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Journal Articles

Real-time observation of initial stages thermal oxidation on Si(001) surface by using synchrotron radiation photoemission spectroscopy

Yoshigoe, Akitaka; Moritani, Kosuke; Teraoka, Yuden

Shinku, 46(5), p.424 - 428, 2003/05

https://doi.org/10.3131/jvsj.46.424

In order to study the reaction mechanism of the initial thermal Si(001) oxidation by O$$_{2}$$(1$$times$$10$$^{-4}$$Pa) at the surface temperature region between 870K and 1120K, we have performed the ${it real-time}$ synchrotron radiation photoemission spectroscopy of Si-2p and O-1s levels. The oxygen uptake curves as a function of the oxygen exposure time were analyzed on the basis of kinetics. The Si oxidation states corresponding to the adsorbed oxygen amount were well clarified by the time evolution of Si-2p photoemission spectra.

Journal Articles

${it In situ}$ analysis using synchrotron radiation photoemission spectroscopy for initial oxidation of oxygen preadsorbed Si(001) surfaces induced by supersonic O$$_{2}$$ molecular beams

Yoshigoe, Akitaka; Teraoka, Yuden

Surface and Interface Analysis, 34(1), p.432 - 436, 2002/08

https://doi.org/10.1002/sia.1332
 Times Cited Count：3 Percentile：8.33(Chemistry, Physical)

no abstracts in English

Journal Articles

Si 2p and O 1s photoemission from oxidized Si(001) surfaces depending on translational kinetic energy of incident O$$_{2}$$ molecules

Teraoka, Yuden; Yoshigoe, Akitaka

Applied Surface Science, 190(1-4), p.75 - 79, 2002/05

https://doi.org/10.1016/S0169-4332(01)00842-X
 Times Cited Count：12 Percentile：51.94(Chemistry, Physical)

no abstracts in English

Journal Articles

Real time observation on oxidation states on Si(001) surfaces induced by translational energy of O$$_{2}$$ using synchrotron radiation photoemission spectroscopy

Yoshigoe, Akitaka; Teraoka, Yuden

Shinku, 45(3), p.204 - 207, 2002/03

https://doi.org/10.3131/jvsj.45.204

no abstracts in English

Journal Articles

In situ photoemission spectroscopy using synchrotron radiation for O$$_{2}$$ translational kinetic energy induced oxidation processes of partially-oxidized Si(100) surfaces

Teraoka, Yuden; Yoshigoe, Akitaka

Hyomen Kagaku, 22(8), p.530 - 536, 2001/08

https://doi.org/10.1380/jsssj.22.530

no abstracts in English

Journal Articles

${it In situ}$ Si-${it 2p}$ core-level spectroscopy using synchrotron radiation for Si(001) initial oxidation by translational kinetic energy of O$$_{2}$$ molecules

Yoshigoe, Akitaka; Teraoka, Yuden

Transactions of the Materials Research Society of Japan, 26(2), p.755 - 758, 2001/06

no abstracts in English

Journal Articles

${it Real-time}$ observation of oxidation states on Si(001)-2$$times$$1 during supersonic O$$_{2}$$ molecular beam irradiation

Yoshigoe, Akitaka; Teraoka, Yuden

Atomic Collision Research in Japan, No.27, p.80 - 82, 2001/00

no abstracts in English

Journal Articles

Photoemission spectroscopy of Si(001) surfaces oxidized by hyperthermal O$$_{2}$$ molecular beams

Teraoka, Yuden; Yoshigoe, Akitaka

Proceedings of 25th International Conference on the Physics of Semiconductors, p.321 - 322, 2000/00

no abstracts in English

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