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Komatsu, Yuya*; Shimizu, Ryota*; Sato, Ryuhei*; Wilde, M.*; Nishio, Kazunori*; Katase, Takayoshi*; Matsumura, Daiju; Saito, Hiroyuki*; Miyauchi, Masahiro*; Adelman, J. R.*; et al.
Chemistry of Materials, 34(8), p.3616 - 3623, 2022/04
Times Cited Count：9 Percentile：75.5(Chemistry, Physical)Koike, Masato; Miyauchi, Shinji*; Sano, Kazuo*; Imazono, Takashi
Nanophotonics and Nanofabrication, p.179 - 191, 2009/05
Multilayer gratings having a groove density of 7600 lines/mm have been fabricated by depositing Mo/SiO
multilayer coating on the surface of laminar-type master gratings fabricated by use of a new lithography machine based on optical near field technologies. The diffraction efficiency was measured by reflectometers in the wavelength range of 0.7 - 2.0 nm at a synchrotron radiation facility. The multilayer grating having a groove depth of 3 nm and multilayer period length of 5.33 nm showed diffraction efficiencies of 0.032 at 0.70 nm (1.77 keV) and 0.016 at 1.19 nm (1.04 keV) were observed for the incidence angles of 88.020 deg and 85.230 deg, respectively. We also discuss an analysis of the roughness in terms of Debye-Waller factor comparing the experimental and theoretical diffraction efficiencies.
Miyauchi, Shinji*; Koike, Masato
Shimazu Hyoron, 62(3-4), p.193 - 199, 2006/03
no abstracts in English
Miyauchi, Shinji*; Koike, Masato
Shimazu Hyoron, 62(3-4), p.193 - 199, 2006/03
Though many analytical methods for diffractive gratings have been suggested, all of them have to need smaller elements or upper order Fourie coefficients for enough accuracy calculation. Generally it comes to a huge matrix equation, so they have to be more or less restricted by computer power (CPU speed, amount of Memory). Here we briefly introduce Rigorous Coupled Wave Analysis (RCWA) and Boundary Element Method (BEM), which are representative analytical methods for diffraction gratings. Then we theoretically consider proper wave-length range for each method and show that propriety by comparison of diffractive efficiency measurement and its analytical result.
Koike, Masato; Kawazoe, Tadashi*; Imazono, Takashi; Miyauchi, Shinji*; Sano, Kazuo*; Otsu, Motoichi*
no journal, ,
Multilayer gratings having a groove density of 7600 lines/mm have been fabricated by depositing Mo/SiO multilayer coating on the surface of laminar-type master gratings fabricated by use of a new lithography machine based on optical near field technologies. The diffraction efficiency was measured by reflectometers in the wavelength range of 0.7-2.0 nm at a synchrotron radiation facility. The multilayer grating having a groove depth of 3nm and multilayer period length of 5.33 nm showed diffraction efficiencies of 0.028 at 0.70 nm and 0.005 at 2.0 nm were observed for the incidence angles of 88.020 deg and 80.764 deg, respectively. We also discuss the analysis of the roughness in terms of Debye-Waller factor comparing the experimental and theoretical diffraction efficiencies as well as the groove depth using experimental efficiency minima of the zero-th order light.
