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Journal Articles

X-ray scattering study of interfacial roughness correlation in Mo/Si multilayers fabricated by ion beam sputtering

Ulyanenkov, A.*; Matsuo, R.*; Omote, Kazuhiko*; Inaba, Katsuhiko*; Harada, Jimpei*; Ishino, Masahiko; Nishii, Masanobu; Yoda, Osamu

Journal of Applied Physics, 87(10), p.7255 - 7260, 2000/05

https://doi.org/10.1063/1.372977

Times Cited Count：33 Percentile：76.33(Physics, Applied)

no abstracts in English