Development of a Ge detector array and an in-beam calibration system for highly precise measurement of atomic X-rays

Fujita, Manami; Hosomi, Kenji; Ishikawa, Yuji*; Kanauchi, H.*; Koike, Takeshi*; Ogura, Yu*; Tamura, Hirokazu; Tanida, Kiyoshi; Ukai, Mifuyu*; Yamamoto, Takeshi

Nuclear Instruments and Methods in Physics Research A, 1042, p.167439_1 - 167439_9, 2022/11

https://doi.org/10.1016/j.nima.2022.167439

A Study on support design for deep shaft sinking in rock masses of low strength and anisotropic initial stress

Motoshima, Takayuki*; Koike, Masashi*; Hagihara, Takeshi*; Aoyagi, Kazuhei

Dai-46-Kai Gamban Rikigaku Ni Kansuru Shimpojiumu Koenshu (CD-ROM), p.208 - 213, 2019/01

The short step construction method is the standard construction method for deep shaft excavation. However, considering the shaft construction in the sedimentary rock widely distributed in Japan, the support concrete stress can become excessive especially when there are bad conditions such as low rock strength, anisotropic initial stress, or high ground pressure. In this research, we introduced the dual support design to the short step construction method in order to reduce the support stress, and confirmed the validity by three dimensional numerical analysis. Validation analysis was conducted using the in-situ data in the Horonobe Underground Research Project conducted by Japan Atomic Energy Agency.

Superdeformation in S

Go, Shintaro*; Ideguchi, Eiji*; Yokoyama, Rin*; Kobayashi, Motoki*; Kisamori, Keiichi*; Takaki, Motonobu*; Miya, Hiroyuki*; Ota, Shinsuke*; Michimasa, Shinichiro*; Shimoura, Susumu*; et al.

JPS Conference Proceedings (Internet), 6, p.030005_1 - 030005_4, 2015/06

https://doi.org/10.7566/JPSCP.6.030005

Single-alpha-particle-induced charge transient spectroscopy of the 6H-SiC pn diode irradiated with high-energy electrons

Iwamoto, Naoya; Koizumi, Atsushi*; Onoda, Shinobu; Makino, Takahiro; Oshima, Takeshi; Kojima, Kazutoshi*; Koike, Shumpei*; Uchida, Kazuo*; Nozaki, Shinji*

IEEE Transactions on Nuclear Science, 58(6), p.3328 - 3332, 2011/12

https://doi.org/10.1109/TNS.2011.2167631

no abstracts in English

Source development and novel applications of laser-driven plasma X-ray lasers in JAEA

Kawachi, Tetsuya; Hasegawa, Noboru; Nishikino, Masaharu; Ishino, Masahiko; Imazono, Takashi; Oba, Toshiyuki; Kaihori, Takeshi; Kishimoto, Maki; Ochi, Yoshihiro; Tanaka, Momoko; et al.

X-Ray Lasers 2010; Springer Proceedings in Physics, Vol.136, p.15 - 24, 2011/12

http://ci.nii.ac.jp/ncid/BB05543208

This paper reviews recent improvement in the source development of laser-driven X-ray lasers and the applications in the research fields of material science, laser processing, X-ray imaging, and radiation damage in biological cells. In the application for material science, we have firstly observed temporal correlation between the domain structures of ferro-electric substance under the Curie temperature. In the laser processing, new X-ray laser interferometer reveals us the nano-scale surface distortion of substance pumped by a femto-second optical pulse. In the X-ray diffraction image, we have taken several static images of micro-structure of samples: now we are trying to extend the objective to nano-scale dynamics using pump and probe method. In the radiation damage of biological cells, we observed double strand break in DNA using X-ray laser exposure; this results are compared with the case using incoherent several KeV X-ray exposure.

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Fujioka, Shinsuke*; Nishikawa, Takeshi*; Koike, Fumihiro*; Ohashi, Hayato*; Tanuma, Hajime*

Journal of Applied Physics, 107(11), p.113303_1 - 113303_11, 2010/06

https://doi.org/10.1063/1.3373427

Atomic processes in Sn plasmas are investigated for application to extreme-ultraviolet (EUV) light sources used in microlithography. An atomic model of Sn is developed on the basis of calculated atomic data using the Hebrew University Lawrence Livermore Atomic Code (HULLAC). Resonance and satellite lines from singly and multiply excited states of Sn ions are identified. The wavelengths of the 4-4 + 4-4 transitions of Sn to Sn are investigated. Results of calculation are compared with those of the charge exchange spectroscopy, measurement of the emission spectrum of the laser produced plasma EUV source, and the opacity measurement of a radiatively heated Sn sample. A reasonable agreement is observed between calculated and experimental EUV emission spectra. The spectral emissivity and opacity of Sn plasmas are calculated using a full collisional radiative (CR) model as a function of electron temperature and ion density.

Atomic modeling of the plasma EUV sources

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Tanuma, Hajime*

High Energy Density Physics, 5(3), p.147 - 151, 2009/09

https://doi.org/10.1016/j.hedp.2009.04.002

We study the radiative properties of the EUV source to address conditions to achieve an output power and efficiency required for its application to the next generation microlithography. An atomic model is developed based on the atomic data calculated by Hullac code, which is validated through detailed comparisons with experimental emission and a absorption spectra. The atomic model is improved with respect to the wavelength of the strong emission lines, and the number of satellite channels taken into account. As a result, the radiation hydrodynamics model is shown to successfully reproduce the experiments. We show Sn plasma is more efficient than Xe plasma because of the atomic number dependence of the emission wavelength, and the use of CO lasers as a pumping source has an advantage to reduce satellite contribution and to have narrower emission spectrum to obtain higher conversion efficiency.

Atomic processes in the LPP and LA-DPP EUV sources

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Alternative Lithographic Technologies (Proceedings of SPIE Vol.7271), p.727130_1 - 727130_8, 2009/03

We investigate characteristic feature of the atomic radiation from tin plasmas, which allow one to obtain high power EUV emission efficiently. We develop a collisional radiative model of tin ions to calculate steady-state and time dependent ion abundance, level population, and coefficients of radiative transfer of the plasma. The model, which is based atomic data calculated using the Hullac code is refined both theoretically and experimentally. Calculation of the spectral emissivity and opacity are carried out over a wide range of plasma density and temperature, and pumping conditions to obtain high conversion efficiency are discussed.

Detailed atomic modeling of Sn plasmas for the EUV source

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Tanuma, Hajime*

Journal of Physics; Conference Series, 112, p.042062_1 - 042062_4, 2008/00

https://doi.org/10.1088/1742-6596/112/4/042062

no abstracts in English

Radiation hydrodynamic simulation of extreme ultra-violet emission from laser-produced tin plasmas

Sunahara, Atsushi*; Sasaki, Akira; Tanuma, Hajime*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Fujioka, Shinsuke*; Aota, Tatsuya*; Yamaura, Michiteru*; Shimada, Yoshinori*; et al.

Purazuma, Kaku Yugo Gakkai-Shi, 83(11), p.920 - 926, 2007/11

http://ci.nii.ac.jp/naid/110006835269

We study the EUV emission from laser produced Sn plasmas using the 1D and 2D radiation hydrodynamics simulation, for the development of EUV source for the next generation semiconductor lithography. The opacity and emissivity of the plasma used in the simulation are calculated by a detailed atomic model, with the accurate wavelength of emission lines obtained from the detailed spectroscopic measurements. Calculation is shown to reproduce the experimental spectrum and conversion efficiency reasonably, including the effect of photo pumping which modifies the EUV emission spectrum in the case with a long scale length of the plasmas.