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Nakazato, Tomoharu*; Furukawa, Yusuke*; Tanaka, Momoko; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi*; Nagashima, Keisuke; Kimura, Toyoaki*; Murakami, Hidetoshi*; Saito, Shigeki*; et al.
Journal of Crystal Growth, 311(3), p.875 - 877, 2009/01
Times Cited Count:24 Percentile:86.17(Crystallography)The temperature dependence of scintillation properties of a hydrothermal-method-grown zinc oxide (ZnO) emission is investigated using a nickel-like silver laser emitting at 13.9 nm. A broad peak at 386 nm with a full-width at half-maximum (FWHM) of 15 nm at room temperature (298 K) is obtained. The peak position tends to be blue shifted while the FWHM becomes narrower when the crystal temperature is decreased to 25 K. Streak images fitted by a double exponential decay reveal that the measured emission decay at 105 K was = 0.88 ns and = 2.7 ns. This decay time of a few nanoseconds is suitable for lithographic applications and is sufficiently short for the characterization of laser plasma extreme ultraviolet (EUV) sources with nanosecond durations.
Tanaka, Momoko; Furukawa, Yusuke*; Nakazato, Tomoharu*; Tatsumi, Toshihiro*; Murakami, Hidetoshi*; Shimizu, Toshihiko*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Kawachi, Tetsuya; Kagamitani, Yuji*; et al.
X-Ray Lasers 2008; Springer Proceedings in Physics, Vol.130, p.501 - 505, 2009/00
We measured the time-resolved fluorescence spectra of ZnO and GaN single crystals excited by an X-ray laser operating at 13.9 nm and evaluated their scintillation properties for EUV excitation as compared with UV excitation case. For ZnO, a clear fluorescence peak of excitonic origin was observed at around 380 nm and the decay lifetime of less than 3 ns is found to be almost similar to the UV excitation case. The fluorescence at 380 nm is ideal for scintillator device design in the EUV and further applications. For GaN, the lifetimes are much longer than ZnO and the temporal profile of the EUV-excited fluorescence differs with the UV excitation case. As such, the EUV scintillation properties of ZnO is said to be more favorable than GaN. Finally, it is also demonstrated that an X-ray laser is an excellent tool for spectroscopic characterization of materials intended for next-generation lithography applications.
Furukawa, Yusuke*; Tanaka, Momoko; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nishimura, Hiroaki*; Mima, Kunioki*; Kagamitani, Yuji*; et al.
Reza Kenkyu, 36(APLS), p.1028 - 1030, 2008/12
Optical technologies in extreme ultraviolet (EUV) region have been receiving strong interests for the next generation lithography. Here we report properties of ZnO as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The ZnO sample was irradiated with EUV laser pulses and the fluorescence was measured using a streak camera fitted with a spectrograph. A clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. The prominent peak fluorescence is ideal for EUV detection and further applications including imaging.
Sawada, Shinichi; Yamaki, Tetsuya; Nishimura, Hidetoshi*; Asano, Masaharu; Suzuki, Akihiro*; Terai, Takayuki*; Maekawa, Yasunari
Solid State Ionics, 179(27-32), p.1611 - 1614, 2008/09
Times Cited Count:13 Percentile:50.66(Chemistry, Physical)We measured the self-diffusion coefficient of water, D, in proton exchange membranes (PEMs) based on crosslinked polytetrafluoroethylene (PTFE) films by a radiotracer-permeation method using tritium labeled water (HTO). When the crosslinking density of the PTFE matrix increased, the D value became smaller. This decreasing trend coincided with that of a water-content parameter, , defined as the number of water molecules per sulfonic acid (SOH) group. According to the model assumption of hydrophilic regions, the relationship between the D and indicates that the amount of free water in the crosslinked-PTFE PEMs could be lower than that in the non-crosslinked one, thereby restricting the mobility of water molecules through strong interactions between the majority of water and SOH groups.
Furukawa, Yusuke*; Tanaka, Momoko; Nakazato, Tomoharu*; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Murakami, Hidetoshi*; Saito, Shigeki*; et al.
Journal of the Optical Society of America B, 25(7), p.B118 - B121, 2008/07
Times Cited Count:24 Percentile:72.65(Optics)Using EUV laser operated at 13.9 nm ZnO and GaN are shown to be excellent scintillators in this wavelength region. Especially ZnO has short response time of 3 ns and prominent peak fluorescence from excitation at 380 nm.
Tanaka, Momoko; Furukawa, Hiroyuki*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kagamitani, Yuji*; Ehrentraut, D.*; et al.
Journal of Physics; Conference Series, 112(4), p.042058_1 - 042058_4, 2008/00
Times Cited Count:1 Percentile:55.21(Physics, Fluids & Plasmas)Optical technologies in the extreme ultraviolet (EUV) region have been receiving strong interest for the next generation lithography. Efficient and fast scintillators are one of the key devices functioning in the EUV region. In this paper, we report excellent properties of ZnO and GaN as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The sample was irradiated with EUV laser pulses, and the fluorescence spectrum and the fluorescence lifetime were measured using a streak camera fitted with a spectrograph. In the case of ZnO, a clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. For GaN, a fluorescence peak at 370 nm having slower 5-ns decay time was observed. In this respect, the EUV scintillation properties of ZnO is said to be more favorable than GaN.
Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; et al.
Applied Physics Letters, 91(23), p.231117_1 - 231117_3, 2007/12
Times Cited Count:52 Percentile:84.56(Physics, Applied)The scintillation properties of a hydrothermal method grown zinc oxide (ZnO) crystal are evaluated for extreme ultraviolet (EUV) laser excitation at 13.9 nm wavelength. The exciton emission lifetime at around 380 nm is determined to be 1.1 ns, almost identical to ultraviolet laser excitation cases. This fast response time is sufficiently short for characterizing EUV lithography light sources having a few nanoseconds duration. The availability of large size ZnO crystal up to 3-inch is quite attractive for future lithography and imaging applications.
Hoshino, Tsuyoshi; Yasumoto, Masaru*; Tsuchiya, Kunihiko; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*
Fusion Engineering and Design, 82(15-24), p.2269 - 2273, 2007/10
Times Cited Count:53 Percentile:94.98(Nuclear Science & Technology)no abstracts in English
Ninomiya, Hiromasa; Akiba, Masato; Fujii, Tsuneyuki; Fujita, Takaaki; Fujiwara, Masami*; Hamamatsu, Kiyotaka; Hayashi, Nobuhiko; Hosogane, Nobuyuki; Ikeda, Yoshitaka; Inoue, Nobuyuki; et al.
Journal of the Korean Physical Society, 49, p.S428 - S432, 2006/12
To contribute DEMO and ITER, the design to modify the present JT-60U into superconducting coil machine, named National Centralized Tokamak (NCT), is being progressed under nationwide collaborations in Japan. Mission, design and strategy of this NCT program is summarized.
Kikuchi, Mitsuru; Tamai, Hiroshi; Matsukawa, Makoto; Fujita, Takaaki; Takase, Yuichi*; Sakurai, Shinji; Kizu, Kaname; Tsuchiya, Katsuhiko; Kurita, Genichi; Morioka, Atsuhiko; et al.
Nuclear Fusion, 46(3), p.S29 - S38, 2006/03
Times Cited Count:13 Percentile:41.76(Physics, Fluids & Plasmas)The National Centralized Tokamak (NCT) facility program is a domestic research program for advanced tokamak research to succeed JT-60U incorporating Japanese university accomplishments. The mission of NCT is to establish high beta steady-state operation for DEMO and to contribute to ITER. The machine flexibility and mobility is pursued in aspect ratio and shape controllability, feedback control of resistive wall modes, wide current and pressure profile control capability for the demonstration of the high-b steady state.
Hoshino, Tsuyoshi; Yasumoto, Masaru*; Tsuchiya, Kunihiko; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*
Fusion Engineering and Design, 81(1-7), p.555 - 559, 2006/02
Times Cited Count:18 Percentile:76.2(Nuclear Science & Technology)no abstracts in English
Tsuchiya, Katsuhiko; Akiba, Masato; Azechi, Hiroshi*; Fujii, Tsuneyuki; Fujita, Takaaki; Fujiwara, Masami*; Hamamatsu, Kiyotaka; Hashizume, Hidetoshi*; Hayashi, Nobuhiko; Horiike, Hiroshi*; et al.
Fusion Engineering and Design, 81(8-14), p.1599 - 1605, 2006/02
Times Cited Count:1 Percentile:9.98(Nuclear Science & Technology)no abstracts in English
Tamai, Hiroshi; Akiba, Masato; Azechi, Hiroshi*; Fujita, Takaaki; Hamamatsu, Kiyotaka; Hashizume, Hidetoshi*; Hayashi, Nobuhiko; Horiike, Hiroshi*; Hosogane, Nobuyuki; Ichimura, Makoto*; et al.
Nuclear Fusion, 45(12), p.1676 - 1683, 2005/12
Times Cited Count:15 Percentile:45.53(Physics, Fluids & Plasmas)Design studies are shown on the National Centralized Tokamak facility. The machine design is carried out to investigate the capability for the flexibility in aspect ratio and shape controllability for the demonstration of the high-beta steady state operation with nation-wide collaboration, in parallel with ITER towards DEMO. Two designs are proposed and assessed with respect to the physics requirements such as confinement, stability, current drive, divertor, and energetic particle confinement. The operation range in the aspect ratio and the plasma shape is widely enhanced in consistent with the sufficient divertor pumping. Evaluations of the plasma performance towards the determination of machine design are presented.
Kubono, Shigeru*; Teranishi, Takashi*; Notani, Masahiro*; Yamaguchi, Hidetoshi*; Saito, Akito*; He, J. J.*; Wakabayashi, Yasuo*; Fujikawa, Hisashi*; Amadio, G.*; Baba, Hidetada*; et al.
Nuclear Physics A, 758, p.733 - 736, 2005/07
Times Cited Count:1 Percentile:14.45(Physics, Nuclear)With using RNB from CRIB, proton inelastic scattering was observed. From this experiment, some resonance parameters have been deduced for the key reaction, at the explosive hydrogen burning stage in stars. Proton inelastic scattering of are also reported.
Wada, Ryutaro*; Nishimura, Tsutomu*; Shimogori, Kazutoshi*; Tomari, Haruo*; Masugata, Tsuyoshi*; Shimoda, Hideaki*; Fujiwara, Kazuo*; Nishimoto, Hidetoshi*; Oda, Masashi*
PNC TJ1058 98-002, 159 Pages, 1998/02
None
Wada, Ryutaro*; Nishimura, Tsutomu*; Shimogori, Kazutoshi*; Tomari, Haruo*; Masugata, Tsuyoshi*; Shimoda, Hideaki*; Fujiwara, Kazuo*; Nishimoto, Hidetoshi*; Oda, Masashi*
PNC TJ1058 98-001, 446 Pages, 1998/02
None
Higuchi, Hidetoshi; Koizumi, Kenji; Washiya, Tadahiro; Morita, Shinichi; Chikazawa, Takahiro*; Nishimura, Kenji*; Kikuchi, Toshiaki*
no journal, ,
Influence of UNH crystal on heat transfer performance of Crystallizer.
Hoshino, Tsuyoshi; Tsuchiya, Kunihiko; Hayashi, Kimio; Yasumoto, Masaru*; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*
no journal, ,
no abstracts in English
Sato, Kosuke*; Hoshino, Tsuyoshi; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*
no journal, ,
no abstracts in English
Yamaki, Tetsuya; Sawada, Shinichi; Sekine, Toshihiko; Asano, Masaharu; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*; Maekawa, Yasunari
no journal, ,
no abstracts in English