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Journal Articles

Changes in the mechanical properties of silk scaffold by $$gamma$$ rays-irradiation

Kawahara, Yutaka*; Sekiguchi, Takahiro*; Nishikawa, Yukihiro*; Nagasawa, Naotsugu

Nihon Shiruku Gakkai-Shi, 23, p.67 - 69, 2015/03

http://doi.org/10.11417/silk.23.67

Silk aerogel has been prepared from liquid silk, and the influences of the $$gamma$$ ray-irradiation on its mechanical property have been investigated. The formation of crosslinking structure in the sericin component by the $$gamma$$ ray-irradiation should induced the hardening of the silk aerogel.

Journal Articles

Organic solvent-free water-developable sugar resist material derived from biomass in green lithography

Takei, Satoshi*; Oshima, Akihiro*; Ichikawa, Takumi*; Sekiguchi, Atsushi*; Kashiwakura, Miki*; Kozawa, Takahiro*; Tagawa, Seiichi*; Oyama, Tomoko; Ito, Shoji*; Miyasaka, Hiroshi*

Microelectronic Engineering, 122, p.70 - 76, 2014/06

https://doi.org/10.1016/j.mee.2014.02.026
 Times Cited Count：24 Percentile：76.64(Engineering, Electrical & Electronic)

Biomass-derived branched sugar resist material was developed for environmentally-friendly electron beam lithography (EBL). The developed resist enables organic solvent-free water-developable process. The resist performance was evaluated using 75 keV EBL system. Lines of 50-200 nm were fabricated with high sensitivity of 7 $$mu$$C/cm$$^{2}$$. The resist is developable in pure water at 23 $$^{circ}$$C for 60 s, and it has acceptable CF$$_{4}$$ etch selectivity.

Journal Articles

Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

Tanabe, Yusuke*; Nishikawa, Hiroyuki*; Seki, Yoshihiro*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Watanabe, Toru*; Sekiguchi, Atsushi*

Microelectronic Engineering, 88(8), p.2145 - 2148, 2011/08

https://doi.org/10.1016/j.mee.2011.01.019
 Times Cited Count：9 Percentile：47.25(Engineering, Electrical & Electronic)

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