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Yamamoto, Yoshihisa*; Togashi, Hideaki*; Kato, Atsushi*; Hasegawa, Satoshi*; Nakano, Takuya*; Goto, Seiichi*; Teraoka, Yuden; Yoshigoe, Akitaka; Suemitsu, Maki*
no journal, ,
In this study, we have investigated adsorption of oxygen molecules on Si(110)-162 clean surface at room temperature by synchrotron radiation photoemission spectros (SR-PES). The SR-PES experiments were conducted at the surface chemistry end-station of BL23SU in the SPring-8. The photon energy was 334 eV. Samples were B-doped p-type Si(110) wafers, and were flash-annealed in an UHV ambient prior to the exposure to oxygen gas at room temperature at the gas pressure of 6.7
10
Pa. By observing a structural change after a mild annealing, we have confirmed presence of a metastable state of oxidation on this RT-oxidized Si(110) surface.