Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
Toyoda, Satoshi*; Yoshimura, Masashi*; Sumida, Hirosuke*; Mineoi, Susumu*; Machida, Masatake*; Yoshigoe, Akitaka; Yoshikawa, Akira*; Suzuki, Satoru*; Yokoyama, Kazushi*
Hoshako, 35(3), p.200 - 206, 2022/05
The present status of spatiotemporal depth profiling analysis of the multilayer stacked film interface based on Ambient Pressure X-ray Photoelectron Spectroscopy (APXPS) is presented. To begin with, depth profiles of the multilayer stacked film interfaces have been achieved by time-division Near Ambient Pressure Hard X-ray Angle-Resolved PhotoEmission Spectroscopy data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division angle resolved AP-XPS data including spatial resolution, which enables us to realize spatiotemporal depth profiles of the interfaces under reaction conditions such as oxidation and reduction. In addition, it is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling is effective to perform dynamic measurement of depth profiles with high precision.
measurement and analysis techniques in X-ray photoelectron spectroscopy; From NAP-HARPES to 4D-XPSToyoda, Satoshi*; Yamamoto, Tomoki*; Yoshimura, Masashi*; Sumida, Hirosuke*; Mineoi, Susumu*; Machida, Masatake*; Yoshigoe, Akitaka; Suzuki, Satoru*; Yokoyama, Kazushi*; Ohashi, Yuji*; et al.
Vacuum and Surface Science, 64(2), p.86 - 91, 2021/02
We have developed measurement and analysis techniques in X-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard X-ray Angle-Resolved Photo Emission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.
Yamaguchi, Masatake; Matsumoto, Atsushi; Machida, Masahiko
Oyo Suri, 20(1), p.67 - 69, 2010/03
no abstracts in English
Machida, Masahiko; Okumura, Masahiko; Nakamura, Hiroki; Yamaguchi, Masatake
no journal, ,
no abstracts in English
