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Journal Articles

Ortho-para conversion of molecularly chemisorbed H$$_{2}$$ on Pd(210)

Ueta, Hirokazu; Fukutani, Katsuyuki

Vacuum and Surface Science, 64(9), p.430 - 434, 2021/09

Journal Articles

${it In situ}$ optical microscopy of crystal growth of graphene using thermal radiation

Terasawa, Tomoo; Taira, Takanobu*; Obata, Seiji*; Saiki, Koichiro*; Yasuda, Satoshi; Asaoka, Hidehito

Vacuum and Surface Science, 62(10), p.629 - 634, 2019/10

Graphene, an atomically thin sheet composed of sp$$^{2}$$ carbon atoms, has been the most attractive material in this decade. The fascinating properties of graphene are exhibited when it is monolayer. Chemical vapor deposition (CVD) is widely used to produce monolayer graphene selectively in large-area. Here we introduce "radiation-mode optical microscopy" which we have developed in order to realize the ${it in situ}$ observation of the CVD growth of graphene. We show the method to observe graphene as bright contrast on Cu substrates in thermal radiation images. The growth mechanism, the nucleation site and rate limiting process, revealed by the ${it in situ}$ observation is presented. Finally, we show the CVD growth of graphene on Au substrates, resulting in the tuning of the emissivity of graphene by the pre-treatment procedures. Our method is not only a way to observe the graphene growth but also shed light on the thermal radiation property of graphene.

Journal Articles

Turbomolecular pump as main pump in a high-power proton accelerator vacuum system

Kamiya, Junichiro; Kinsho, Michikazu; Ogiwara, Norio*; Sakurai, Mitsuru*; Mabuchi, Takuya*; Wada, Kaoru*

Vacuum and Surface Science, 62(8), p.476 - 485, 2019/08

J-PARC 3GeV rapid cycling synchrotron (RCS) is one of the highest beam power proton accelerators. Challenges for achieving low pressure region in ultra-high vacuum (UHV) in the beam line are the large outgassing source. We focused turbo molecular pumps (TMP) as maing pump because it can evacuate the continuous and additional outgassing with large pumping speed in wide pressure range. It is also possible to evacuate from low vacuum to UHV with only a few hours by using TMP, which ensures users' experimental time after vacuum device maintenance. During more than 10 years operation of the vacuum system, many experiences have been accumulated about the usage of TMP in RCS. In this presentation, we discussed about validity of TMP as main pump in high power proton beam accelerator by showing the performance of the beam line pressure during the beam operation. Further, in anticipation of upgrade higher beam power more than 1 MW, validity of a combination of TMP and NEG pump will be mentioned.

Journal Articles

Development of a gas distribution measuring system for 2-D beam profile monitor

Yamada, Ippei; Ogiwara, Norio*; Hikichi, Yusuke*; Kamiya, Junichiro; Kinsho, Michikazu

Vacuum and Surface Science, 62(7), p.400 - 405, 2019/07

no abstracts in English

Journal Articles

Simultaneous observation of Si oxidation rate and oxidation-induced strain using XPS

Ogawa, Shuichi*; Yoshigoe, Akitaka; Takakuwa, Yuji*

Vacuum and Surface Science, 62(6), p.350 - 355, 2019/06

Thermal oxidation of Si substrate is an indispensable process for the Si device fabrication. However, the influence of oxidation induced strain cannot be ignored for thin films. Synchrotron radiation real-time photoelectron spectroscopy was used as a method to measure simultaneously oxidation induced strain and oxidation rate. It was found that the acceleration of interfacial oxidation induced by thermal strain was observed for the rapid thermal oxidation. The results can be explained by the model in which point defects caused by strain become reaction sites at the SiO$$_{2}$$/Si interface.

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