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Journal Articles

Development of soft X-ray flat-field holographic gratings for the measurement of ${it K}$ emission spectrum of Li

Imazono, Takashi; Koike, Masato; Kawachi, Tetsuya; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; et al.

Memoirs of the SR Center Ritsumeikan University, (14), p.131 - 144, 2012/05

We have developed a wavelength-dispersive soft X-ray spectrograph covering an energy region of 50-4000 eV to attach to a conventional electron microscope. The energy range was properly divided into four ranges of 50-200 eV, 155-350 eV, 300-2200 eV, and 2000-4000 eV, and a versatile spectrograph equipped with interchangeable multiple gratings optimized in the respective energy ranges has been developed. In particular, the grating that covers the 50-200 eV range can be used for the measurement of the ${it K}$ emission spectrum ($$sim$$ 55 eV) of lithium. The diffraction efficiency evaluated by synchrotron radiation and resolving power measured by laser produced plasma sources are over 5% and in excess of 700, respectively. The ${it K}$ emission spectrum of metallic Li with high spectral resolution has been successfully observed with the spectrograph attached to a transmission electron microscope.

Journal Articles

Activities of the evaluation beamline for soft X-ray optical elements (BL-11)

Imazono, Takashi; Sano, Kazuo*; Koike, Masato

Memoirs of the SR Center Ritsumeikan University, (13), p.145 - 156, 2011/06

Journal Articles

A New soft X-ray polarimeter and ellipsometer at BL-11

Imazono, Takashi; Sano, Kazuo*; Suzuki, Yoji; Kawachi, Tetsuya; Koike, Masato

Memoirs of the SR Center Ritsumeikan University, (12), p.87 - 100, 2010/05

A novel apparatus for polarimetric and ellipsometric measurements for the complete polarization analysis in the soft X-ray (SX) region, which is based on the rotating-analyzer ellipsometry by using six independently movable drive shafts, has been designed, constructed, and installed in BL-11. Linear polarization measurement has been demonstrated using two identical Mo/Si multilayer polarizers. The incident wavelength was scanned from 12.4 nm to 14.8 nm by a VLS-PGM of BL-11, and the angles of incidence of both polarizers were also varied from 37.5$$^circ$$ to 52.3$$^circ$$. The best performance of polarizers has been determined to be over 99% at 13.9 nm, and the degree of linear polarization has been assessed to be 85-88% in the measured wavelength range for the first time since the completion of the beamline. This means that BL-11 is upgraded as the comprehensive evaluation beamline for optical elements including polarizing elements for use in the SX region.

Journal Articles

Heat stability of Co/SiO$$_{2}$$ multilayers for use in the soft X-ray region

Ishino, Masahiko; Koike, Masato; Sano, Kazuo*

Memoirs of the SR Center Ritsumeikan University, (10), p.131 - 137, 2008/05

no abstracts in English

Journal Articles

Fabrication and evaluation of a wide-band multilayer laminar-type holographic grating for use with a soft X-ray flat field spectrograph in the region of 1.7 keV

Imazono, Takashi; Ishino, Masahiko; Koike, Masato; Sasai, Hiroyuki*; Sano, Kazuo*

Memoirs of the SR Center Ritsumeikan University, (10), p.119 - 130, 2008/05

A multilayer laminar-type holographic grating having an average groove density of 2400 lines/mm is designed and fabricated for use with a soft X-ray flat field spectrograph covering the 1.7-keV region. A varied-line-spaced grooves pattern is generated by the use of an aspheric wavefront recording system and laminar-type grooves are formed by a reactive ion-etching method. Mo/SiO$$_2$$ multilayers optimized for the emission lines of Hf-M, Si-K, and W-M are deposited on one of the three designated areas on the grating surface in tandem. The measured first-order diffraction efficiencies at the respective centers of the areas are 18$$sim$$20%. The flat field spectrograph equipped with the grating indicates a spectral line width of 8$$sim$$14 eV for the soft X-ray emission spectra generated from electron-impact X-ray sources.

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