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Teraoka, Yuden; Yoshigoe, Akitaka; Moritani, Kosuke
Atomic Collision Research in Japan, No.29, p.68 - 70, 2003/00
There are two surface chemical reaction modes in the O/Si(001) system, that is, oxide-layers formation and SiO desorption. We have found that these reaction modes could be selected by changing translational kinetic energy of incident O
molecules.
Teraoka, Yuden; Yoshigoe, Akitaka
Hyomen Kagaku, 23(9), p.553 - 561, 2002/09
no abstracts in English
Teraoka, Yuden; Yoshigoe, Akitaka
Atomic Collision Research in Japan, No.28, p.97 - 99, 2002/00
The translational kinetic energy of incident molecules is an important factor for the induction of surface reactions. We applied supersonic seed molecular beam techniques and high-energy-resolution photoemission spectroscopy using synchrotron radiation to the Si initial oxidation analysis. We have already found out that the saturated oxygen coverage on HO-chemisorbed Si(001) surfaces depends on the O
incident energy. Two potential energy barriers were confirmed in accordance with the first-principles calculation. An action of the incident energy should be confirmed also on clean Si(001) surfaces. Therefore, the incident energy dependence of the O
dissociative chemisorption on the clean Si(001) surface has been investigated by photoemission spectroscopy for Si-2p and O-1s core levels to make clear how the incident energy affects the ultra-thin oxide-layers formation.
Teraoka, Yuden; Yoshigoe, Akitaka
Proceedings of 3rd International Symposium on Atomic Level Characterizations for New Materials and Devices '01 (ALC '01), p.341 - 344, 2001/11
no abstracts in English
Asano, Yoshihiro; Sugita, Takeshi*
JAERI-Research 96-001, 164 Pages, 1996/01
no abstracts in English
W.Shu*; Okuno, Kenji; Hayashi, Yasunori*
JAERI-M 93-043, 62 Pages, 1993/03
no abstracts in English
;
Journal of Nuclear Materials, 116, p.200 - 205, 1983/00
Times Cited Count:32 Percentile:92.57(Materials Science, Multidisciplinary)no abstracts in English