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Journal Articles

Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography

Nakazato, Tomoharu*; Furukawa, Yusuke*; Tanaka, Momoko; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi*; Nagashima, Keisuke; Kimura, Toyoaki*; Murakami, Hidetoshi*; Saito, Shigeki*; et al.

Journal of Crystal Growth, 311(3), p.875 - 877, 2009/01

 Times Cited Count:24 Percentile:86.17(Crystallography)

The temperature dependence of scintillation properties of a hydrothermal-method-grown zinc oxide (ZnO) emission is investigated using a nickel-like silver laser emitting at 13.9 nm. A broad peak at 386 nm with a full-width at half-maximum (FWHM) of 15 nm at room temperature (298 K) is obtained. The peak position tends to be blue shifted while the FWHM becomes narrower when the crystal temperature is decreased to 25 K. Streak images fitted by a double exponential decay reveal that the measured emission decay at 105 K was $$tau$$$$_{1}$$ = 0.88 ns and $$tau$$$$_{2}$$ = 2.7 ns. This decay time of a few nanoseconds is suitable for lithographic applications and is sufficiently short for the characterization of laser plasma extreme ultraviolet (EUV) sources with nanosecond durations.

Journal Articles

Time-resolved fluorescence spectrum of wide-gap semiconductors excited by 13.9 nm X-ray laser

Tanaka, Momoko; Furukawa, Yusuke*; Nakazato, Tomoharu*; Tatsumi, Toshihiro*; Murakami, Hidetoshi*; Shimizu, Toshihiko*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Kawachi, Tetsuya; Kagamitani, Yuji*; et al.

X-Ray Lasers 2008; Springer Proceedings in Physics, Vol.130, p.501 - 505, 2009/00

We measured the time-resolved fluorescence spectra of ZnO and GaN single crystals excited by an X-ray laser operating at 13.9 nm and evaluated their scintillation properties for EUV excitation as compared with UV excitation case. For ZnO, a clear fluorescence peak of excitonic origin was observed at around 380 nm and the decay lifetime of less than 3 ns is found to be almost similar to the UV excitation case. The fluorescence at 380 nm is ideal for scintillator device design in the EUV and further applications. For GaN, the lifetimes are much longer than ZnO and the temporal profile of the EUV-excited fluorescence differs with the UV excitation case. As such, the EUV scintillation properties of ZnO is said to be more favorable than GaN. Finally, it is also demonstrated that an X-ray laser is an excellent tool for spectroscopic characterization of materials intended for next-generation lithography applications.

Journal Articles

ZnO as fast scintillators evaluated with Ni-like Ag laser

Furukawa, Yusuke*; Tanaka, Momoko; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nishimura, Hiroaki*; Mima, Kunioki*; Kagamitani, Yuji*; et al.

Reza Kenkyu, 36(APLS), p.1028 - 1030, 2008/12

Optical technologies in extreme ultraviolet (EUV) region have been receiving strong interests for the next generation lithography. Here we report properties of ZnO as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The ZnO sample was irradiated with EUV laser pulses and the fluorescence was measured using a streak camera fitted with a spectrograph. A clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. The prominent peak fluorescence is ideal for EUV detection and further applications including imaging.

Journal Articles

Water transport properties of crosslinked-PTFE based electrolyte membranes

Sawada, Shinichi; Yamaki, Tetsuya; Nishimura, Hidetoshi*; Asano, Masaharu; Suzuki, Akihiro*; Terai, Takayuki*; Maekawa, Yasunari

Solid State Ionics, 179(27-32), p.1611 - 1614, 2008/09

 Times Cited Count:13 Percentile:50.66(Chemistry, Physical)

We measured the self-diffusion coefficient of water, D, in proton exchange membranes (PEMs) based on crosslinked polytetrafluoroethylene (PTFE) films by a radiotracer-permeation method using tritium labeled water (HTO). When the crosslinking density of the PTFE matrix increased, the D value became smaller. This decreasing trend coincided with that of a water-content parameter, $$lambda$$, defined as the number of water molecules per sulfonic acid (SO$$_{3}$$H) group. According to the model assumption of hydrophilic regions, the relationship between the D and $$lambda$$ indicates that the amount of free water in the crosslinked-PTFE PEMs could be lower than that in the non-crosslinked one, thereby restricting the mobility of water molecules through strong interactions between the majority of water and SO$$_{3}$$H groups.

Journal Articles

Temperature dependence of scintillation properties for a hydrothermal-method-grown zinc oxide crystal evaluated by nickel-like silver laser pulses

Furukawa, Yusuke*; Tanaka, Momoko; Nakazato, Tomoharu*; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Murakami, Hidetoshi*; Saito, Shigeki*; et al.

Journal of the Optical Society of America B, 25(7), p.B118 - B121, 2008/07

 Times Cited Count:24 Percentile:72.65(Optics)

Using EUV laser operated at 13.9 nm ZnO and GaN are shown to be excellent scintillators in this wavelength region. Especially ZnO has short response time of 3 ns and prominent peak fluorescence from excitation at 380 nm.

Journal Articles

Evaluation of fast EUV scintillator using 13.9 nm X-ray laser

Tanaka, Momoko; Furukawa, Hiroyuki*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kagamitani, Yuji*; Ehrentraut, D.*; et al.

Journal of Physics; Conference Series, 112(4), p.042058_1 - 042058_4, 2008/00

 Times Cited Count:1 Percentile:55.21(Physics, Fluids & Plasmas)

Optical technologies in the extreme ultraviolet (EUV) region have been receiving strong interest for the next generation lithography. Efficient and fast scintillators are one of the key devices functioning in the EUV region. In this paper, we report excellent properties of ZnO and GaN as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The sample was irradiated with EUV laser pulses, and the fluorescence spectrum and the fluorescence lifetime were measured using a streak camera fitted with a spectrograph. In the case of ZnO, a clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. For GaN, a fluorescence peak at 370 nm having slower 5-ns decay time was observed. In this respect, the EUV scintillation properties of ZnO is said to be more favorable than GaN.

Journal Articles

Hydrothermal method grown large-sized zinc oxide single crystal as fast scintillator for future extreme ultraviolet lithography

Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; et al.

Applied Physics Letters, 91(23), p.231117_1 - 231117_3, 2007/12

 Times Cited Count:52 Percentile:84.56(Physics, Applied)

The scintillation properties of a hydrothermal method grown zinc oxide (ZnO) crystal are evaluated for extreme ultraviolet (EUV) laser excitation at 13.9 nm wavelength. The exciton emission lifetime at around 380 nm is determined to be 1.1 ns, almost identical to ultraviolet laser excitation cases. This fast response time is sufficiently short for characterizing EUV lithography light sources having a few nanoseconds duration. The availability of large size ZnO crystal up to 3-inch is quite attractive for future lithography and imaging applications.

Journal Articles

Non-stoichiometory and vaporization characteristic of Li$$_{2.1}$$TiO$$_{3.05}$$ in hydrogen atmosphere

Hoshino, Tsuyoshi; Yasumoto, Masaru*; Tsuchiya, Kunihiko; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*

Fusion Engineering and Design, 82(15-24), p.2269 - 2273, 2007/10

 Times Cited Count:53 Percentile:94.98(Nuclear Science & Technology)

no abstracts in English

Journal Articles

Overview of national centralized tokamak program; Mission, design and strategy to contribute ITER and DEMO

Ninomiya, Hiromasa; Akiba, Masato; Fujii, Tsuneyuki; Fujita, Takaaki; Fujiwara, Masami*; Hamamatsu, Kiyotaka; Hayashi, Nobuhiko; Hosogane, Nobuyuki; Ikeda, Yoshitaka; Inoue, Nobuyuki; et al.

Journal of the Korean Physical Society, 49, p.S428 - S432, 2006/12

To contribute DEMO and ITER, the design to modify the present JT-60U into superconducting coil machine, named National Centralized Tokamak (NCT), is being progressed under nationwide collaborations in Japan. Mission, design and strategy of this NCT program is summarized.

Journal Articles

Overview of the national centralized tokamak programme

Kikuchi, Mitsuru; Tamai, Hiroshi; Matsukawa, Makoto; Fujita, Takaaki; Takase, Yuichi*; Sakurai, Shinji; Kizu, Kaname; Tsuchiya, Katsuhiko; Kurita, Genichi; Morioka, Atsuhiko; et al.

Nuclear Fusion, 46(3), p.S29 - S38, 2006/03

 Times Cited Count:13 Percentile:41.76(Physics, Fluids & Plasmas)

The National Centralized Tokamak (NCT) facility program is a domestic research program for advanced tokamak research to succeed JT-60U incorporating Japanese university accomplishments. The mission of NCT is to establish high beta steady-state operation for DEMO and to contribute to ITER. The machine flexibility and mobility is pursued in aspect ratio and shape controllability, feedback control of resistive wall modes, wide current and pressure profile control capability for the demonstration of the high-b steady state.

Journal Articles

Vapor species evolved from Li$$_{2}$$TiO$$_{3}$$ heated at high temperature under various conditions

Hoshino, Tsuyoshi; Yasumoto, Masaru*; Tsuchiya, Kunihiko; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*

Fusion Engineering and Design, 81(1-7), p.555 - 559, 2006/02

 Times Cited Count:18 Percentile:76.2(Nuclear Science & Technology)

no abstracts in English

Journal Articles

Engineering design and control scenario for steady-state high-beta operation in national centralized tokamak

Tsuchiya, Katsuhiko; Akiba, Masato; Azechi, Hiroshi*; Fujii, Tsuneyuki; Fujita, Takaaki; Fujiwara, Masami*; Hamamatsu, Kiyotaka; Hashizume, Hidetoshi*; Hayashi, Nobuhiko; Horiike, Hiroshi*; et al.

Fusion Engineering and Design, 81(8-14), p.1599 - 1605, 2006/02

 Times Cited Count:1 Percentile:9.98(Nuclear Science & Technology)

no abstracts in English

Journal Articles

Design study of national centralized tokamak facility for the demonstration of steady state high-$$beta$$ plasma operation

Tamai, Hiroshi; Akiba, Masato; Azechi, Hiroshi*; Fujita, Takaaki; Hamamatsu, Kiyotaka; Hashizume, Hidetoshi*; Hayashi, Nobuhiko; Horiike, Hiroshi*; Hosogane, Nobuyuki; Ichimura, Makoto*; et al.

Nuclear Fusion, 45(12), p.1676 - 1683, 2005/12

 Times Cited Count:15 Percentile:45.53(Physics, Fluids & Plasmas)

Design studies are shown on the National Centralized Tokamak facility. The machine design is carried out to investigate the capability for the flexibility in aspect ratio and shape controllability for the demonstration of the high-beta steady state operation with nation-wide collaboration, in parallel with ITER towards DEMO. Two designs are proposed and assessed with respect to the physics requirements such as confinement, stability, current drive, divertor, and energetic particle confinement. The operation range in the aspect ratio and the plasma shape is widely enhanced in consistent with the sufficient divertor pumping. Evaluations of the plasma performance towards the determination of machine design are presented.

Journal Articles

Study of stellar reactions in explosive hydrogen burning with CRIB

Kubono, Shigeru*; Teranishi, Takashi*; Notani, Masahiro*; Yamaguchi, Hidetoshi*; Saito, Akito*; He, J. J.*; Wakabayashi, Yasuo*; Fujikawa, Hisashi*; Amadio, G.*; Baba, Hidetada*; et al.

Nuclear Physics A, 758, p.733 - 736, 2005/07

 Times Cited Count:1 Percentile:14.45(Physics, Nuclear)

With using $$^{17}F$$ RNB from CRIB, proton inelastic scattering was observed. From this experiment, some resonance parameters have been deduced for the key reaction, $$^{14}O(alpha,p)^{17}F$$ at the explosive hydrogen burning stage in stars. Proton inelastic scattering of $$^{23}Mg$$ are also reported.

JAEA Reports

Corrosion Resistance of Titanium for Nuclear Waste Container in Non-oxidizing Condition (II)

Wada, Ryutaro*; Nishimura, Tsutomu*; Shimogori, Kazutoshi*; Tomari, Haruo*; Masugata, Tsuyoshi*; Shimoda, Hideaki*; Fujiwara, Kazuo*; Nishimoto, Hidetoshi*; Oda, Masashi*

PNC TJ1058 98-002, 159 Pages, 1998/02

PNC-TJ1058-98-002.pdf:12.95MB

None

JAEA Reports

Corrosion Resistance of Titanium for Nuclear Waste Container in Non-oxidizing Condition (II)

Wada, Ryutaro*; Nishimura, Tsutomu*; Shimogori, Kazutoshi*; Tomari, Haruo*; Masugata, Tsuyoshi*; Shimoda, Hideaki*; Fujiwara, Kazuo*; Nishimoto, Hidetoshi*; Oda, Masashi*

PNC TJ1058 98-001, 446 Pages, 1998/02

PNC-TJ1058-98-001.pdf:36.59MB

None

Oral presentation

Influence of UNH crystal on heat transfer performance of crystallizer

Higuchi, Hidetoshi; Koizumi, Kenji; Washiya, Tadahiro; Morita, Shinichi; Chikazawa, Takahiro*; Nishimura, Kenji*; Kikuchi, Toshiaki*

no journal, , 

Influence of UNH crystal on heat transfer performance of Crystallizer.

Oral presentation

Vaporization properties and non-stoichiometry of Li$$_{2+x}$$TiO$$_{3+y}$$

Hoshino, Tsuyoshi; Tsuchiya, Kunihiko; Hayashi, Kimio; Yasumoto, Masaru*; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*

no journal, , 

no abstracts in English

Oral presentation

In-situ tritium release experiment from Li$$_{2}$$TiO$$_{3}$$ sintered pellets at high temperature

Sato, Kosuke*; Hoshino, Tsuyoshi; Hayashi, Kimio; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*

no journal, , 

no abstracts in English

Oral presentation

Investigation of methanol permeation behavior of crosslinked-polytetrafluoroethylene based electrolyte membranes using tritium

Yamaki, Tetsuya; Sawada, Shinichi; Sekine, Toshihiko; Asano, Masaharu; Nishimura, Hidetoshi*; Suzuki, Akihiro*; Terai, Takayuki*; Maekawa, Yasunari

no journal, , 

no abstracts in English

24 (Records 1-20 displayed on this page)