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加田 渉; 横山 彰人; 江夏 昌志; 高野 勝昌*; 佐藤 隆博; 神谷 富裕
Japanese Journal of Applied Physics, 51(6), p.06FB07_1 - 06FB07_5, 2012/06
被引用回数：9 パーセンタイル：35.07(Physics, Applied)ダイヤモンド表面へのイオンビーム微細加工(PBW)プロセスの評価のために、イオンビーム誘起発光分析(micro-IBIL)システムを新たに開発した。3MeVビームで試料表面に描画することで、ダイヤモンド基板(3.0mm
3.0mm0.5mm IIa単結晶ダイヤモンド)中に埋め込まれた微細構造を作製した。PBW描画中にIBIL計測を行うことで、イオンビーム照射に伴う発光の変化を計測できた。照射したダイヤモンドの結晶状態を同じビームラインに設置した単波長型のイオンビーム誘起発光システムによって分析した結果、描画した領域がダイヤモンドのAバンド発光に起因する発光領域と対応していることが確かめられた。
前吉 雄太*; 高野 勝昌*; 麻野 敦資*; 丸井 裕美*; 大道 正明*; 佐藤 隆博; 神谷 富裕; 石井 保行; 大久保 猛; 江夏 昌志; et al.
Japanese Journal of Applied Physics, 51(4R), p.045201_1 - 045201_4, 2012/04
被引用回数：1 パーセンタイル：4.05(Physics, Applied)A relation between the fluence and the beam-induced chemical reaction in poly(9,9'-dioctylfluorene), PFO, films has been investigated to fabricate PFO-based nano-micro structures using Proton Beam Writing, PBW. In this investigation, we observed that the cross-linking reaction in PFO occurred without a cross-linking agent using PBW. Furthermore, not only the surface morphology but also structure and shape on PFO films were changed from nano-meter to micro-meter size by controlling the fluence of proton beam irradiation on the basis of the investigation. Consequently, the structure of the arabic numbers was successful fabricated as three-dimensional PFO structures with the aspect ratio of 12 at the fluence of 3.5 10
ions/
m
by PBW.
高野 勝昌*; 麻野 敦資*; 前吉 雄太*; 丸井 裕美*; 大道 正明*; 佐伯 昭紀*; 関 修平*; 佐藤 隆博; 神谷 富裕; 石井 保行; et al.
no journal, ,
The fine strings of epoxy-resin were fabricated using a focused MeV ion beam in this paper. This fabrication was carried out by the following four steps. Firstly, an epoxy-resin layer was spin-coated on a epoxy-resin film cured by electron beam irradiation as a substrate. Secondly, bridge patterns were irradiated on the epoxy-resin layer by Proton Beam Writing two times with the two different energies which led its proton beam to the two different penetration depths. Thirdly, focused 520 MeV 
Ar
particles were irradiated at aiming the bridge patterns, controlling a spot pattern. Finally, the development of the irradiated epoxy-resin files was carried out using the supercritical carbon dioxide fluid, CO
to etch the non-irradiated area under reducing the surface tension among areas of sub-micrometer size. The epoxy-resin fine strings with the diameter of 0.8 m was observed between the bridge structure with the height of 20 m and the substrate using a scanning electron microscope. A microprocessing for fine strings of a epoxy-resin was demonstrated using a focused several hundred MeV ion beam.
