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Moritani, Kosuke; Okada, Michio*; Sato, Seiichi*; Goto, Seishiro*; Kasai, Toshio*; Yoshigoe, Akitaka; Teraoka, Yuden
Journal of Vacuum Science and Technology A, 22(4), p.1625 - 1630, 2004/08
Times Cited Count:25 Percentile:65.04(Materials Science, Coatings & Films)We studied the oxidation of Cu{111} surface with a hyperthermal O
molecular beam (HOMB) using X-ray photoemission spectroscopy (XPS) in conjunction with a synchrotron radiation (SR) source. The efficiency of oxidation with 0.6-eV-HOMB is higher thab that with 2.3-eV-HOMB under
0.5ML. Ont the other hand, further oxidation occurs rather inefficiency under
0.5ML. In this region, efficiency of oxidation with 2.3-eV-HOMB is higher than 0.6-eV-HOMB. We found that such slow oxidation process of Cu can be interpreted in terms of a collision-induced-adsorption mechanism. These results suggest that we can control the oxidation process of Cu by using HOMB.