Hyperthermal molecular beam deposition of DLC using laser-induced detonation phenomena

Tagawa, Masahito*; Asada, Hidetoshi*; Matsuura, Yoshimitsu*; Yokota, Kumiko*; Teraoka, Yuden; Kitamura, Akira*; Fontaine, J.*; Belin, M.*

no journal, , 

New room-temperature deposition technology of a hydrogenated diamond-like carbon (DLC) film was developed with hyperthermal hydrocarbon beams. Four CH molecular beams with different beam energy and ion composition were prepared and deposited DLC films were evaluated by various surface analytical methods including Raman spectroscopy, RBS and SR-PES. It was found that hydrogenated (20-30%) DLC films can be deposited with use of CH as a source gas. It was also shown that the DLC film deposited with a CH beam including relatively high ion component exhibit better tribological properties.