Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
Initialising ...
高橋 伸明*; 村田 裕彦*; 三堀 仁志*; 桜庭 順二*; 曽我 知洋*; 青木 康*; 加藤 隆典*; 齋藤 勇一; 山田 圭介; 池永 訓昭*; et al.
Review of Scientific Instruments, 85(2), p.02C306_1 - 02C306_3, 2014/02
被引用回数:2 パーセンタイル:11.31(Instruments & Instrumentation)Microwave ion source is one of the long-life ion sources, which has been developed for industrial applications such as ion implantation. In this paper, the characteristics of the extracted Ar ion beam from the plasma were studied under various conditions, in terms of magnetic field and pressure of gas. The measured spectra show that, within the experimental condition, most of the beam constituents were singly charged ions, Ar in contrast to ECR ion sources which permits to obtain high current useful for ion implantation. The details of the beam characteristics will be presented corresponding the magnetic field and the pressure of gas.
村田 篤*; 猿田 晃一; 涌井 隆; Li, Y.*; 二川 正敏; 大島 良太*; 古河 裕彦*
no journal, ,
高放射線環境における異常診断法として、光音場計測技術の適用性を検討するために、レーザードップラー振動計(LDV)による音場測定を行った。LDV検出値の光路長依存性や音源周波数依存性などの実験結果と音場の数値解析結果に基づき、異常診断へ適用するときに重要となるLDV検出特性について述べる。