Impact of post-nitridation annealing in CO ambient on threshold voltage stability in 4H-SiC metal-oxide-semiconductor field-effect transistors

Hosoi, Takuji*; Osako, Momoe*; Moges, K.*; Ito, Koji*; Kimoto, Tsunenobu*; Sometani, Mitsuru*; Okamoto, Mitsuo*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*

Applied Physics Express, 15(6), p.061003_1 - 061003_5, 2022/06

https://doi.org/10.35848/1882-0786/ac6f42

The combination of NO annealing and subsequent post-nitridation annealing (PNA) in CO ambient for SiO/SiC structures has been demonstrated to be effective in obtaining both high channel mobility and superior threshold voltage stability in SiC-based metal-oxide-semiconductor field-effect transistors (MOSFETs). N atoms on the SiO side of the SiO/SiC interface incorporated by NO annealing, which are plausible cause of charge trapping sites, could be selectively removed by CO-PNA at 1300C without oxidizing the SiC. CO-PNA was also effective in compensating oxygen vacancies in SiO, resulting high immunity against both positive and negative bias-temperature stresses.

Impact of nitridation on the reliability of 4H-SiC(110) MOS devices

Nakanuma, Takato*; Kobayashi, Takuma*; Hosoi, Takuji*; Sometani, Mitsuru*; Okamoto, Mitsuo*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*

Applied Physics Express, 15(4), p.041002_1 - 041002_4, 2022/04

https://doi.org/10.35848/1882-0786/ac5ace

The leakage current and flat-band voltage (VFB) instability of NO-nitrided SiC (110) (a-face) MOS devices were systematically investigated. Although NO nitridation is effective in improving the interface properties, we found that it reduces the onset field of Fowler-Nordheim (F-N) current by about 1 MVcm, leading to pronounced leakage current. Synchrotron X-ray photoelectron spectroscopy revealed that the nitridation reduces the conduction band offset at the SiO/SiC interface, corroborating the above finding. Furthermore, systematical positive and negative bias stress tests clearly indicated the VFB instability of nitrided a-face MOS devices against electron and hole injection.

Development of dry rework technology in MOX fuel fabrication process; Selection and characterization of pulverizer for particle size adjustment of dry recycled powder

Yamamoto, Kazuya; Makino, Takayoshi; Iso, Hidetoshi; Segawa, Tomoomi; Kawaguchi, Koichi; Ishii, Katsunori

JAEA-Technology 2021-002, 31 Pages, 2021/05

JAEA-Technology-2021-002.pdf:4.37MB

In the MOX fuel fabrication process, a dry recycle technology has been developed to effectively utilize dry recovered powder obtained by crushing out of specification MOX pellets. The particle size of the dry recovery powder is divided into three classes; coarse size (about 250 m or less), medium size (about 100 m or less), and fine size (about 10 m or less) by the current crushers, and the effect of controlling the density of sintered pellets is obtained to a certain extent by adding the dry recovered powder to the raw powder. In this report, with the aim of more finely adjusting the particle size of the dry recovery powder, a buhrstone mill and a collision plate-type jet mill were selected as grinders that can adjust the dry recovered powder within a particle size range of 250 m or less, and the particle size adjustment test was conducted to pulverize the tungsten-carbide-cobalt (WC-Co) pellets as a simulated material for the MOX pellets. The buhrstone mill can control the particle size within a certain range by adjusting the grindstone clearance, but particles with a particle size of 250 m or more may be discharged. On the contrary, it is expected that the particle size of the collision plate-type jet mill can be controlled in the range of 250 m or less by adjusting the classification zone clearance. Therefore, the collision plate-type jet mill is more suitable for adjusting the particle size of the dry recovered powder than the buhrstone mill.

Technological development of the particle size adjustment of dry recovered powder

Segawa, Tomoomi; Yamamoto, Kazuya; Makino, Takayoshi; Iso, Hidetoshi; Kawaguchi, Koichi; Ishii, Katsunori; Sato, Hisato; Fukasawa, Tomonori*; Fukui, Kunihiro*

Proceedings of International Nuclear Fuel Cycle Conference / Light Water Reactor Fuel Performance Conference (Global/Top Fuel 2019) (USB Flash Drive), p.738 - 745, 2019/09

In the MOX fuel fabrication process, the dry grinding technology of mixed oxide pellets have been developed for the effective use of nuclear fuel materials. To develop a technology to control the particle size of dry recovered powder, the performance of the buhrstone mill and the collision plate type jet mill were studied using a simulated powder of particle size distribution about 500 m. We found that the particle size can be controlled at the range of about 250 m or less by both by adjusting the clearance between the grinding wheels of the buhrstone mill, and the clearance and elevation angle of the clarification zone of the collision plate type jet mill. And furthermore, the collision plate type jet mill is considered to be suitable for particle size control because the operating parameters of the classifier can be finely adjusted.

Technological study about a disposal measures of low-level radioactive waste including uranium and long-half-life radionuclides

Sugaya, Toshikatsu; Nakatani, Takayoshi; Sasaki, Toshihisa*; Nakamura, Yasuo*; Sakai, Akihiro; Sakamoto, Yoshiaki

JAEA-Technology 2016-036, 126 Pages, 2017/02

JAEA-Technology-2016-036.pdf:7.28MB

At the Radioactive Waste Management and Disposal Project Department Sector of Decommissioning and Radioactive Waste Management, we performed the technological study about the disposal measures of the low-level radioactive waste targeted for uranium-bearing waste and intermediate depth disposal-based waste occurring from the process of the nuclear fuel cycle.

Thermal strain in superconducting NbSn strand at cryogenic temperature

Harjo, S.; Kawasaki, Takuro; Hemmi, Tsutomu; Ito, Takayoshi*; Nakamoto, Tatsushi*; Aizawa, Kazuya

JPS Conference Proceedings (Internet), 8, p.031001_1 - 031001_5, 2015/09

Time-resolved soft X-ray imaging of femtosecond laser ablation process in metals

Tomita, Takuro*; Nishikino, Masaharu; Hasegawa, Noboru; Minami, Yasuo*; Takei, Ryota*; Baba, Motoyoshi*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kaihori, Takeshi*; Morita, Toshimasa; et al.

Journal of Laser Micro/Nanoengineering, 9(2), p.137 - 142, 2014/06

https://doi.org/10.2961/jlmn.2014.02.0011

Femtosecond laser ablation processes on platinum, gold, and tungsten were observed by the single shot pump and probe reflective imaging using a soft X-ray laser probe. To avoid the timing error due to the jitter, we adopted a posteriori correction technique by simultaneous measurement of timing between the pump and probe pulses for every single shot, using a soft X-ray streak camera. A clear difference was found in the temporal behavior of the dynamical response of the soft X-ray reflectivity depending on the irradiated laser fluence in these three materials. On the other hand, the narrow dark rings were found in Pt and W, while an additional bright ring was found outside the dark disk in Au. Our result gives the experimental data comparable with various numerical simulations.

Observation of the nano-scale surface dynamics of femtosecond laser ablation by time-resolved soft X-ray imaging technique

Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Baba, Motoyoshi*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kawachi, Tetsuya; Hatomi, Daiki*; et al.

Proceedings of SPIE, Vol.8849, p.88490E_1 - 88490E_6, 2013/09

https://doi.org/10.1117/12.2022834

We have developed the pump and probe interferometer and reflective imaging technique of the metal surfaces during the femtosecond laser ablation by using the laser-driven soft X-ray laser at the wavelength of 13.9 nm. The pumping laser used for ablation was a Ti: Sapphire laser pulse with the duration of 80 fs pulse at a central wavelength of 795 nm, and had a gaussian spatial profile. By using the X-ray imaging technique, the time resolved image of nano-scaled ablation dynamics of the platinum and the gold pumped by a femtosecond laser pulse was obtained.

Observation of two fine structures related to the hidden order in the spectral functions of URuSi

Yoshida, Rikiya*; Fukui, Masaki*; Haga, Yoshinori; Yamamoto, Etsuji; Onuki, Yoshichika; Okawa, Mario*; Malaeb, W.*; Shin, S.*; Muraoka, Yuji*; Yokoya, Takayoshi*

Physical Review B, 85(24), p.241102_1 - 241102_4, 2012/06

https://doi.org/10.1103/PhysRevB.85.241102

Stress/strain effects on industrial superconducting composites

Ito, Takayoshi; Harjo, S.; Osamura, Kozo*; Hemmi, Tsutomu; Awaji, Satoshi*; Machiya, Shutaro*; Oguro, Hidetoshi*; Nishijima, Gen*; Takahashi, Koki*; Matsui, Kunihiro; et al.

Materials Science Forum, 681, p.209 - 214, 2011/05

https://doi.org/10.4028/www.scientific.net/MSF.681.209