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山田 貴壽*; 小川 修一*; 吉越 章隆; 津田 泰孝; 増澤 智昭*; 岡田 光博*; 小橋 和文*; 沖川 侑揮*
Japanese Journal of Applied Physics, 64(7), p.07SP17_1 - 07SP17_5, 2025/07
被引用回数:0 パーセンタイル:0.00(Physics, Applied)Effect of potassium (K) concentration on electrical properties of stacked graphene layers was investigated. Stacked graphene layers were fabricated by repeated wet transfer process using chemical vapor deposited (CVD) single layer graphene on copper foils. Two kinds of K concentration in potassium hydroxide (KOH) solutions were used to change the K concentration in the stacked graphene layers. Non-doped stacked graphene layers were also fabricated as reference. In synchrotron-radiation X-ray photoelectron spectra, peaks due to K and carbon (C) were obtained. It was found from the obtained peak intensities that K/C peak intensity ratio was increase with increasing of K concentration in KOH solution. No defect or damage in the stacked graphene layers during doping process using KOH solutions was not formed from results of Raman spectroscopy. Sheet resistance, sheet carrier density and carrier mobility were measured by means of Hall effect measurements. Carrier polarity was changed from hole to electron by K doping. Although the sheet carrier densities of lightly and heavily K-doped graphene layers were almost same, the highest carrier mobility was obtained for lightly K-doped graphene layers. Electrons are doped from K atoms to compensate for the naturally existing holes in the stacked graphene layers, and the excess electrons doped from K atoms in the conduction band, which were measured the sheet carrier density, contribute to carrier transport. However, the additional K atoms act as scattering centers and inhibit carrier transport, which explains the decrease in carrier density in the highly K-doped graphene layers.
小川 修一*; 津田 泰孝; 坂本 徹哉*; 沖川 侑揮*; 増澤 智昭*; 吉越 章隆; 虻川 匡司*; 山田 貴壽*
Applied Surface Science, 605, p.154748_1 - 154748_6, 2022/12
被引用回数:10 パーセンタイル:56.34(Chemistry, Physical)グラフェンのKOH溶液への浸漬により、SiO
/Siウェハ上のグラフェンの移動度が改善される。これはK原子によるグラフェン修飾による電子ドーピングのためと考えられるが、このときのグラフェンに含まれるK濃度は不明だった。本研究では高輝度放射光を用いたXPS分析によりK濃度を求めた。リアルタイム観察によりK原子濃度の時間変化を求め、放射光未照射時のK原子濃度は0.94%と推定された。また、K原子の脱離に伴ってC 1sスペクトルが低結合エネルギー側にシフトした。これはグラフェンへの電子ドープ濃度が減少していることを示し、K原子はグラフェンに電子注入していることが実験的に確かめられた。