Development of high resistant anti-reflection coating by using AlO/SiO multilayer

Ochi, Yoshihiro; Nagashima, Keisuke; Okada, Hajime; Tanaka, Momoko; Tateno, Ryo*; Furukawa, Yasuyuki*; Sugiyama, Akira

Proceedings of SPIE, Vol.8885, p.88851Z_1 - 88851Z_6, 2013/11

https://doi.org/10.1117/12.2030096

We designed and fabricated high damage-resistant AR coating using AlO/SiO layers. As a result of irradiation test using 500 ps pulses at 1 kHz, the damage threshold of the AR coating was estimated to be over 36 J/cm (average value). We also fabricated high reflection (HR) mirrors using AlO/SiO layers added on TaO/SiO layers and measured damage threshold of them for 7 ns, 500 ps, and 1 ps pulses.