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Journal Articles

Post-implantation annealing effects on the surface morphology and electrical characteristics of 6H-SiC implanted with aluminum

Oi, Akihiko; Oshima, Takeshi; Yoshikawa, Masahito; Lee, K. K.; Iwami, Motohiro*; Ito, Hisayoshi

Materials Science Forum, 389-393, p.831 - 834, 2002/05

no abstracts in English

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