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Journal Articles

Observation of surface modification of multi-layered mirror induced by soft X-ray laser pulse

Nishikino, Masaharu; Ishino, Masahiko; Ichimaru, Satoshi*; Hatayama, Masatoshi*; Hasegawa, Noboru; Kawachi, Tetsuya

Reza Gakkai Dai-483-Kai Kenkyukai Hokoku; Tanhacho Ryoshi Bimu Hassei To Sono Oyo, p.25 - 28, 2015/12

X-ray ablation has been recently achieved using plasma soft X-ray lasers (SXRLs), laser plasma soft X-rays, and X-ray free electron lasers. In order to study the interactions between picosecond SXRL beams and material and multi-layered structure surfaces were irradiated with SXRL pulse. Following irradiation, the substrate surface was observed using a scanning electron microscope and an atomic force microscope. The surface modifications caused by the SXRL beam were clearly seen. The multi-layered mirror is the important component for the EUV lithography. Then, we have started the damage test of multi-layered structure, and the surface modifications caused by the SXRL pulse irradiations were confirmed.

Journal Articles

Thermal stability of a magnetic domain wall in nanowires

Fukami, Shunsuke*; Ieda, Junichi; Ono, Hideo*

Physical Review B, 91(23), p.235401_1 - 235401_7, 2015/06

 Times Cited Count:10 Percentile:44.63(Materials Science, Multidisciplinary)

We study thermal stability of a magnetic domain wall pinned in nanowires made of Co/Ni multilayers, and analyze the effective volume that governs the thermal stability. We find that, above a critical wire width, the domain wall depinning is initiated by a subvolume excitation and that the critical width is dependent on the wire thickness. The obtained findings are supported by the distribution of critical current density for domain wall depinning and are qualitatively described by considering the balance between the Zeeman energy and domain wall elastic energy.

Journal Articles

Applications of multilayered gratings to synchrotron light sources; New horizon of diffraction grating monochromators in the keV region

Koike, Masato; Imazono, Takashi; Ishino, Masahiko

X-sen Bunseki No Shimpo, 46, p.159 - 166, 2015/03

The demand for the physical-properties research using powerful light sources, such as synchrotron radiation and soft-X-rays laser light, is increasing. When promoting such research, it is required to develop efficient soft-X-ray spectrometers suitable for absorption, emission, and fluorescence which are appeared in an energy rage of 1-8 keV. We describe the development of laminar type diffraction gratings which enhance diffraction efficiency remarkably by use of soft-X-ray multilayers instead of single metal layers.

JAEA Reports

Development of multilayer mirrors for use in the wavelength region of 4 nm

Ishino, Masahiko; Yoda, Osamu*; Koike, Masato

JAERI-Research 2005-019, 13 Pages, 2005/09

JAERI-Research-2005-019.pdf:1.46MB

We have developed soft X-ray multilayer mirrors for use around the wavelength region of 4 nm including the K-absorption edge of carbon ($$lambda = 4.4 nm$$). We have chosen Co$$_3$$O$$_4$$ and Cr as the final candidate materials for absorber layers, and SiO$$_2$$ and Sc for the spacer materials as the result of theoretical invitation. Co$$_3$$O$$_4$$/SiO$$_2$$, Co$$_3$$O$$_4$$/Sc and Cr/Sc multilayer mirrors have been fabricated by means of an ion beam sputtering (IBS) method. As the result of structure evaluations with X-ray diffraction measurement, we have found that the fabricated Co$$_3$$O$$_4$$/Sc and Cr/Sc multilayer mirrors have stable structures. Soft X-ray reflectivity measurements for fabricated multilayer mirrors are carried out in the wavelength region of 4 nm with a synchrotron radiation source. We have found that the Cr/Sc multilayer mirror has a high soft X-ray reflectivity. However, soft X-ray reflectivities below the absorption edge of carbon are reduced. The analyses obtained by EPMA and SIMS suggested that this phenomenon was attributed to contamination of carbon.

Journal Articles

Investigation of perpendicular magnetic films by means of soft X-ray spectroscopy; [Co/Pd]$$_{n}$$ multilayered films and RE-TM amorphous films

Agui, Akane; Mizumaki, Masaichiro*

Shingaku Giho, 104(409), p.7 - 10, 2004/11

no abstracts in English

Journal Articles

Soft X-ray magnetic circular dichroism study of [Co/Pd] multilayered perpendicular magnetic films

Agui, Akane; Mizumaki, Masaichiro*; Matsushita, Tomohiro*; Asahi, Toru*; Kawaji, Jun*; Sayama, Junichi*; Osaka, Tetsuya*

Journal of Applied Physics, 95(12), p.7825 - 7831, 2004/06

 Times Cited Count:6 Percentile:70.35(Physics, Applied)

The electronic and spin states of [Co/Pd] multilayered perpendicular magnetization films with various seedlayers have been investigated by means of soft X-ray absorption and magnetic circular dichroism spectroscopy at the Co ${it L}$$$_{2,3}$$-edges. The expectation values of the orbital angular momentum $$<$$${it L}$$$_{z}$$$$>$$ and the spin angular momentum $$<$$${it S}$$$_{z}$$$$>$$ of Co atom in the [Co/Pd] multilayered film were estimated using the sum rule. It was found that the seedlayer changes macroscopic magnetic properties of the [Co/Pd] multilayered film without affecting the electronic and spin states of the upper layers of Co.

Journal Articles

Fabrication of multilayer mirrors consisting of oxide and nitride layers for continual use across the K-absorption edge of carbon

Ishino, Masahiko; Yoda, Osamu

Applied Optics, 43(9), p.1849 - 1855, 2004/03

 Times Cited Count:1 Percentile:90.83(Optics)

The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. Co$$_3$$O$$_4$$, SiO$$_2$$, and BN are found to be suitable for multilayer mirrors based on theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with Cu$$K$$$$_{alpha1}$$ X rays of the fabricated Co$$_3$$O$$_4$$/SiO$$_2$$ multilayers have sharp Bragg peaks and the layer structures evaluated from TEM observations are uniform. On the other hand, the Bragg peaks of Co$$_3$$O$$_4$$/BN multilayers split and aggregated Co$$_3$$O$$_4$$ is observed. To improve the Co$$_3$$O$$_4$$ layer structure, Cr$$_2$$O$$_3$$ was mixed into Co$$_3$$O$$_4$$. The mixed oxide layer structure in the Mix/BN multilayer (Mix = Co$$_3$$O$$_4$$ + Cr$$_2$$O$$_3$$) is relatively uniform and the Bragg peaks do not split.

Journal Articles

Heat stability of Mo/Si multilayers inserted with compound layers

Ishino, Masahiko; Yoda, Osamu; Takenaka, Hisataka*; Sano, Kazuo*; Koike, Masato

Surface & Coatings Technology, 169-170(1-3), p.628 - 631, 2003/06

no abstracts in English

Journal Articles

Measuremernt of the gain medium of plasma X-ray laser with spatial resolution

Tanaka, Momoko; Kawachi, Tetsuya

Purazuma, Kaku Yugo Gakkai-Shi, 79(4), p.386 - 390, 2003/04

no abstracts in English

Journal Articles

Heat stability of Mo/Si multilayers inserted with silicon oxide layers

Ishino, Masahiko; Yoda, Osamu; Sano, Kazuo*; Koike, Masato

X-Ray Mirrors, Crystals, and Multilayers II (Proceedings of SPIE Vol.4782), p.277 - 284, 2002/12

no abstracts in English

Journal Articles

Optimization of the silicon oxide layer thicknesses inserted in the Mo/Si multilayer interfaces for high heat stability and high reflectivity

Ishino, Masahiko; Yoda, Osamu

Journal of Applied Physics, 92(9), p.4952 - 4958, 2002/11

 Times Cited Count:5 Percentile:74.37(Physics, Applied)

no abstracts in English

Journal Articles

New type of Monk-Gillieson monochromator capable of covering a 0.7- to 25-nm range

Koike, Masato; Sano, Kazuo*; Harada, Yoshihisa*; Yoda, Osamu; Ishino, Masahiko; Tamura, Keisuke*; Yamashita, Kojun*; Moriya, Naoji*; Sasai, Hiroyuki*; Jinno, Masafumi*; et al.

X-Ray Mirrors, Crystals, and Multilayers II (Proceedings of SPIE Vol.4782), p.300 - 307, 2002/07

For the purpose of realizing an evaluation beamline for characterizing soft X-ray optical elements in a wide wavelength range of 0.7-25 nm, we have designed and constructed a new type of monochromator that combined two types of Monk-Gillieson monochromators. One is a conventional type equipped with three varied-line-spacing plane gratings, allowing a choice of two included angles. The other is a new type that employs a scanning mechanism based on Surface Normal Rotation (SNR). The SNR scheme provides high throughput at short wavelengths and simple scanning mechanism by means of a grating rotation about its normal. The monochromator is operated in the SNR and conventional modes over the ranges of 0.7-2.0 nm and 2.0-25 nm, respectively. In this paper we describe the optical and mechanical designs of the monochromator, wavelength calibrations in the SNR mode, and preliminary experimental data, such as the transmittance of an Al filter at $$sim$$0.8 nm and the total yield photoelectron measurement on a MgO powder in a wavelength rage of 0.7-2 nm.

Journal Articles

Total-electron-yield X-ray standing-wave measurements of multilayer X-ray mirrors for interface structure evaluation

Muramatsu, Yasuji; Takenaka, Hisataka*; Gullikson, E. M.*; Perera, R. C. C.*

Japanese Journal of Applied Physics, Part 1, 41(6B), p.4250 - 4252, 2002/06

 Times Cited Count:9 Percentile:60.04(Physics, Applied)

no abstracts in English

Journal Articles

Boundary structure of Mo/Si multilayers for soft X-ray mirrors

Ishino, Masahiko; Yoda, Osamu; Haishi, Yasuyuki*; Arimoto, Fumiko*; Takeda, Mitsuhiro*; Watanabe, Seiichi*; Onuki, Somei*; Abe, Hiroaki

Japanese Journal of Applied Physics, Part 1, 41(5A), p.3052 - 3056, 2002/05

 Times Cited Count:10 Percentile:57.01(Physics, Applied)

no abstracts in English

Journal Articles

New evaluation beamline for soft X-ray optical elements

Koike, Masato; Sano, Kazuo*; Yoda, Osamu; Harada, Yoshihisa*; Ishino, Masahiko; Moriya, Naoji*; Sasai, Hiroyuki*; Takenaka, Hisataka*; Gullikson, E. M.*; Mrowka, S.*; et al.

Review of Scientific Instruments, 73(3), p.1541 - 1544, 2002/03

 Times Cited Count:20 Percentile:29.1(Instruments & Instrumentation)

no abstracts in English

Journal Articles

RBS/channeling analysis of epitaxial films with Nb buffer layer on sapphire substrate

Yamamoto, Shunya; Naramoto, Hiroshi

Nuclear Instruments and Methods in Physics Research B, 190(1), p.657 - 660, 2002/00

 Times Cited Count:2 Percentile:79.73

Epitaxial Cu (111), Al (111) and Sc (0001) films were successfully grown on $$alpha$$-Al$$_{2}$$O$$_{3}$$ (11$$bar{2}$$0) substrates with a high quality Nb (110) buffer layer by electron beam evaporation technique. Films were analyzed by RBS/channeling and X-ray diffraction techniques. The Cu (111) film and Al (111) film on the Nb (110) buffer layer have twinned structure, which is rotated by 180$$^{circ}$$ with each other around the $$<$$111$$>$$ direction. The crystal quality of Cu (111) layer was improved with the increase of Nb (110) buffer layer thickness and then saturates at the high quality after about 2 nm thickness.

Journal Articles

Evaluation methods of interlayer-structure-distribution in multilayers by total-electron-yield X-ray standing wave measurements

Muramatsu, Yasuji; Takenaka, Hisataka*; Gullikson, E. M.*; Perera, R. C. C.*

X-sen Bunseki No Shimpo, 33, p.145 - 154, 2002/00

no abstracts in English

Journal Articles

Dielectric investigation of [(SrTiO$$_{3}$$)$$_{6}$$(BaTiO$$_{3}$$)$$_{6}$$]$$_{2}$$ multilayer capacitor

Yoneda, Yasuhiro; Sakaue, Kiyoshi*; Terauchi, Hikaru*

Japanese Journal of Applied Physics, Part 1, 40(12), p.6888 - 6892, 2001/12

 Times Cited Count:2 Percentile:87.4(Physics, Applied)

no abstracts in English

Journal Articles

Total-electron-yeild X-ray standing wave measurements of multilayer X-ray mirrors

Muramatsu, Yasuji; Takenaka, Hisataka*; Gullikson, E. M.*; Perera, R. C. C.*

Advanced Light Source Compendium of User Abstracts 2000, 10 Pages, 2001/07

no abstracts in English

Journal Articles

High-resolution elemental mapping of titanium oxide/aluminum oxide multilayer by spectrum-imaging

Kurata, Hiroki; Kumagai, Hiroshi*; Ozasa, kazunari*

Journal of Electron Microscopy, 50(3), p.141 - 146, 2001/07

no abstracts in English

48 (Records 1-20 displayed on this page)