surface was observed using a scanning electron microscope and an atomic force microscope. The surface modifications caused by the SXRL beam were clearly seen. The multi-layered mirror is the important component for the EUV lithography. Then, we have started the damage test of multi-layered structure, and the surface modifications caused by the SXRL pulse irradiations were confirmed.
Namba, Shinichi*; Hasegawa, Noboru; Kishimoto, Maki; Nishikino, Masaharu; Ishino, Masahiko; Kawachi, Tetsuya
AIP Advances (Internet), 5(11), p.117101_1 - 117101_10, 2015/11
To characterize the temporal evolution of ultrashort X-ray pulses emitted by laser plasmas using a pump-probe method, a magnetic bottle time-of-flight electron spectrometer is constructed. The design is determined by numerical calculations of a mirror magnetic field and of the electron trajectory in a flight tube. The performance of the spectrometer is characterized by measuring the electron spectra of xenon atoms irradiated with a laser-driven plasma X-ray pulse. In addition, as a preliminary experiment, two-color above-threshold ionization (ATI) is conducted, in which xenon atoms are simultaneously irradiated with an X-ray laser pump and an IR laser probe. The correlation in the intensity of the Auger sideband spectra and in the time delay of the two laser pulses yields an X-ray pulse width of 5.7 ps, in good agreement with the value obtained using an X-ray streak camera.
Ishino, Masahiko; Hasegawa, Noboru; Nishikino, Masaharu; Pikuz, T.*; Skobelev, I. Y.*; Faenov, A.*; Inogamov, N.*; Kawachi, Tetsuya; Yamagiwa, Mitsuru
X-Ray Lasers and Coherent X-Ray Sources; Development and Applications XI (Proceedings of SPIE, Vol.9589), p.958904_1 - 958904_6, 2015/09
To study the ablation process induced by the soft X-ray laser pulse, we investigated the electron temperature of the ablating material. Focused soft X-ray laser pulses having a wavelength of 13.9 nm and duration of 7 ps were irradiated onto target surfaces, and we observed the optical emission from surfaces by use of an optical camera. On target surfaces, we could confirm damage structures, but no emission signal in the visible spectral range during ablation could be observed. Then, we estimated the electron temperature in the ablating matter, and we estimated the electron temperature to be lower than 1 eV and the process duration was shorter than 1000 ps. This result is in good accordance with the theoretical prediction. Our investigation implies that the spallative ablation occurs in the low electron temperature region of a non-equilibrium state of warm dense matter. We will present the current state of our eperimental results.
Nishikino, Masaharu; Kawachi, Tetsuya; Hasegawa, Noboru; Ishino, Masahiko; Minami, Yasuo*; Suemoto, Toru*; Onishi, Naofumi*; Ito, Atsushi*; Sato, Katsutoshi*; Faenov, A.*; et al.
X-Ray Lasers and Coherent X-Ray Sources; Development and Applications XI (Proceedings of SPIE, Vol.9589), p.958902_1 - 958902_7, 2015/09
Nishikino, Masaharu; Hasegawa, Noboru; Ishino, Masahiko; Ochi, Yoshihiro; Kawachi, Tetsuya; Yamagiwa, Mitsuru; Kato, Yoshiaki*
Chinese Optics Letters, 13(7), p.070002_1 - 070002_3, 2015/07
Inogamov, N. A.*; Zhakhovsky, V. V.*; Hasegawa, Noboru; Nishikino, Masaharu; Yamagiwa, Mitsuru; Ishino, Masahiko; Agranat, M. B.*; Ashitkov, S. I.*; Faenov, A. Y.*; Khokhlov, V. A.*; et al.
Applied Physics B, 119(3), p.413 - 419, 2015/06
Koike, Masato; Imazono, Takashi; Ishino, Masahiko
X-sen Bunseki No Shimpo, 46, p.159 - 166, 2015/03
The demand for the physical-properties research using powerful light sources, such as synchrotron radiation and soft-X-rays laser light, is increasing. When promoting such research, it is required to develop efficient soft-X-ray spectrometers suitable for absorption, emission, and fluorescence which are appeared in an energy rage of 1-8 keV. We describe the development of laminar type diffraction gratings which enhance diffraction efficiency remarkably by use of soft-X-ray multilayers instead of single metal layers.
Ishino, Masahiko; Hasegawa, Noboru; Nishikino, Masaharu; Pikuz, T. A.*; Skobelev, I. Y.*; Faenov, A.*; Inogamov, N. A.*; Kawachi, Tetsuya; Yamagiwa, Mitsuru
Journal of Applied Physics, 116(18), p.183302_1 - 183302_6, 2014/11
We investigated the optical emission from the ablating surfaces induced by the irradiations of soft X-ray laser (SXRL) pulses with the aim of estimation of the maximum electron temperature. No emission signal in the spectral range of 400-800 nm could be observed despite the formation of damage structures on the target surfaces. Hence, we estimated an upper limit for the electron temperature of 0.4-0.7 eV for the process duration of 100-1000 ps. Our results imply that the ablation and/or surface modification by the SXRL is not accompanied by plasma formation but is induced by thermo-mechanical pressure, which is so called a spallative ablation. This spallative ablation process occurs in the low electron temperature region of a non-equilibrium state of warm dense matter.
Inogamov, N. A.*; Zhakhovsky, V. V.*; Ashitkov, S. I.*; Emirov, Y. N.*; Faenov, A. Y.*; Pikuz, T. A.*; Ishino, Masahiko; Kando, Masaki; Hasegawa, Noboru; Nishikino, Masaharu; et al.
Journal of Physics; Conference Series, 500(11), p.112070_1 - 112070_6, 2014/05
The mechanism of formation and geometry of surface structures are discussed for the case of single pulse acting on a well-polished metal surface. We demonstrate that the complex surface nano-structures are formed after laser irradiation due to the thermomechanical spallation of ultrathin surface layer of melt. Spallation is accompanied by a strong foaming of melt followed by breaking of the foam. After several nanoseconds the foam remnants freeze up with formation of complex nano-structures on a target surface.
Nishikino, Masaharu; Baba, Motoyoshi*; Suemoto, Toru; Hasegawa, Noboru; Ishino, Masahiko; Kaihori, Takeshi; Kawachi, Tetsuya; Yamagiwa, Mitsuru
X-Ray Lasers 2012; Springer Proceedings in Physics, Vol.147, p.199 - 202, 2014/00
The dynamical processes of the laser-induced surface modifications such as laser ablation come to attract much attention for the micro processing by the ultra-short laser pulse. It is difficult to observe these phenomena directly, because they are non-repetitive, unrepeatable, and occur very rapidly (pico-second) in a very small (micron) area. In order to observe the detailed laser-ablation process, we have developed the proto-type reflected soft X-ray microscopy using the Fresnel zone plate. The experimental setup and spatial resolution of the X-ray microscopy will be presented.
Ishino, Masahiko; Faenov, A.*; Tanaka, Momoko; Pikuz, T.; Tamotsu, Satoshi*; Hasegawa, Noboru; Nishikino, Masaharu; Starikov, S. V.*; Stegailov, V. V.*; Norman, G.*; et al.
X-Ray Lasers 2012; Springer Proceedings in Physics, Vol.147, p.121 - 124, 2014/00
Hasegawa, Noboru; Ochi, Yoshihiro; Kawachi, Tetsuya; Nishikino, Masaharu; Ishino, Masahiko; Imazono, Takashi; Kaihori, Takeshi; Morita, Toshimasa; Sasaki, Akira; Terakawa, Kota*; et al.
X-Ray Lasers 2012; Springer Proceedings in Physics, Vol.147, p.117 - 120, 2014/00
We have developed the femto-second laser pump and soft X-ray laser probe system in order to observe the dynamical processes of the femto-second laser ablation. By using this system, we succeed to obtain the temporal evolution of the soft X-ray reflectivity from the laser induced Pt surface. The results lead that the rate of decrease in the reflectivity of the probe beam has a non-linear relation with the pump laser fluence.
Nishikino, Masaharu; Hasegawa, Noboru; Ishino, Masahiko; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Minami, Yasuo*; Terakawa, Kota*; Takei, Ryota*; Baba, Motoyoshi*; Suemoto, Toru; et al.
JAEA-Conf 2013-001, p.16 - 19, 2013/09
The dynamics of the femtosecond laser ablation is still not clear at the early stage. Several studies on the time-resolved imaging of femtosecond laser ablation process have been performed on various materials. In this study, we have demonstrated a pump and probe imaging of the metal surface morphology during the femtosecond laser ablation by using the laser-driven plasma induced soft X-ray laser (SXRL) as a probe beam. The pumping laser used for ablation was a Ti:Sapphire laser system based on chirped pulse amplification. The pump beam had a Gaussian profile and the focal spot size on the metal surface was about 70 micron at FWHM. The dependence for the pump laser fluence of the ablation surface expansion and the surface condition (roughness and density gradient) were observed from the soft X-ray interferogram and reflective image, respectively.
Ishino, Masahiko; Faenov, A.*; Tanaka, Momoko; Tamotsu, Satoshi*; Pikuz, T.; Hasegawa, Noboru; Nishikino, Masaharu; Inogamov, N.*; Skobelev, I.*; Fortov, V.*; et al.
Proceedings of SPIE, Vol.8849, p.88490F_1 - 88490F_8, 2013/09
Magnitskiy, S.*; Nagorskiy, N.*; Faenov, A.*; Pikuz, T.; Tanaka, Momoko; Ishino, Masahiko; Nishikino, Masaharu; Fukuda, Yuji; Kando, Masaki; Kawachi, Tetsuya; et al.
Nature Communications (Internet), 4, p.1936_1 - 1936_7, 2013/06
Advent of plasma-based transient collisional excitation X-ray lasers allowed us to realize compact coherent X-ray sources, thus opening the way to a wide range of applications. Here we report the observation of unexpected concentric rings in the far-field beam profile at the output of a two-stage plasma-based X-ray laser developed in Japan Atomic Energy Agency, which can be considered as the first manifestation of a mirage phenomenon in X-rays. We have developed a method of solving the Maxwell-Bloch equations, which has allowed to find that the observed phenomenon is due to the emergence in the plasma-amplifier of X-ray mirage in the form of the phase matched coherent virtual point source. The obtained results bring a new insight into physical nature of amplification of X-ray radiation in laser-induced plasma amplifiers and open new opportunities for X-ray plasma diagnostics and extreme UV lithography.
Ishino, Masahiko; Faenov, A. Ya.*; Tanaka, Momoko; Tamotsu, Satoshi*; Hasegawa, Noboru; Nishikino, Masaharu; Pikuz, T.; Kaihori, Takeshi*; Kawachi, Tetsuya
Applied Physics A, 110(1), p.179 - 188, 2013/01
Tomita, Takuro*; Yamamoto, Minoru*; Hasegawa, Noboru; Terakawa, Kota*; Minami, Yasuo*; Nishikino, Masaharu; Ishino, Masahiko; Kaihori, Takeshi*; Ochi, Yoshihiro; Kawachi, Tetsuya; et al.
Optics Express (Internet), 20(28), p.29329 - 29337, 2012/12
Pump and probe reflective imaging using a soft X-ray laser probe was applied to the observation of the early stage of femtosecond laser ablation process on platinum. In strongly excited area, drastic and fast reflectivity drop was observed. In moderately excited area, the decay of the reflectivity is slower than that in the strongly excited area, and the reflectivity reaches its minimum at t = 160 ps. In weakly excited area, laser-induced reflectivity change was not observed. These results give the critical information about the femtosecond laser ablation.
Ishino, Masahiko; Faenov, A.*; Tanaka, Momoko; Hasegawa, Noboru; Nishikino, Masaharu; Tamotsu, Satoshi*; Pikuz, S.*; Inogamov, N. A.*; Zhakhovsky, V. V.*; Skobelev, I.*; et al.
AIP Conference Proceedings 1465, p.236 - 240, 2012/07
We irradiated the focusing soft X-ray laser pulses having a wavelength of 13.9 nm and the duration of 7 ps to aluminum surface. After the irradiation process, the irradiated surface was observed with a scanning electron microscope. The surface modifications caused by soft X-ray laser single pulse exposure were clearly seen. In addition, it was found that the conical structures having around 100 nm in diameters were formed in the shallow features. The nano-meter size modified surface structures on aluminum induced by the soft X-ray laser pulse is interesting as the newly surface structure. Hence, the soft X-ray laser beam would be a candidate for a tool of micromachining. We also provide a thermomechanical modeling of the soft X-ray laser interaction with aluminum briefly to explain the surface modification.