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Takei, Satoshi*; Oshima, Akihiro*; Ichikawa, Takumi*; Sekiguchi, Atsushi*; Kashiwakura, Miki*; Kozawa, Takahiro*; Tagawa, Seiichi*; Oyama, Tomoko; Ito, Shoji*; Miyasaka, Hiroshi*
Microelectronic Engineering, 122, p.70 - 76, 2014/06
Times Cited Count：24 Percentile：76.82(Engineering, Electrical & Electronic)Biomass-derived branched sugar resist material was developed for environmentally-friendly electron beam lithography (EBL). The developed resist enables organic solvent-free water-developable process. The resist performance was evaluated using 75 keV EBL system. Lines of 50-200 nm were fabricated with high sensitivity of 7 
C/cm
. The resist is developable in pure water at 23 
C for 60 s, and it has acceptable CF
etch selectivity.
Tanabe, Yusuke*; Nishikawa, Hiroyuki*; Seki, Yoshihiro*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Watanabe, Toru*; Sekiguchi, Atsushi*
Microelectronic Engineering, 88(8), p.2145 - 2148, 2011/08
Times Cited Count：9 Percentile：47.34(Engineering, Electrical & Electronic)Kitabata, Takuya; Shimono, Kimihiro; sekiguchi, mineo; Matsushima, Akira
JNC TN4410 2003-004, 42 Pages, 2003/03
JNC-TN4410-2003-004.pdf:11.33MB
None
Sato, Masuo*; Fukawa, Naohiro*; Tamaoki, Tetsuo*; Iwashita, Tsuyoshi*; Ito, Atsushi*; Sekiguchi, Mineo*; Yamanaka, Toshikatsu*; Yoshida, Megumi*; Maruyama, Fumi*; Yamamoto, Kazuhiko*
PNC TJ9164 88-007, 96 Pages, 1988/11
The automatic reactor operation syste for JOYO is evaluated. In JOYO, by realizing the automatic operation of control rod, the reduction of the operator's load will be performed, and by improving the man-machine interface, the operability will be also improved, Still, in order to improve the reliability and safety of operator, following items are evaluated. In these evaluations, two kinds of automatic reactor operation systems are considered, one is limited to a control rod operation and the other is to an overall plant operation with steam generators. (1)Configuration of the automatic control rod operation system and the automatic plant operation system. (2)Control algorithm by using the knowledge engineering. (3)Methods of the man-machine interface and the operation against emergency conditions. (4)Scope of modification of the present control rod drive system and central control panels. And, the problems which are necessary to be solved to implement this system, are evaluated. Basic configuration of the automatic control rods operation system and the automatic plant operation system are established, and it is ascertained that the present control rod drive system will be useful to the control rod position control to realize the automatic control rod operation without any modification of the control rod drive mechanism.
