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Baba, Motoyoshi*; Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru
Japanese Journal of Applied Physics, 53(8), p.080302_1 - 080302_4, 2014/08
Times Cited Count：8 Percentile：31.26(Physics, Applied)A grazing incidence reflection-type soft X-ay microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 
m square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 m and was proven to have a sufficient performance for observing surface morphological changes.
Yoda, Osamu; Miyashita, Atsumi; ; ; ;
Japanese Journal of Applied Physics, 32(SUPPL.32-2), p.255 - 257, 1993/00
no abstracts in English
Yoda, Osamu; Miyashita, Atsumi; ; ;
Excimer Lasers and Applications III, p.463 - 466, 1991/00
no abstracts in English
