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Journal Articles

Metrology of wide field of view nano-thickness foils' homogeneity by conventional and phase contrast soft X-ray imaging

Faenov, A. Y.; Pikuz, T.*; Fukuda, Yuji; Kando, Masaki; Kotaki, Hideyuki; Homma, Takayuki; Kawase, Keigo; Skobelev, I.*; Gasilov, S.*; Kawachi, Tetsuya; et al.

Japanese Journal of Applied Physics, 49(6), p.06GK03_1 - 06GK03_5, 2010/06

 Times Cited Count:8 Percentile:34.9(Physics, Applied)

Oral presentation

Photoemission spectroscopic analysis with synchrotron radiation for direct nitridation of Al(111) by supersonic N$$_{2}$$ molecular beams

Teraoka, Yuden; Harries, J.; Yoshigoe, Akitaka

no journal, , 

We have conducted the direct nitridation of Al(111) surface by the inert N$$_{2}$$ molecular beam at 473 K at the surface chemistry experimental station of BL23SU in the SPring-8. The synchrotron radiation of 686.8 eV was used for Al-2p, N-1s and O-1s photoemission measurements. After wet cleaning processes, the Ar$$^{+}$$ ion sputtering and 773 K anneal cycle was repeated to remove a native oxide layer. A low energy electron diffraction pattern of 1$$times$$1 was confirmed. The N$$_{2}$$ molecules adsorbed dissociatively on the Al(111) surface when the translational energy of N$$_{2}$$ molecules was larger than 1.8 eV. A nitrogen uptake curve could be measured and was confirmed to be almost linear with increasing N$$_{2}$$ dose at 2.0 eV. It implies that a protective layer may not be formed on the topmost nitride surface. The nitrogen diffusion into bulk was actually confirmed in the depth profile analysis by angle-resolved photoemission spectroscopy in conjunction with a maximum entropy method.

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