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Journal Articles

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Nishikawa, Takeshi*

Proceedings of SPIE, Vol.9776, p.97762C_1 - 97762C_6, 2016/03

 Times Cited Count:1 Percentile:57.71

For the improvement of efficiency and output of the laser pumped plasma (LPP) extreme ultra-violet (EUV) light source, we present a hydrodynamics model of laser irradiated Sn targets. The model takes liquid/solid to gas transition and mixed phase condition of the flow into account for the calculation of the distribution of the particles produced by the pre-pulse laser irradiation and optimization of the EUV source. Firstly, we investigate the mechanisms of the fragmentation of the target and particle emission, including the effect of the equation of state of Sn, and secondly, an applicable model is proposed based on the analysis.

Journal Articles

Density and X-ray emission profile relationships in highly ionized high-Z laser-produced plasmas

Yoshida, Kensuke*; Fujioka, Shinsuke*; Higashiguchi, Takeshi*; Ugomori, Teruyuki*; Tanaka, Nozomi*; Kawasaki, Masato*; Suzuki, Yuhei*; Suzuki, Chihiro*; Tomita, Kentaro*; Hirose, Ryoichi*; et al.

Applied Physics Letters, 106(12), p.121109_1 - 121109_5, 2015/03

 Times Cited Count:6 Percentile:32.7(Physics, Applied)

Journal Articles

High spatial resolution ZnO scintillator for an in situ imaging device in EUV region

Arita, Ren*; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Empizo, M.*; Hori, Tatsuhiro*; Fukuda, Kazuhito*; Minami, Yuki*; Sarukura, Nobuhiko*; Maruyama, Momoko; et al.

Optical Materials, 36(12), p.2012 - 2015, 2014/10

 Times Cited Count:7 Percentile:38.97(Materials Science, Multidisciplinary)

A single shot image of a ZnO crystal excited by the EUV laser of Kansai Photon Science Institute was captured. The evaluated EUV beam waist radii from the ZnO emission pattern along the horizontal and vertical axes are 5.0 and 4.7$$mu$$m, respectively. The expected focal spot size of EUV laser and the spatial resolution of the magnifier (including the Schwarzschild objectives and lenses) are however 1 and 4$$mu$$m, respectively. The discrepancy on the spatial resolutions is attributed to exciton diffusion. We estimated the ZnO exciton diffusion length from the effective decay time which is shortened by exciton-exciton collision quenching and which is dependence on excitation energy density. Our results indicate that the short lifetime of ZnO is required to improve the spatial resolution.

Journal Articles

Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas

Fujioka, Shinsuke*; Nishimura, Hiroaki*; Nishihara, Katsunobu*; Sasaki, Akira; Sunahara, Atsushi*; Okuno, Tomoharu*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Tao, Y.*; Shimada, Yoshinori*; et al.

Physical Review Letters, 95(23), p.235004_1 - 235004_4, 2005/12

 Times Cited Count:135 Percentile:95.53(Physics, Multidisciplinary)

no abstracts in English

Journal Articles

Approach to optimize conversion efficiency of discharge-pumped plasma extreme ultraviolet sources

Masnavi, M.*; Nakajima, Mitsuo*; Sasaki, Akira; Hotta, Eiki*; Horioka, Kazuhiko*

Applied Physics Letters, 87(11), p.111502_1 - 111502_3, 2005/09

 Times Cited Count:4 Percentile:18.62(Physics, Applied)

no abstracts in English

Journal Articles

Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams

Shimada, Yoshinori*; Nishimura, Hiroaki*; Nakai, Mitsuo*; Hashimoto, Kazuhisa*; Yamaura, Michiteru*; Tao, Y.*; Shigemori, Keisuke*; Okuno, Tomoharu*; Nishihara, Katsunobu*; Kawamura, Toru*; et al.

Applied Physics Letters, 86(5), p.051501_1 - 051501_3, 2005/01

 Times Cited Count:110 Percentile:94.83(Physics, Applied)

no abstracts in English

Journal Articles

Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Sasaki, Akira; Nishihara, Katsunobu*; Murakami, Masakatsu*; Koike, Fumihiro*; Kagawa, Takashi*; Nishikawa, Takeshi*; Fujima, Kazumi*; Kawamura, Toru*; Furukawa, Hiroyuki*

Applied Physics Letters, 85(24), p.5857 - 5859, 2004/12

 Times Cited Count:40 Percentile:79.79(Physics, Applied)

no abstracts in English

Journal Articles

Characteristics of extreme ultraviolet radiation conversion efficiency of a xenon plasma

Masnavi, M.*; Nakajima, Mitsuo*; Sasaki, Akira; Hotta, Eiki*; Horioka, Kazuhiko*

Japanese Journal of Applied Physics, 43(12), p.8285 - 8291, 2004/12

 Times Cited Count:4 Percentile:20.72(Physics, Applied)

no abstracts in English

Journal Articles

Laser produced plasma for EUV light source for lithography

Nishihara, Katsunobu*; Nishimura, Hiroaki*; Mochizuki, Takayasu*; Sasaki, Akira

Reza Kenkyu, 32(5), p.330 - 336, 2004/05

no abstracts in English

Journal Articles

Theoretical simulation of extreme UV radiation source for lithography

Fujima, Kazumi*; Nishihara, Katsunobu*; Kawamura, Toru*; Furukawa, Hiroyuki*; Kagawa, Takashi*; Koike, Fumihiro*; More, R.*; Murakami, Masakatsu*; Nishikawa, Takeshi*; Sasaki, Akira; et al.

Emerging Lithographic Technologies VIII, Proceedings of SPIE Vol.5374, p.405 - 412, 2004/00

no abstracts in English

Journal Articles

Theoretical EUV spectrum of near Pd-like Xe

Sasaki, Akira

Purazuma, Kaku Yugo Gakkai-Shi, 79(4), p.315 - 317, 2003/04

no abstracts in English

Oral presentation

Modeling of laser and target interaction in the plasma EUV sources

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*

no journal, , 

no abstracts in English

Oral presentation

Study of nLTE kinetic model of high-z ions for laser plasma produced (LPP) EUV sources to fusion plasmas

Sasaki, Akira; Murakami, Izumi*; Kato, Daiji*; Morita, Shigeru*

no journal, , 

The non-local thermodynamic equilibrium (nLTE) atomic kinetics in high-Z plasmas is investigated for Ag, Sn through W, which are used for X-ray lasers, EUV sources and fusion devices. We develop the atomic model based on nl configuration averaged levels structure, with atomic energy levels, radiative rates and autoionization rates calculated using the HULLAC code. The dielectronic recombination processes are included into the model by including autoionizing levels explicitly. We investigate the mean charge and radiative power loss with respect to the size of the model; by defining the groups of the levels, which consist of core a configuration and one excited electron, and by performing calculations increasing the number of groups. It is found that as a general trend, the mean charge decreases and the radiative power loss increases, until convergence is obtained when sufficiently large number of dielectronic recombination channels is included. The model is validated at code comparison workshops and also comparison with spectroscopic measurements, which are carried out using magnetic fusion devices.

Oral presentation

Hydrodynamics modeling of the dynamics of Sn droplet target for the EUV source

Sasaki, Akira

no journal, , 

no abstracts in English

Oral presentation

Modeling of initial interaction between laser and Sn target for the EUV source

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*

no journal, , 

no abstracts in English

Oral presentation

Modeling of the laser pumped plasma (LPP) EUV sources

Sasaki, Akira

no journal, , 

no abstracts in English

Oral presentation

Modeling of fragmentation of the target for EUV source using a self-organizing Lagrangian hydrodynamics simulation

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*

no journal, , 

no abstracts in English

Oral presentation

Modeling of mist formation during the initial interaction between Sn droplet target for EUV source and pre pulse laser

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*

no journal, , 

no abstracts in English

Oral presentation

Modeling of fragmentation of laser irradiated tin droplet target for extreme ultraviolet (EUV) light sources

Sasaki, Akira

no journal, , 

In the study of extreme ultraviolet (EUV) light sources, high conversion efficiency is achieved using the double pulse technique; a small tin droplet target is irradiated by the prepulse laser to cause fragmentation of the target to form a cloud small particles or mist, which is heated by the main CO$$_2$$ laser pulse to produce the uniform plasma from which efficient EUV emission is obtained. The fragmentation may be caused due to shock heating driven by the prepulse laser irradiation, which also may bring the target to the warm dense state. In this paper, a new hydrodynamics simulation, which will be used to calculate the temporal and spatial development of tin particles, is proposed. The simulation is based on the two dimensional self-adapting Lagrangian grid. The theory of liquid and gas phase transition in thermodynamic equilibrium, allows one to determine the ratio between gas and liquid phase at given temperature and density.

Oral presentation

Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*

no journal, , 

no abstracts in English

24 (Records 1-20 displayed on this page)