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Journal Articles

Variation of surface electric resistance for TiO$$_{2}$$ by reactive sputtering

Sasase, Masato*; *; Sasaki, Teikichi; Baba, Yuji; Yamamoto, Hiroyuki

Proc. of the 2nd Int. Symp. on Sputtering and Plasma Processes; ISSP93, p.243 - 244, 1993/00

no abstracts in English

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