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Journal Articles

Influence of O$$_{2}$$ incident energy for initial sticking probability and product SiO desorption rate on Si(001) surfaces

Teraoka, Yuden; Yoshigoe, Akitaka

Proceedings of 3rd International Symposium on Atomic Level Characterizations for New Materials and Devices '01 (ALC '01), p.341 - 344, 2001/11

no abstracts in English

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