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Sado, Taizo*; Ueda, Koji*; Ando, Yuichiro*; Kumano, Mamoru*; Narumi, Kazumasa; Maeda, Yoshihito; Miyao, Masanobu*
ECS Transactions, 11(6), p.473 - 479, 2007/00
Our recent progresses in epitaxial growth of FeSi on Ge substrates are reviewed. Single crystalline Fe
Si layers with atomically flat interfaces were achieved on Ge(111) substrates by optimizing growth conditions at low temperatures (60
200
C). Thermal stability of it was guaranteed up to 400
C. In addition, epitaxial growth of mixed layers composed of Fe
Si, FeGe, and FeSi on Ge substrates at 400
C is reported. Finally, epitaxial growth of Fe
Si/Ge/Fe
Si/Ge structures is discussed. These results will be a powerful tool to open up SiGe related spintronics.
Kumano, Mamoru*; Ando, Yuichiro*; Ueda, Koji*; Sado, Taizo*; Narumi, Kazumasa; Maeda, Yoshihito; Miyao, Masanobu*
ECS Transactions, 11(6), p.481 - 485, 2007/00
The effects of the Fe/Si ratios on molecular beam epitaxy (MBE) of FeSi on Ge substrate have been investigated in a wide range of growth temperatures (60
300
C). From XRD measurements, it was found that Fe
Si layers were epitaxially grown on Ge(111) substrates at 60
200
C under the stoichiometric (Fe:Si = 3:1) and non-stoichiometric (Fe:Si = 4:1) conditions. From RBS measurement, it was found that atomic mixing of Fe and Ge at Fe
Si/Ge interfaces began at a growth temperature of 300
C. In the case of MBE under the stoichiometric condition, the crystallinity of Fe
Si is significantly improved compared to the non-stoichiometric condition. As a result, very low
was obtained in a wide temperature (60
200
C) under the stoichiometric condition. From the transmission electron microscopy measurements, it was shown that high-quality DO3-type Fe
Si/Ge structures with atomically flat interfaces were realized at a low temperature (
200
C) under the stoichiometric condition.