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Baba, Motoyoshi*; Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru
Japanese Journal of Applied Physics, 53(8), p.080302_1 - 080302_4, 2014/08
Times Cited Count：8 Percentile：33.58(Physics, Applied)A grazing incidence reflection-type soft X-ay microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 
m square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 m and was proven to have a sufficient performance for observing surface morphological changes.
Tomita, Takuro*; Nishikino, Masaharu; Hasegawa, Noboru; Minami, Yasuo*; Takei, Ryota*; Baba, Motoyoshi*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kaihori, Takeshi*; Morita, Toshimasa; et al.
Journal of Laser Micro/Nanoengineering, 9(2), p.137 - 142, 2014/06
Times Cited Count：5 Percentile：28.65(Nanoscience & Nanotechnology)Femtosecond laser ablation processes on platinum, gold, and tungsten were observed by the single shot pump and probe reflective imaging using a soft X-ray laser probe. To avoid the timing error due to the jitter, we adopted a posteriori correction technique by simultaneous measurement of timing between the pump and probe pulses for every single shot, using a soft X-ray streak camera. A clear difference was found in the temporal behavior of the dynamical response of the soft X-ray reflectivity depending on the irradiated laser fluence in these three materials. On the other hand, the narrow dark rings were found in Pt and W, while an additional bright ring was found outside the dark disk in Au. Our result gives the experimental data comparable with various numerical simulations.
Nishikino, Masaharu; Hasegawa, Noboru; Ishino, Masahiko; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Minami, Yasuo*; Terakawa, Kota*; Takei, Ryota*; Baba, Motoyoshi*; Suemoto, Toru; et al.
JAEA-Conf 2013-001, p.16 - 19, 2013/09
The dynamics of the femtosecond laser ablation is still not clear at the early stage. Several studies on the time-resolved imaging of femtosecond laser ablation process have been performed on various materials. In this study, we have demonstrated a pump and probe imaging of the metal surface morphology during the femtosecond laser ablation by using the laser-driven plasma induced soft X-ray laser (SXRL) as a probe beam. The pumping laser used for ablation was a Ti:Sapphire laser system based on chirped pulse amplification. The pump beam had a Gaussian profile and the focal spot size on the metal surface was about 70 micron at FWHM. The dependence for the pump laser fluence of the ablation surface expansion and the surface condition (roughness and density gradient) were observed from the soft X-ray interferogram and reflective image, respectively.
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Baba, Motoyoshi*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kawachi, Tetsuya; Hatomi, Daiki*; et al.
Proceedings of SPIE, Vol.8849, p.88490E_1 - 88490E_6, 2013/09
Times Cited Count：2 Percentile：72.45(Optics)We have developed the pump and probe interferometer and reflective imaging technique of the metal surfaces during the femtosecond laser ablation by using the laser-driven soft X-ray laser at the wavelength of 13.9 nm. The pumping laser used for ablation was a Ti: Sapphire laser pulse with the duration of 80 fs pulse at a central wavelength of 795 nm, and had a gaussian spatial profile. By using the X-ray imaging technique, the time resolved image of nano-scaled ablation dynamics of the platinum and the gold pumped by a femtosecond laser pulse was obtained.
Hasegawa, Noboru; Nishikino, Masaharu; Kaihori, Takeshi*; Hirano, Yusuke; Morita, Toshimasa; Kawachi, Tetsuya; Yamagiwa, Mitsuru; Tomita, Takuro*; Minami, Yasuo*; Terakawa, Kota*; et al.
no journal, ,
no abstracts in English
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Onishi, Ryo*; Ishino, Masahiko; Yamamoto, Minoru*; Terakawa, Kota*; Kaihori, Takeshi; et al.
no journal, ,
To improve the femtosecond laser processing technique more accurate and controllable, the knowledge about the laser ablation process is important. In order to understand the dynamics of the femtosecond laser ablation process, we performed a pump and probe reflectivity imaging of the platinum surface during the femtosecond laser ablation by using the laser-driven soft X-ray laser as a probe beam. The fluence dependence of the soft X-ray reflectivity is classified into three regions: (1) strongly excited, (2) moderately excited, and (3) weakly excited regions. In strongly excited region, the rapid reduction of the reflectivity due to the explosive evaporation in the ablation process of the material surface was observed. In the moderately excited region, the reflectivity reduction is far slower than that in the strongly excited region.
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Ishino, Masahiko; Yamamoto, Minoru*; Terakawa, Kota*; Kaihori, Takeshi; Kawachi, Tetsuya; et al.
no journal, ,
In order to understand the dynamics of the femtosecond laser ablation process, we performed a pump and probe reflectivity imaging of the platinum surface during the femtosecond laser ablation by using the laser-driven soft X-ray laser as a probe beam. The fluence dependence of the soft X-ray reflectivity is classified into three regions: (1) strongly excited, (2) moderately excited, and (3) weakly excited regions. In strongly excited region, the rapid reduction of the reflectivity due to the explosive evaporation in the ablation process of the material surface was observed. In the moderately excited region, the reflectivity reduction is far slower than that in the strongly excited region. The reflectivity reduction is seemed to be caused by the growth of surface roughness on the ablation front because of the formation of nano-bubbles in the irradiated material.
Hasegawa, Noboru; Nishikino, Masaharu; Kaihori, Takeshi; Kawachi, Tetsuya; Yamagiwa, Mitsuru; Yamamoto, Minoru*; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Suemoto, Toru
no journal, ,
We have developed the femto-second laser pump and soft X-ray laser probe system in order to observe the dynamical processes of the femto-second laser ablation. By using this system, we succeed to obtain the temporal evolution of the soft X-ray reflectivity from the laser induced Pt surface. The results lead that the rate of decrease in the reflectivity of the probe beam has a non-linear relation with the pump laser fluence.
Hasegawa, Noboru; Nishikino, Masaharu; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru; Tomita, Takuro*; Baba, Motoyoshi*; Terakawa, Kota*; Minami, Yasuo*; Takei, Ryota*
no journal, ,
The dynamical processes of the laser-induced surface modifications such as laser ablation come to attract much attention for the micro processing by the ultra-short laser pulse. The soft X-ray laser (SXRL) is suitable for probing the initial process of the surface morphological changes, because it has the suitable wavelength (= 13.9 nm, penetration depth = 5 nm), short duration (= 7 ps) and large photon numbers (larger than 1e+10 photons/shot). In this study, we have developed the femto-second laser pump and soft X-ray laser probe system with the soft X-ray interferometer in order to observe the dynamical processes of the femto-second laser ablation. By using this system, we succeed to obtain the temporal evolution of the laser induced Pt surface. From this result, it was revealed that the expansion speed of the ablation front at the center (= 1500 m/s) of the ablation area in the initial stage of the ablation process.
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Takei, Ryota*; Baba, Motoyoshi*; Kawachi, Tetsuya; Yamagiwa, Mitsuru; Suemoto, Toru
no journal, ,
no abstracts in English
Nishikino, Masaharu; Yamamoto, Minoru*; Hasegawa, Noboru; Tomita, Takuro*; Terakawa, Kota*; Minami, Yasuo*; Takei, Ryota*; Onishi, Ryo*; Ishino, Masahiko; Kaihori, Takeshi; et al.
no journal, ,
The X-ray reflective imaging using a soft X-ray laser was used to observe the early stage of the femtosecond laser ablation process on the platinum. The fluence dependence of the soft X-ray reflectivity is classified into three regions: (1) strongly excited, (2) moderately excited, and (3) weakly excited regions. In strongly excited region, the rapid reduction of the reflectivity due to the explosive evaporation in the ablation process of the material surface was observed. In the moderately excited region, the reflectivity reduction is far slower than that in the strongly excited region. The reflectivity reduction is seemed to be caused by the growth of surface roughness on the ablation front because of the formation of nano-bubbles in the irradiated material.
Hasegawa, Noboru; Nishikino, Masaharu; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru; Tomita, Takuro*; Takei, Ryota*; Baba, Motoyoshi*
no journal, ,
The dynamical processes of the laser-induced surface modifications such as laser ablation come to attract much attention for the micro processing by the ultra-short laser pulse. The soft X-ray laser (SXRL) is suitable for probing the initial process of the surface morphological changes, because it has the suitable wavelength (= 13.9 nm, penetration depth = 5 nm), short duration (= 7 ps) and large photon numbers (larger than 1e+10 photons/shot). In this study, we have developed the femto-second laser pump and soft X-ray laser probe system with the soft X-ray interferometer in order to observe the dynamical processes of the femto-second laser ablation. By using this system, we measured the surface roughness and surface modifications of the laser induced metal surface. From this result, we succeeded to obtain the clear dependence for the material (Pt, Au, W) of the laser ablation dynamics.
Yamagiwa, Mitsuru; Hasegawa, Noboru; Nishikino, Masaharu; Tomita, Takuro*; Eyama, Tsuyoshi*; Kakimoto, Naoya*; Onishi, Naofumi*; Hatomi, Daiki*; Ito, Atsushi*; Minami, Yasuo*; et al.
no journal, ,
no abstracts in English
Hasegawa, Noboru; Nishikino, Masaharu; Tomita, Takuro*; Takei, Ryota*; Eyama, Tsuyoshi*; Kakimoto, Naoya*; Hatomi, Daiki*; Onishi, Naofumi*; Baba, Motoyoshi*; Kawachi, Tetsuya; et al.
no journal, ,
We have observed the temporal evolution of the femto-second laser irradiated metal surface by using the soft X-ray laser probe at the wavelength of 13.9 nm. The initial dynamics of the fs-laser ablation is quite rapid (
a few ps) and the dynamics of the laser processing is kept for a long time. We have developed a new pump and probe system to measure these phenomena by the same set-up. By using this system, we have succeeded to obtain the temporal evolution of the ablation front exfoliated from the laser ablated gold surface.
Hasegawa, Noboru; Kawachi, Tetsuya; Nishikino, Masaharu; Ochi, Yoshihiro; Terakawa, Kota*; Takei, Ryota*; Minami, Yasuo*; Baba, Motoyoshi*; Suemoto, Toru; Yamagiwa, Mitsuru
no journal, ,
We developed the soft X-ray laser interferometer synchronized with Ti:Sapphire laser pulse for the measurement of the nanometer-scaled surface dynamics. The soft X-ray laser is suitable for probing the initial process of the surface morphological changes, because it has the suitable wavelength (= 13.9 nm), short duration (= 7 ps) and large photon numbers. By using this system, we succeed to obtain the temporal evolution of ablation front erupting from the laser induced Pt film. From this result, it was revealed that the expansion speed of the ablation front decreased continually from the center (= 2200 m/s) to the edge (= 420 m/s) of the ablation area in the initial stage of the ablation process.
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Takei, Ryota*; Baba, Motoyoshi*; Kawachi, Tetsuya; Yamagiwa, Mitsuru; Suemoto, Toru
no journal, ,
no abstracts in English
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Ishino, Masahiko; Terakawa, Kota*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kawachi, Tetsuya; et al.
no journal, ,
no abstracts in English
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Baba, Motoyoshi*; Eyama, Tsuyoshi*; Takayoshi, Shodai*; Kawachi, Tetsuya; Yamagiwa, Mitsuru; et al.
no journal, ,
We have developed the pump and probe interferometer and reflective imaging technique of the metal surfaces during the femtosecond laser ablation by using the laser-driven soft X-ray laser at the wavelength of 13.9 nm. The pumping laser used for the ablation was a Ti: Sapphire laser pulse with the duration of 80 fs pulse at a central wavelength of 795 nm, and had a gaussian spatial profile. By using the X-ray imaging technique, the time resolved image of nano-scaled ablation dynamics of the platinum, the gold, the tungsten were obtained. We have compared the plasma expansion measured by the X-ray interferometer with the ablated hole measured by the atomic force microscopy, and discussed the fluence dependence of the femtosecond laser ablation.
Hasegawa, Noboru; Nishikino, Masaharu; Tomita, Takuro*; Eyama, Tsuyoshi*; Kakimoto, Naoya*; Hatomi, Daiki*; Onishi, Naofumi*; Ito, Atsushi*; Minami, Yasuo*; Takei, Ryota*; et al.
no journal, ,
We have observed the temporal evolution of the femto-second laser irradiated metal surface by using the soft X-ray laser probe at the wavelength of 13.9 nm. We have succeeded to obtain the temporal evolution of the ablation front from the result of the soft X-ray reflective imaging and interferogram. We will report about "the Newton's ring generated between the ablation front and the metal surface" and "the ablation front dynamics observed by the soft X-ray shadow graph".
Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Eyama, Tsuyoshi*; Kakimoto, Naoya*; Onishi, Naofumi*; Hatomi, Daiki*; Ito, Atsushi*; Minami, Yasuo*; Takei, Ryota*; et al.
no journal, ,
no abstracts in English
Hasegawa, Noboru; Nishikino, Masaharu; Ochi, Yoshihiro; Kaihori, Takeshi; Ishino, Masahiko; Imazono, Takashi; Sasaki, Akira; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru; et al.
no journal, ,
We have developed a soft X-ray laser (SXRL) interferometer capable of the single-shot imaging of nano-scaled structure dynamics. The depth and lateral resolutions of the interferometer were about 1 nm and 1.8 micron, respectively. By using this interferometer, the initial stage (50 ps) of the ablation process of the Pt surface pumped by a 70 fs Ti:Sapphire laser pulse was observed. In order to observe the detailed dynamics, the temporal synchronization between the pump and probe pulses was improved to be 3 ps by adopting a portion of the SXRL and pump beams as the time fiducials, to which the pump and probe timing was adjusted by using the X-ray streak camera.
