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Mannan, M. A.*; Baba, Yuji; Kida, Tetsuya*; Nagano, Masamitsu*; Noguchi, Hideyuki*
Materials Sciences and Applications, 6(5), p.353 - 359, 2015/05
The synthesis and structure of hexagonal boron carbonitride (h-BCN) film on polycrystalline diamond surface were reported. Polycrystalline diamond and/or diamond-like carbon were first fabricated on Si (100) and then it was used as substrate. The deposition was performed by radio frequency plasma enhanced chemical vapor deposition. In order to reduce the content of nitrogen void defects, the deposition was performed at the high temperature of 950
C under the working pressure of 2.6 Pa. The typical sample with atomic composition of B
C
N
O
in the h-BCN lattice was characterized by X-ray photoelectron spectroscopy. The fine structure of the film was studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The B K-edge and N K-edge of NEXAFS spectra revealed that the synthesized h-BCN film has the ideal honeycomb-like BN
configuration without nitrogen void defects.
Mannan, M. A.*; Baba, Yuji; Hirao, Norie; Kida, Tetsuya*; Nagano, Masamitsu*; Noguchi, Hideyuki*
Materials Sciences and Applications, 4(5A), p.11 - 19, 2013/05
Hexagonal nano-crystalline boron carbonitride (h-BCN) films grown on Si (100) substrate have been investigated. The films were synthesized by radio frequency plasma enhanced chemical vapor deposition using tris-dimethylamino borane as a precursor. Formation of the nano-crystalline h-BCN compound has been confirmed by X-ray diffraction analysis. The films composed of B, C, and N atoms with different B-N, B-C, C-N chemical bonds in forming the sp2-BCN atomic configuration studied by X-ray photoelectron spectroscopy. Orientation and local structures of the h-BCN hybrid were studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The dominant presence of 
and 
resonance peaks of the sp2-hybrid orbitals in the B K-edge NEXAFS spectra revealed the formation of the flat sp2-BCN configuration around B atoms which are bound with three nitrogen atoms.
Mannan, M. A.*; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Nagano, Masamitsu*; Noguchi, Hideyuki*
Journal of Nanomaterials, 2012, p.528256_1 - 528256_9, 2012/00
Times Cited Count：0 Percentile：0(Nanoscience & Nanotechnology)Molecular orientations for thin films of one-dimensional silicon polymers grown by vacuum evaporation have been assigned by X-ray absorption fine structure (XAFS) using linearly polarized synchrotron radiation. For XAFS spectra of polydimethlysilane (PDMS) films on highly oriented pyrolytic graphite (HOPG), the intensities of two peaks were found to be strongly polarization dependent. Quantitative evaluation of the polarization dependence of the XAFS spectra revealed that the polymers are oriented nearly parallel to the surface. The observed orientation is opposite to the previously observed results for PDMS on oxide (indium tin oxide) and metal (polycrystalline copper). The flat-lying feature of PDMS observed only on HOPG surface is attributed to the interaction between CH bonds in PDMS and orbitals in HOPG surface.
Mannan, M. A.*; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Nagano, Masamitsu*; Noguchi, Hideyuki*
Photon Factory Activity Report 2011, Part B, P. 159, 2012/00
no abstracts in English
Mannan, M. A.; Baba, Yuji; Kida, Tetsuya*; Nagano, Masamitsu*; Shimoyama, Iwao; Hirao, Norie; Noguchi, Hideyuki*
Thin Solid Films, 519(6), p.1780 - 1786, 2011/01
Times Cited Count：19 Percentile：61.3(Materials Science, Multidisciplinary)Orientation of BCN hybrid films synthesized on Ni (111) and Ti substrates by radio frequency plasma enhanced chemical vapor deposition has been investigated. Formation of the 
-BCN hybrids was confirmed by X-ray diffraction. Raman spectra also suggested the presence of graphite-like -BCN hybrid bonds. Orientation and local structures of the films were studied by the near-edge X-ray absorption fine structure (NEXAFS) measurements using synchrotron radiation. The B K-edge NEXAFS spectra revealed the preferred formation of the -BCN hybrid configuration around the B atoms like-BN on Ni (111). It was revealed that the BCN film is parallel to the surface on Ni(111). On the other hand, the film is randomly oriented on Ti surface. It was suggested that the chemical reactivity of the metal surface affects the orientation of the BCN hybrid film.
Mannan, M. A.*; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Narita, Ayumi; Nagano, Masamitsu*; Noguchi, Hideyuki*
Journal of Electron Spectroscopy and Related Phenomena, 181(2-3), p.242 - 248, 2010/08
Times Cited Count：5 Percentile：31.14(Spectroscopy)The ordering and molecular orientation of polydimethylsilane (PDMS) films grown on indium tin oxide (ITO) surface has been assigned. The orientation of the samples as well as that of the annealed sample was studied by Si K-edge near-edge X-ray absorption fine structure (NEXAFS) and X-ray photoelectron spectroscopy using linearly polarized synchrotron radiation. The Si K-edge NEXAFS spectra for the thick film have at least four resonance peaks of which two peaks are found to be strongly polarization dependent. On the basis of the polarization dependences of the peak intensities, it is revealed that the backbones of the PDMS films are perpendicularly oriented on the ITO surface. The angle between surface and the Si-Si bonds for multilayered film calculated from the helical structure of PDMS molecule was found to be 41.5 which was almost coincided with the experimentally obtained angle of 40 . It was concluded that PDMS molecules are highly self-ordered on ITO surface.
Mannan, M. A.; Noguchi, Hideyuki*; Kida, Tetsuya*; Nagano, Masamitsu*; Hirao, Norie; Baba, Yuji
Thin Solid Films, 518(15), p.4163 - 4169, 2010/05
Times Cited Count：30 Percentile：73.92(Materials Science, Multidisciplinary)Hexagonal boron carbonitride (h-BCN) hybrid films have been synthesized on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition using tris-(dimethylamino)borane as a single-source molecular precursor. The films were characterized by X-ray photoelectron spectroscopy (XPS), near-edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopic measurements. XPS measurement showed that the B atoms were bonded to C and N atoms to form the BCN hybrid chemical environment. The atomic composition estimated from the XPS of the typical sample was found to be almost B1C1N1. NEXAFS spectra of the B K-edge and the N K-edge had the peaks due to the and resonances of hybrid orbitals implying the existence of the 
hybrid configurations of h-BCN around the B atoms.
Kida, Tetsuya*; Shigezumi, Kazuya*; Mannan, M. A.*; Akiyama, Morito*; Baba, Yuji; Nagano, Masamitsu*
Vacuum, 83(8), p.1143 - 1146, 2009/05
Times Cited Count：15 Percentile：51.83(Materials Science, Multidisciplinary)Boron carbonitride films were deposited on Si substrates by plasma-enhanced chemical vapor deposition using a powdered precursor of trimethylamine borane. The effect of using different carrier gasses and microwave powers was investigated. Field emission scanning electron microscopy revealed that the films have a nanofibrous structure with elongated features 20 nm in diameter and 200 nm in length. Fourier transfer infrared spectroscopy was used to investigate chemical bonding states present in the deposited films. The FT-IR results suggested that the films have multiple chemical bonding states including C-N, B-N, and B-C bonds, as well as oxygen incorporation in the form of B-O bonds. Mixing the powdered precursor with molecular sieve was found to reduce the oxygen content in the films by removing surface adsorbed water from the precursor.
Mannan, M. A.*; Kida, Tetsuya*; Noguchi, Hideyuki*; Nagano, Masamitsu*; Shimoyama, Iwao; Hirao, Norie; Baba, Yuji
Journal of the Ceramic Society of Japan, 117(1364), p.503 - 507, 2009/04
Times Cited Count：11 Percentile：53.79(Materials Science, Ceramics)Oriented hexagonal BCN films were synthesized on Si(100) substrate by radiofrequency plasma enhanced chemical vapor deposition using tris-(dimethylamino)borane as a precursor. The formation of the crystalline hexagonal BCN hybrids was confirmed by FT-IR and XRD. CH
+ H
carrier gas increased the C content in the films in comparison with N carrier gas. XPS measurement showed that the films were composed of a variety of B-N, B-C, C-N bonds to form the BCN atomic hybrids. The resonance peak in the B K-edge NEXAFS spectra also indicated the presence of the 
hybrid configuration of B-C-N bonds like BN in h-BN. The resonance peaks suggested the diversity in the bonds in the films. Orientation of the h-BCN hybrids was suggested on the basis of the polarization dependence of NEXAFS.
Mannan, M. A.*; Nagano, Masamitsu*; Kida, Tetsuya*; Hirao, Norie; Baba, Yuji
Journal of Physics and Chemistry of Solids, 70(1), p.20 - 25, 2009/01
Times Cited Count：50 Percentile：83.99(Chemistry, Multidisciplinary)Boron carbonitride (BCN) films have been synthesized on Si(100) substrate by radio frequency plasma enhanced chemical vapor deposition using Tris-(dimethylamino)borane (TDMAB) as a precursor. The formation of the sp-bonded BCN phase was confirmed by Fourier transform infrared spectroscopy. X-ray photoelectron spectroscopy measurements showed that B atoms were bonded to C and N atoms to form the BCN atomic hybrid configurations. Near-edge X-ray absorption fine structure measurements indicated that B atoms were bonded not only to N atoms but also to C atoms to form various configurations of sp-BCN atomic hybrids. The polarization-dependence of NEXAFS suggested that the predominant hybrid configuration of sp-BCN films oriented in the direction perpendicular to the Si substrate.
Mannan, M. A.; Noguchi, Hideyuki*; Kida, Tetsuya*; Nagano, Masamitsu*; Hirao, Norie; Baba, Yuji
Materials Science in Semiconductor Processing, 11(3), p.100 - 105, 2008/06
Times Cited Count：24 Percentile：72.81(Engineering, Electrical & Electronic)In order to synthesize oriented hexagonal boron carbonitride (h-BCN) films, borane-triethylamine complex was used as a single-source precursor. The films were deposited on Si(100) substrate by microwave plasma-enhanced chemical-vapor deposition using CH+H as the carrier gas. Fourier transform infrared spectroscopy (FT-IR) confirmed the formation of hexagonal BCN phase in a short-range order. The chemical composition and the local structures of films were studied by X-ray photoelectron spectroscopy (XPS) and the near-edge X-ray absorption fine structure (NEXAFS) spectroscopic measurements. The NEXAFS measurement suggested that the B atoms are bonded not only to the N atoms but also to the C atoms to form various local structures of sp B-C-N hybrid configurations. The polarization dependence of NEXAFS suggested that the local structures of the sp BCN layers have different atomic orientations to the substrate.
Mannan, M. A.*; Nagano, Masamitsu*; Hirao, Norie*; Baba, Yuji
Chemistry Letters, 37(1), p.96 - 97, 2008/01
Times Cited Count：12 Percentile：43.74(Chemistry, Multidisciplinary)Hexagonal boron carbonitride (h-BCN) films have been synthesized on silicon (100) substrate by radio frequency plasma enhanced chemical vapor deposition from tris(dimethylamino)-borane (TDMAB) as a precursor. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy revealed that the film with a composition of B
C
N
had sp B-C-N atomic hybridization. Near edge X-ray absorption fine structure suggested that the local structure of BCN showed different atomic orientation to the substrate.
Mannan, M. A.*; Nagano, Masamitsu*; Shigezumi, Kazuya*; Kida, Tetsuya*; Hirao, Norie*; Baba, Yuji
American Journal of Applied Sciences, 5(6), p.736 - 741, 2008/00
Boron carbonitride thin films with a thickness of 4 micrometer were synthesized on Si(100) substrate by radiofrequency and microwave plasma enhanced vapor deposition using trimethylamine boran as a precursor. It has bee observed that the films were adhered well to the silicon substrate even after being broken mechanically. X-ray diffraction (XRD) and filed emission scanning electron microscopy (FE-SEM) results showed that the films were amorphous and the surface was rough with inhomogeneous microstructure. On the basis of the X-ray photoelectron spectra (XPS), it was elucidated that B, C and N atoms have different chemical bonds such as B-N, B-C and C-N.
Mannan, M. A.*; Nagano, Masamitsu*; Hirao, Norie*; Baba, Yuji
Proceedings of 24th Japan-Korea International Seminar on Ceramics, p.289 - 292, 2007/11
Boron carbonitride thin films were synthesized on Si(100) substrate by radiofrequency and microwave plasma enhanced vapor deposition using tris-dimethylamino borane as a precursor. The formation of the hexagonal phase of BCN films was confirmed by Fourier-transform infrared (FT-IR) spectroscopy. The measurements of X-ray photoelectron spectra (XPS) showed that boron atoms bonded to C and N atoms. The results for near edge X-ray absorption fine structures (NEXAFS) using synchrotron radiation supports the XPS results where B atoms bonded not only to nitrogen but also to carbon atoms to form various local structures. The polarization dependence of NEXAFS suggested that the local structures of BCN have different orientations in the films.
Mannan, M. A.*; Kida, Tetsuya*; Nagano, Masamitsu*; Hirao, Norie*; Baba, Yuji
Advanced Ceramic Processing International, 3(1), p.51 - 54, 2006/11
B-C-N hybrid thin films were synthesized by plasma enhanced chemical vapor deposition using liquid organic molecules (tris-dimethylamine borane and trimethylamine borane) as molecular precursors. The Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy investigations suggest that the films are composed of hybridized boron, carbon and nitrogen atoms. The X-ray diffraction and field emission scanning electron microscopy investigations reveal that the films are almost amorphous and have micro-structure at 4.2-4.5 
m. The micro-hardness of the as-deposited B-C-N films is found to be approximately 2-7 Gpa. It was concluded that the plasma enhanced chemical vapor deposition using the present organic molecules are suited for the synthesis of B-C-N hybrid thin films.
Mannan, M. A.*; Nagano, Masamitsu*; Hirao, Norie*; Baba, Yuji
no journal, ,
no abstracts in English
Mannan, M. A.; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Narita, Ayumi; Nagano, Masamitsu*; Noguchi, Hideyuki*
no journal, ,
The electronic structure and molecular orientation of polydimethylsilane (PDMS) film evaporated on indium tin oxide (ITO) surface have been assigned. The film has been synthesized by high vacuum electron bombardment evaporation technique. The orientation and electronic structure of the film as well as those of the annealed sample were studied by Si K-edge NEXAFS and X-ray photoelectron spectroscopy. The Si K-edge NEXAFS spectra for the thick film have at least four resonance peaks of which two peaks are found to be strongly polarization dependent. The lower-energy resonance peak at 1842.0 eV has short-axis polarization corresponding to the resonance excitation from Si 1s to s* (pyz), and the higher-energy resonance peak at 1843.2 eV has long-axis polarization due to the excitation of Si 1s to s* (px). On the basis of the polarization dependences, it is revealed that the backbones of the PDMS polymers are perpendicularly oriented to the ITO surface.
Mannan, M. A.; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Narita, Ayumi; Nagano, Masamitsu*; Noguchi, Hideyuki*
no journal, ,
no abstracts in English
Mannan, M. A.; Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie; Narita, Ayumi; Nagano, Masamitsu*; Noguchi, Hideyuki*
no journal, ,
no abstracts in English
Sekiguchi, Tetsuhiro; Baba, Yuji; Shimoyama, Iwao; Hirao, Norie; Narita, Ayumi; Mannan, M. A.*; Koswattage, K.
no journal, ,
Recently much higher-quality thin films are needed in the field of organic semiconductor development. We report on the project started recently: Method to map direction of chemical -bonds in nanometer scale. We are striving to develop a unique instrument to measure polarization-angle dependence of Near-edge X-ray absorption fine structure (NEXAFS) spectra at nano-meter level using photoelectron emission microscopy (PEEM), in order to understand creation and growth mechanisms of oriented domains. It is possible to measure XAFS spectra of microscopic regions magnified by the PEEM scope. The most unique point is the fact that the PEEM column can be rotated along the axis of synchrotron beam, so that one can measure polarization-angle dependences of such micro-XAFS spectra. Moreover, we demonstrate that other experimental and theoretical methods which provide complementary information for chemical and electronic states of organic films.
