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Journal Articles

High spatial resolution ZnO scintillator for an in situ imaging device in EUV region

Arita, Ren*; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Empizo, M.*; Hori, Tatsuhiro*; Fukuda, Kazuhito*; Minami, Yuki*; Sarukura, Nobuhiko*; Maruyama, Momoko; et al.

Optical Materials, 36(12), p.2012 - 2015, 2014/10

 Times Cited Count:7 Percentile:38.97(Materials Science, Multidisciplinary)

A single shot image of a ZnO crystal excited by the EUV laser of Kansai Photon Science Institute was captured. The evaluated EUV beam waist radii from the ZnO emission pattern along the horizontal and vertical axes are 5.0 and 4.7$$mu$$m, respectively. The expected focal spot size of EUV laser and the spatial resolution of the magnifier (including the Schwarzschild objectives and lenses) are however 1 and 4$$mu$$m, respectively. The discrepancy on the spatial resolutions is attributed to exciton diffusion. We estimated the ZnO exciton diffusion length from the effective decay time which is shortened by exciton-exciton collision quenching and which is dependence on excitation energy density. Our results indicate that the short lifetime of ZnO is required to improve the spatial resolution.

Journal Articles

Evaluation of soft X-ray laser with ${it in situ}$ imaging device of high spatial resolution ZnO scintillator

Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Takeda, Kohei*; Nishi, Ryosuke*; Minami, Yuki*; Cadatal-Raduban, M.*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; et al.

Japanese Journal of Applied Physics, 50(12), p.122202_1 - 122202_4, 2011/12

 Times Cited Count:8 Percentile:37.66(Physics, Applied)

We demonstrate the potential of a hydrothermal method-grown ZnO as a high-spatial resolution imaging device for in-situ soft X-ray laser diagnostics by characterizing the exciton emission patterns. By plotting the emission pattern radii at each position, we estimated the evolution of the beam radius around the focal point. The beam profile of the Ni-like Ag ion plasma laser was estimated from the waist radii as 29 and 21$$mu$$m, the divergence angle as 7.2 and 11 mrad and the M2 factor as 47 and 50 in the horizontal- and vertical-axis, respectively. Spatial resolution of the magnifier was estimated to be 6$$mu$$m and is expected to improve by optimizing the optics of the magnifier and using a telescope. Our results would enhance the use of ZnO as an imaging device that would play a crucial role in the development and application of soft X-ray light sources.

Journal Articles

Evaluation of ZnO fast scintillator spatial resolution using the FZP-focused X-ray laser

Tanaka, Momoko; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Oba, Toshiyuki; Kaihori, Takeshi; Ochi, Yoshihiro; et al.

JAEA-Conf 2011-001, p.126 - 128, 2011/03

The spatial resolution of hydrothermal method grown zinc oxide (ZnO) scintillator was evaluated using X-ray laser focused with Fresnel zone plate. The fluorescence image of the ZnO scintillator was measured to be less than 10um using CCD camera coupled with a Schbartzchild expander mirror. The availability of large size ZnO crystal up to 3-inch is quite attractive for future lithography and imaging applications.

Journal Articles

X-ray imaging by using ZnO crystal

Sarukura, Nobuhiko*; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Ehrentraut, D.*; Fukuda, Tsuguo*; Tanaka, Momoko; Nishikino, Masaharu; Kawachi, Tetsuya

Reza Kenkyu, 39(3), p.193 - 196, 2011/03

Development of light sources in the soft X-ray/X-ray region, such as laser induced plasma emission and XFEL, is in demand for applications in various fields of science, medicine, and industry, among others. To promote this endeavor, development of imaging devices as diagnostic tools in this wavelength region is required. ZnO is a prominent candidate material for high spatial and temporal resolution imaging devices because of its emission at 380 nm, lifetime of less than 1 ns, and availability of large and cheap but high quality crystals. We obtained a single shot image of ZnO emission pattern excited by an X-ray laser at the Advanced Photon Research Center, Japan Atomic Energy Agency. The spatial resolution was estimated to be around 10 $$mu$$m. This result shows that ZnO can be used as a powerful imaging device for applications such as EUV lithography.

Oral presentation

Single-shot focal spot image of EUV laser using a ZnO scintillator

Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Takatori, Satoru*; Estacio, E.*; Cadatal, M.*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; Mima, Kunioki*; Tanaka, Momoko; et al.

no journal, , 

We have observed the single shot, focused image of a EUV laser through the emission of a ZnO scintillator. An estimated EUV laser focal spot size of 50$$times$$88 micrometer is reasonable considering the long focal length of the spherical mirror. This work reports a feasible method to perform single-shot beam diagnostics for EUV laser sources using a ZnO crystal scintillator. Furthermore, since the ZnO fluorescence is at 380 nm wavelength, the imaging optics for the diagnostics can all be placed outside the vacuum chamber; thereby making experiments less cumbersome. Having a capability in fast and efficient beam profiling of EUV laser sources with acceptable resolving power is very important in future lithography applications.

Oral presentation

Evaluation of ZnO fast scintillator spatial resolution using the FZP-focused EUV laser

Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Sarukura, Nobuhiko*; Ehrentraut, D.*; Fukuda, Tsuguo*; Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi*; et al.

no journal, , 

no abstracts in English

Oral presentation

Fluorescence from Ar$$_2$$ excimer using EUV free electron laser

Nishi, Ryosuke*; Minami, Yuki*; Yamanoi, Kohei*; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Sarukura, Nobuhiko*; Iwayama, Hiroshi*; Shigemasa, Eiji*; Harries, J.; Nagasono, Mitsuru*

no journal, , 

no abstracts in English

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