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Izawa, Yasukazu*; Nishihara, Katsunobu*; Tanuma, Hajime*; Sasaki, Akira; Murakami, Masakatsu*; Sunahara, Atsushi*; Nishimura, Hiroaki*; Fujioka, Shinsuke*; Aota, Tatsuya*; Shimada, Yoshinori*; et al.
Journal of Physics; Conference Series, 112, p.042047_1 - 042047_4, 2008/00
Times Cited Count:8 Percentile:93.57In the development of a high power EUV source used in the EUV lithography system, we have been constructed EUV database of laser-produced tin plasma by the theoretical and experimental studies. On the basis of our understanding, the optimum conditions of lasers and plasmas were clarified, and we proposed the guidelines of laser plasma to obtain clean, efficient and high power EUV source for the practical EUV lithography system. In parallel to such studies, novel targets and high power laser system to generate the optimized EUV source plasma have been developed.
Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Nunami, Masanori*; Tanuma, Hajime*; Fujioka, Shinsuke*; Shimada, Yoshinori*; Fujima, Kazumi*; Furukawa, Hiroyuki*; Kato, Takako*; et al.
Physics of Plasmas, 15(5), p.056708_1 - 056708_11, 2008/00
Times Cited Count:116 Percentile:97.42(Physics, Fluids & Plasmas)Sunahara, Atsushi*; Sasaki, Akira; Tanuma, Hajime*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Fujioka, Shinsuke*; Aota, Tatsuya*; Yamaura, Michiteru*; Shimada, Yoshinori*; et al.
Purazuma, Kaku Yugo Gakkai-Shi, 83(11), p.920 - 926, 2007/11
We study the EUV emission from laser produced Sn plasmas using the 1D and 2D radiation hydrodynamics simulation, for the development of EUV source for the next generation semiconductor lithography. The opacity and emissivity of the plasma used in the simulation are calculated by a detailed atomic model, with the accurate wavelength of emission lines obtained from the detailed spectroscopic measurements. Calculation is shown to reproduce the experimental spectrum and conversion efficiency reasonably, including the effect of photo pumping which modifies the EUV emission spectrum in the case with a long scale length of the plasmas.
Okuno, Tomoharu*; Fujioka, Shinsuke*; Nishimura, Hiroaki*; Tao, Y.*; Nagai, Keiji*; Gu, Q.*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Nishihara, Katsunobu*; Norimatsu, Takayoshi*; et al.
Applied Physics Letters, 88(16), p.161501_1 - 161501_3, 2006/04
Times Cited Count:64 Percentile:87.62(Physics, Applied)no abstracts in English
Fujioka, Shinsuke*; Nishimura, Hiroaki*; Nishihara, Katsunobu*; Sasaki, Akira; Sunahara, Atsushi*; Okuno, Tomoharu*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Tao, Y.*; Shimada, Yoshinori*; et al.
Physical Review Letters, 95(23), p.235004_1 - 235004_4, 2005/12
Times Cited Count:144 Percentile:95.59(Physics, Multidisciplinary)no abstracts in English
Nakashima, Hiroshi; Nakane, Yoshihiro; Masukawa, Fumihiro; Matsuda, Norihiro; Oguri, Tomomi*; Nakano, Hideo*; Sasamoto, Nobuo*; Shibata, Tokushi*; Suzuki, Takenori*; Miura, Taichi*; et al.
Radiation Protection Dosimetry, 115(1-4), p.564 - 568, 2005/12
Times Cited Count:8 Percentile:49.23(Environmental Sciences)The High Intensity Proton Accelerator Project, named as J-PARC, is in progress, aiming at studies on the latest basic science and the advancing nuclear technology. In the project, the high-energy proton accelerator complex of the world highest intensity is under construction. In order to establish a reasonable shielding design, both simplified and detailed design methods were used in the shielding design of J-PARC. This paper reviews the present status of the radiation safety design study for J-PARC.
Shimada, Yoshinori*; Nishimura, Hiroaki*; Nakai, Mitsuo*; Hashimoto, Kazuhisa*; Yamaura, Michiteru*; Tao, Y.*; Shigemori, Keisuke*; Okuno, Tomoharu*; Nishihara, Katsunobu*; Kawamura, Toru*; et al.
Applied Physics Letters, 86(5), p.051501_1 - 051501_3, 2005/01
Times Cited Count:111 Percentile:94.28(Physics, Applied)no abstracts in English
Sasaki, Noriaki
JNC TN8420 2001-006, 56 Pages, 2001/12
Geologic disposal cannot be implemented based only on the consensus of the engaged technical community, and needs the wide social agreement and confidence for it. This is now a common understanding in many countries. Under this kind of recognition, the concept of retrievability in geologic disposal of radioadive wastes has been rapidly interested inrecent years and has being discussed in several European countries. For example, EC has cooperated the concerted action on the retrievability of long-lived radioactive waste with the joining of nine countries, and the expert group on disposal concepts for radioactive waste (EKRA) set up by the Swiss government has presented its findings on the new concept of the long-lived radioactive waste management considering the retrievability. The OECD/NEA has also discussed on this issue and published the documents. There are some countries where the legislation requires the retrievability. This paper briefly summarizes the important findings and recommendations on the concept of retrievability, as the results of review of some interesting documents from European countries, for the purpose of reflecting to the research and development of geologic disposal in Japan.
Sasaki, Michiya*; Nunomiya, Tomoya*; Nakamura, Takashi*; Nakao, Noriaki*; Shibata, Tokushi*; Nakane, Yoshihiro; Tanaka, Susumu
JAERI-Review 2000-024, TIARA Annual Report 1999, p.259 - 261, 2000/10
no abstracts in English
; Takeda, Seietsu*; Sasaki, Noriaki; Ishikawa, Hirohisa
PNC TN1410 95-093, 54 Pages, 1995/12
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Bamba, Tsunetaka; ; Muraoka, Susumu; Yamada, Kazuo*; Saito, Makoto*; Ishikawa, Hirohisa*; Sasaki, Noriaki*
Materials Research Society Symposium Proceedings, Vol.353, p.1397 - 1404, 1995/00
no abstracts in English
Sasaki, Noriaki; Yamato, Aiji;
Proceedings of 5th International Conference on Radioactive Waste Management and Environmental Remediation (ICEM '95), Vol.2, 649 Pages, 1995/00
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