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m band using focused proton beam三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.
Key Engineering Materials, 497, p.147 - 150, 2012/00
被引用回数：7 パーセンタイル：95.12(Engineering, Electrical & Electronic)Proton beam writing (PBW) is an attractive technique for next-generation micro-fabrication. We study the fabrication of optical waveguides of polymer materials using PBW. In this study, the optical waveguides of photorefractive polysilane "GLASSIA" was fabricated. The samples for the waveguides were prepared as follows; (1) An under-cladding layer of SiO
having a thickness of 
15 m was deposited on a Si substrate using radio-frequency sputtering. (2) A polysilane layer having a thickness of 10 m was spin-coated onto the SiO layer as a core layer. Optical waveguides were drawn by scanning a 1.7 MeV focused proton beam with 1 m size and beam current of 50 pA which was produced by a submicron focused ion beam system connected with the 3 MV single-ended accelerator at JAEA. The drawing was carried out on the dose of 100, 200, 300 nC/mm
each. After the drawing, the sample surfaces were observed using an optical microscope and AFM. The observation result showed that the refractive index was changed and the cores of the waveguides were formed. We will report the details of above observation results in the conference. The change ratio of the refraction index will also be reported on the basis of the obtained result by inserting light (
= 1.55 m) into the waveguide structure through a single-mode fiber.
m band using focused proton beam三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.
Key Engineering Materials, 497, p.147 - 150, 2011/12
被引用回数：6 パーセンタイル：2.48Single mode straight waveguides for a wavelength of 1.55-m were, so far, fabricated using a proton beam writing (PBW) technique. We report the fabrication of Y-junction polymer waveguides with a polymethyl methacralate (PMMA) layers as the expansion of these straight waveguides using PBW in the conference. The PMMA layers consisted of an under-cladding layer of SiO having a thickness of 15-m deposited on an Si substrate, a PMMA layer having a thickness of 10-m spin-coated onto the SiO layer and a Y-junction waveguide with a width of 8-m in a PMMA core layer. The Y-junction waveguides with the angle of 2
were drawn using the 1.7 MeV proton beam with 1-m in diameter and a beam current of 10 pA for a dose of 100 nC/mm. After spin-coating the PMMA layer with 10-m thickness as an upper cladding on the irradiated PMMA layer, the near field pattern (NFP) of an 8-m-width Y-junction waveguide was observed using a tunable-wavelength laser. The observation showed that the fabrication of waveguide was succeeded because its waveguide was single mode and the intensity ratio between the two outputted lights was the almost same; 1:0.96. We also briefly report the next plans of the measurement of the refractive indices of proton-irradiated PMMA and SiO films and the fabrication of a thermo-optic polymer switch based on a Mach-Zehnder interferometer waveguide.
高瀬 和之; 村松 壽晴; 関 暁之; 北村 竜明*; 町田 啓*
日本機械学会熱工学コンファレンス2009講演論文集, p.217 - 218, 2009/11
原子炉本体やその付帯設備等の健全性を確保する補修技術の確立を目的として、3次元微細加工が可能なレーザーを利用した金属材料溶接技術の開発が行われている。この開発の一環として、金属材料溶接技術の最適化を目指し、レーザー照射による金属材料の溶融挙動を数値シミュレーションによって定量評価する手法の開発を原子力基礎工学部門が行っており、この手法開発に大型計算機の運用面等から協力を行っている。具体的には、金属溶融モデルのプログラミング,入力データの作成,予備計算の実施等を行い、金属材料溶融シミュレーションの可能性についてシステム計算科学の立場から助言を行っている。本報では、予備的に実施した金属溶融シミュレーションをもとに可視化処理した結果について述べる。
三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 高野 勝昌*; 大久保 猛; 山崎 明義; et al.
no journal, ,
Mach-Zehnder interferometer (MZI) type thermo-optic switches are recently increasing the importance in the fields, such as optical fiber telecommunication and optical interconnection. The optical waveguides using planar polymers are developed as a component of MZI. On the other hand, proton beam writing (PBW), which is a direct-writing technique, has recently attracted much attention as a next generation micro-fabrication technology. In this paper, the fabrication of the optical waveguides was tried to be directly drawn using the PBW technique in a thin polymethyl methacrylate (PMMA) layer spin-coated on a Si substrate because the refractive index of PMMA was increased by proton beam irradiation. As a result of this study, we demonstrated that the straight-line and the Y-junction PMMA film waveguides were successfully fabricated using PBW from the observation of working as a first single-mode at =1.55 m for long-haul optical fiber telecommunication systems. We will present that the fabrication results of the optical waveguides and future plans in the conference.
