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Journal Articles

EUV light source by high power laser

Izawa, Yasukazu*; Nishihara, Katsunobu*; Tanuma, Hajime*; Sasaki, Akira; Murakami, Masakatsu*; Sunahara, Atsushi*; Nishimura, Hiroaki*; Fujioka, Shinsuke*; Aota, Tatsuya*; Shimada, Yoshinori*; et al.

Journal of Physics; Conference Series, 112, p.042047_1 - 042047_4, 2008/00

 Times Cited Count:7 Percentile:93.09

In the development of a high power EUV source used in the EUV lithography system, we have been constructed EUV database of laser-produced tin plasma by the theoretical and experimental studies. On the basis of our understanding, the optimum conditions of lasers and plasmas were clarified, and we proposed the guidelines of laser plasma to obtain clean, efficient and high power EUV source for the practical EUV lithography system. In parallel to such studies, novel targets and high power laser system to generate the optimized EUV source plasma have been developed.

Journal Articles

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Nunami, Masanori*; Tanuma, Hajime*; Fujioka, Shinsuke*; Shimada, Yoshinori*; Fujima, Kazumi*; Furukawa, Hiroyuki*; Kato, Takako*; et al.

Physics of Plasmas, 15(5), p.056708_1 - 056708_11, 2008/00

 Times Cited Count:106 Percentile:97.57(Physics, Fluids & Plasmas)

Journal Articles

Radiation hydrodynamic simulation of extreme ultra-violet emission from laser-produced tin plasmas

Sunahara, Atsushi*; Sasaki, Akira; Tanuma, Hajime*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Fujioka, Shinsuke*; Aota, Tatsuya*; Yamaura, Michiteru*; Shimada, Yoshinori*; et al.

Purazuma, Kaku Yugo Gakkai-Shi, 83(11), p.920 - 926, 2007/11

We study the EUV emission from laser produced Sn plasmas using the 1D and 2D radiation hydrodynamics simulation, for the development of EUV source for the next generation semiconductor lithography. The opacity and emissivity of the plasma used in the simulation are calculated by a detailed atomic model, with the accurate wavelength of emission lines obtained from the detailed spectroscopic measurements. Calculation is shown to reproduce the experimental spectrum and conversion efficiency reasonably, including the effect of photo pumping which modifies the EUV emission spectrum in the case with a long scale length of the plasmas.

Journal Articles

Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas

Okuno, Tomoharu*; Fujioka, Shinsuke*; Nishimura, Hiroaki*; Tao, Y.*; Nagai, Keiji*; Gu, Q.*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Nishihara, Katsunobu*; Norimatsu, Takayoshi*; et al.

Applied Physics Letters, 88(16), p.161501_1 - 161501_3, 2006/04

 Times Cited Count:63 Percentile:88.67(Physics, Applied)

no abstracts in English

Journal Articles

Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas

Fujioka, Shinsuke*; Nishimura, Hiroaki*; Nishihara, Katsunobu*; Sasaki, Akira; Sunahara, Atsushi*; Okuno, Tomoharu*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Tao, Y.*; Shimada, Yoshinori*; et al.

Physical Review Letters, 95(23), p.235004_1 - 235004_4, 2005/12

 Times Cited Count:135 Percentile:95.53(Physics, Multidisciplinary)

no abstracts in English

Journal Articles

Radiation safety design for the J-PARC project

Nakashima, Hiroshi; Nakane, Yoshihiro; Masukawa, Fumihiro; Matsuda, Norihiro; Oguri, Tomomi*; Nakano, Hideo*; Sasamoto, Nobuo*; Shibata, Tokushi*; Suzuki, Takenori*; Miura, Taichi*; et al.

Radiation Protection Dosimetry, 115(1-4), p.564 - 568, 2005/12

 Times Cited Count:7 Percentile:47.08(Environmental Sciences)

The High Intensity Proton Accelerator Project, named as J-PARC, is in progress, aiming at studies on the latest basic science and the advancing nuclear technology. In the project, the high-energy proton accelerator complex of the world highest intensity is under construction. In order to establish a reasonable shielding design, both simplified and detailed design methods were used in the shielding design of J-PARC. This paper reviews the present status of the radiation safety design study for J-PARC.

Journal Articles

Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams

Shimada, Yoshinori*; Nishimura, Hiroaki*; Nakai, Mitsuo*; Hashimoto, Kazuhisa*; Yamaura, Michiteru*; Tao, Y.*; Shigemori, Keisuke*; Okuno, Tomoharu*; Nishihara, Katsunobu*; Kawamura, Toru*; et al.

Applied Physics Letters, 86(5), p.051501_1 - 051501_3, 2005/01

 Times Cited Count:110 Percentile:94.83(Physics, Applied)

no abstracts in English

JAEA Reports

A Consideration of retrievability in geologic disposal of radioactive wastes

Sasaki, Noriaki

JNC TN8420 2001-006, 56 Pages, 2001/12

JNC-TN8420-2001-006.pdf:0.9MB

Geologic disposal cannot be implemented based only on the consensus of the engaged technical community, and needs the wide social agreement and confidence for it. This is now a common understanding in many countries. Under this kind of recognition, the concept of retrievability in geologic disposal of radioadive wastes has been rapidly interested inrecent years and has being discussed in several European countries. For example, EC has cooperated the concerted action on the retrievability of long-lived radioactive waste with the joining of nine countries, and the expert group on disposal concepts for radioactive waste (EKRA) set up by the Swiss government has presented its findings on the new concept of the long-lived radioactive waste management considering the retrievability. The OECD/NEA has also discussed on this issue and published the documents. There are some countries where the legislation requires the retrievability. This paper briefly summarizes the important findings and recommendations on the concept of retrievability, as the results of review of some interesting documents from European countries, for the purpose of reflecting to the research and development of geologic disposal in Japan.

Journal Articles

Study of cross section measurement methods using the self-TOF high energy neutron detector

Sasaki, Michiya*; Nunomiya, Tomoya*; Nakamura, Takashi*; Nakao, Noriaki*; Shibata, Tokushi*; Nakane, Yoshihiro; Tanaka, Susumu

JAERI-Review 2000-024, TIARA Annual Report 1999, p.259 - 261, 2000/10

no abstracts in English

JAEA Reports

None

Sasaki, Noriaki;

PNC TN1100 96-010, 514 Pages, 1996/12

PNC-TN1100-96-010.pdf:24.34MB

no abstracts in English

JAEA Reports

None

; Takeda, Seietsu*; Sasaki, Noriaki; Ishikawa, Hirohisa

PNC TN1410 95-093, 54 Pages, 1995/12

PNC-TN1410-95-093.pdf:11.33MB

None

Journal Articles

Effects of alpha decay on the properties of actual nuclear waste glass

Bamba, Tsunetaka; ; Muraoka, Susumu; Yamada, Kazuo*; Saito, Makoto*; Ishikawa, Hirohisa*; Sasaki, Noriaki*

Materials Research Society Symposium Proceedings, Vol.353, p.1397 - 1404, 1995/00

no abstracts in English

Journal Articles

Summary of the PNC's first performance assessment report H3 and future plans of R&D on geological disposal of high-level radioactive waste

Sasaki, Noriaki; Yamato, Aiji;

Proceedings of 5th International Conference on Radioactive Waste Management and Environmental Remediation (ICEM '95), Vol.2, 649 Pages, 1995/00

None

JAEA Reports

None

Yamamoto, Masao; Takeda, Seietsu*; Sasaki, Noriaki

PNC TN1410 94-091, 47 Pages, 1994/11

PNC-TN1410-94-091.pdf:4.17MB

None

JAEA Reports

None

Sasaki, Noriaki; ;

PNC TN1070 94-001, 82 Pages, 1994/11

PNC-TN1070-94-001.pdf:7.73MB

None

JAEA Reports

None

Sasaki, Noriaki; ;

PNC TJ1211 94-004, 317 Pages, 1994/03

PNC-TJ1211-94-004.pdf:9.94MB

None

JAEA Reports

None

Sasaki, Noriaki; ;

PNC TJ1211 94-003, 63 Pages, 1994/03

PNC-TJ1211-94-003.pdf:1.64MB

None

Journal Articles

None

Sasaki, Noriaki; Sato, Seichi

Nihon Genshiryoku Gakkai-Shi, 36(3), P. 233, 1994/03

None

JAEA Reports

None

Sasaki, Noriaki; Miyahara, Kaname; Yoshikawa, Hideki

JNC TN1200 2005-006, 273 Pages, 1993/12

JNC-TN1200-2005-006.pdf:75.87MB

JAEA Reports

Proceedings of technical session international workshop on research & development of geological disposal

Yamato, Aiji; Sasaki, Noriaki; ; Miyahara, Kaname;

PNC TN1100 94-003, 355 Pages, 1993/11

PNC-TN1100-94-003.pdf:15.27MB

Radioactive waste management research programs inevitably include laboratory solubili and sorption studies to provide data for radionuclide transport model. Estimation of lubility strongly depends on the reliability of thermodynamic data (e.g., carbonato-colexes) and may also depend on kinetic data on alteration of solubility limiting solid ases. Existing sorption data may include some kind of retardation mechanisms to be excded (e.g., precipitation). To develop these fundamental data, we must also consider a rge number of radioactive elements, a large number of factors (e.g., pH, Eh, complexinligands) in the repository environmentg, and numerous solid and aqueous species of radnuclides along with the many absorbents. Therefore, a systematic approach and researchlan are needed for obtaining and evaluation thermodynamic and sorption constants. The cus of this session was on thermodynamic data for aqueous species and solid phases imptant to the geological disposal system, on kinetic data

89 (Records 1-20 displayed on this page)