Diagnostics of pulsed plasma in laser ablation of boron compounds

Oba, Hironori; Saeki, Morihisa; Yokoyama, Atsushi

Proceedings of Plasma Science Symposium 2005/22nd Symposium on Plasma Processing (PSS-2005/SPP-22), p.331 - 332, 2005/01

A plasma produced by a XeCl laser ablation of boron compound was investigated using ion probes and a quadrupole mass spectrometer. Although the ablated neutral boron atoms had a natural abundance ratio, the isotope ratio of singly ionized boron atoms having a greatly different from the natural abundance ratio was observed. The observed isotope ratio of boron ions was different from the natural abundance.