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Search Results: Records 1-7 displayed on this page of 7
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Journal Articles

Ablation of insulators under the action of short pulses of X-ray plasma lasers and free-electron lasers

Inogamov, N. A.*; Anisimov, S. I.*; Petrov, Y. V.*; Khokhlov, V. A.*; Zhakhovskii, V. V.*; Faenov, A. Ya.*; Pikuz, T.; Fortov, V. E.*; Skobelev, I. Y.*; Kato, Yoshiaki*; et al.

Journal of Optical Technology, 78(8), p.473 - 480, 2011/08

https://doi.org/10.1364/JOT.78.000473
 Times Cited Count：5 Percentile：29.38(Optics)

Journal Articles

Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft X-ray laser pulse

Ishino, Masahiko; Faenov, A. Ya.*; Tanaka, Momoko; Hasegawa, Noboru; Nishikino, Masaharu; Tamotsu, Satoshi*; Pikuz, T. A.*; Inogamov, N. A.*; Zhakhovskii, V. V.*; Skobelev, I. Yu.*; et al.

Journal of Applied Physics, 109(1), p.013504_1 - 013504_6, 2011/01

https://doi.org/10.1063/1.3525980
 Times Cited Count：33 Percentile：78.02(Physics, Applied)

no abstracts in English

Journal Articles

Interaction of short laser pulses in wavelength range from infrared to X-ray with metals, semiconductors, and dielectrics

Inogamov, N. A.*; Faenov, A. Ya.*; Zhakhovskii, V. V.*; Skobelev, I. Y.*; Khokhlov, V. A.*; Kato, Yoshiaki*; Tanaka, Momoko; Pikuz, T. A.*; Kishimoto, Maki; Ishino, Masahiko; et al.

Contributions to Plasma Physics, 51(4), p.361 - 366, 2010/05

https://doi.org/10.1002/ctpp.201010103
 Times Cited Count：19 Percentile：64.09(Physics, Fluids & Plasmas)

Journal Articles

Low-threshold ablation of dielectrics irradiated by picosecond soft X-ray laser pulses

Faenov, A. Y.; Inogamov, N. A.*; Zhakhovskii, V. V.*; Khokhlov, V. A.*; Nishihara, Katsunobu*; Kato, Yoshiaki*; Tanaka, Momoko; Pikuz, T. A.*; Kishimoto, Maki; Ishino, Masahiko; et al.

Applied Physics Letters, 94(23), p.231107_1 - 231107_3, 2009/06

https://doi.org/10.1063/1.3152290
 Times Cited Count：43 Percentile：82.18(Physics, Applied)

Journal Articles

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Nunami, Masanori*; Tanuma, Hajime*; Fujioka, Shinsuke*; Shimada, Yoshinori*; Fujima, Kazumi*; Furukawa, Hiroyuki*; Kato, Takako*; et al.

Physics of Plasmas, 15(5), p.056708_1 - 056708_11, 2008/00

https://doi.org/10.1063/1.2907154
 Times Cited Count：115 Percentile：97.42(Physics, Fluids & Plasmas)

Journal Articles

Theoretical simulation of extreme UV radiation source for lithography

Fujima, Kazumi*; Nishihara, Katsunobu*; Kawamura, Toru*; Furukawa, Hiroyuki*; Kagawa, Takashi*; Koike, Fumihiro*; More, R.*; Murakami, Masakatsu*; Nishikawa, Takeshi*; Sasaki, Akira; et al.

Emerging Lithographic Technologies VIII, Proceedings of SPIE Vol.5374, p.405 - 412, 2004/00

no abstracts in English

Oral presentation

Low threshold ablation of large bandgap LiF dielectrics induced by picosecond soft X-ray laser pulses

Faenov, A. Y.; Inogamov, N. A.*; Zhakhovskii, V.*; Khokhlov, V. A.*; Nishihara, Katsunobu*; Kato, Yoshiaki*; Tanaka, Momoko; Pikuz, T.*; Kishimoto, Maki; Ishino, Masahiko; et al.

no journal, , 

7 (Records 1-7 displayed on this page)
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