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Journal Articles

Performance Test of a ceramic turbo-viscous pump

Abe, Tetsuya; Hiroki, Seiji; Murakami, Yoshio; *; *; *

Shinku, 37(3), p.161 - 164, 1994/00

no abstracts in English

Journal Articles

Development of turbo-viscous pump with ceramic rotor assembly and oil-free driving unit

Murakami, Yoshio; Abe, Tetsuya; *; *

J. Vac. Sci. Technol., A, 9(3), p.2053 - 2057, 1991/05

no abstracts in English

Journal Articles

Performance test of a ceramic rotor for vacuum pump

Abe, Tetsuya; Murakami, Yoshio; Takazawa, Kunio*; Morii, Shigeki*

Shinku, 30(5), p.221 - 225, 1987/05

no abstracts in English

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