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Journal Articles

Photoluminescence evaluation of light element impurities in ultrathin SOI wafers by luminescence activation using electron irradiation

Nakagawa, Satoko*; Sone, Yoshitsugu*; Tajima, Michio*; Oshima, Takeshi; Ito, Hisayoshi

Materials Science & Engineering B, 134(2-3), p.172 - 175, 2006/10

https://doi.org/10.1016/j.mseb.2006.07.003
 Times Cited Count：1 Percentile：6.63(Materials Science, Multidisciplinary)

no abstracts in English

Oral presentation

Analysis of light element impurities in ultrathin SOI wafers by luminescence activation using Xe ion implantation

Nakagawa, Satoko*; Sone, Yoshitsugu*; Tajima, Michio*; Oshima, Takeshi; Ito, Hisayoshi

no journal, , 

no abstracts in English

Oral presentation

Evaluation of light element impurities in ultrathin SOI wafers by luminescence activation using electron irradiation

Nakagawa, Satoko*; Sone, Yoshitsugu*; Tajima, Michio*; Oshima, Takeshi; Ito, Hisayoshi

no journal, , 

no abstracts in English

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