Refine your search:     
Report No.
 - 
Search Results: Records 1-2 displayed on this page of 2
  • 1

Presentation/Publication Type

Initialising ...

Refine

Journal/Book Title

Initialising ...

Meeting title

Initialising ...

First Author

Initialising ...

Keyword

Initialising ...

Language

Initialising ...

Publication Year

Initialising ...

Held year of conference

Initialising ...

Save select records

Oral presentation

Growth process of radio-frequency ICP plasma and sputtering behavior from antenna

Yamauchi, Toshihiko; Takemoto, Ryo*; Kanno, Yoshinori*; Kobayashi, Seiji*; Nakagaki, Keita*; Kato, Hatsuhiro*

no journal, , 

no abstracts in English

Oral presentation

Te and ne characteristics of RF plasma with 3-turn internal antenna

Yamauchi, Toshihiko; Takemoto, Ryo*; Yabuno, Masahiro*; Kanno, Yoshinori*; Kobayashi, Seiji*; Shiramizu, Miho*; Takei, Toru*; Kato, Hatsuhiro*; Nakagaki, Keita*

no journal, , 

no abstracts in English

2 (Records 1-2 displayed on this page)
  • 1