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Journal Articles

Real-time observation of initial stage on Si(001) oxidation studied by O-1s photoemission spectroscopy using synchrotron radiation

Yoshigoe, Akitaka; Moritani, Kosuke; Teraoka, Yuden

Japanese Journal of Applied Physics, Part 1, 42(7B), p.4676 - 4679, 2003/07

https://doi.org/10.1143/JJAP.42.4676

Times Cited Count：1 Percentile：5.42(Physics, Applied)

Many studies of the thermal oxidation on Si(001) surface by O $_{2}$ gas have been already carried out from both experimental and theoretical methods. The oxidation reaction kinetics have been studied by real time photoemission spectroscopy. Most reports, however, were performed at a fixed electron binding energy. We present the study of initial stage of thermal oxidation on Si(001) surface at the O $_{2}$ pressure of 1x10 $^{-4}$ Pa performed by real time O-1s synchrotron radiation photoemission spectroscopy.All experiments were performed at SUREAC2000 at BL23SU in the SPring-8. The pure O $_{2}$ gas of 1x10 $^{-4}$ Pa was fed into the reaction analysis chember through a variable leak valve. The results of oxygen uptake curves obtained by O-1s peak area intensities at the substrate temperature of 855K and 955K indicate that the Langmuir adsorption model provided the best fitting result for the 855K oxidation, whereas the oxidation at 955K was well explained by the autocatalytic reaction model.

Journal Articles

SiO mass spectrometry and Si-2p photoemission spectroscopy for the study of oxidation reaction dynamics of Si(001) surface by supersonic O $_{2}$ molecular beams under 1000 K

Teraoka, Yuden; Yoshigoe, Akitaka; Moritani, Kosuke

Japanese Journal of Applied Physics, Part 1, 42(7B), p.4671 - 4675, 2003/07

https://doi.org/10.1143/JJAP.42.4671

Times Cited Count：4 Percentile：19.61(Physics, Applied)

The oxidation reaction mechanisms for Si(001) by O $_{2}$ molecules have been investigated in a surface temperature region from 860 K to 1300 K and in an incident energy region from 0.6 eV to 3.0 eV. Synchrotron Radiation photoemission spectroscopy was used for surface analysis. Si-2p photoemission spectra were measured during molecular beam irradiation so that their dependences on surface temperature and incident energy were clarified. SiO molecules, desorbed from the surface at high temperature region, were also detected by a quadrupole mass analyzer using $^{18}$ O $_{2}$ molecular beams to measure SiO desorption yield depending on surface temperature and incident energy. Consequently, a reaction scheme, oxide layers formation, etching, and coexistence of both reactions, is determined by the incident energy under 1000 K.

Journal Articles

Real-time monitoring of oxidation on the Ti(0001) surface by synchrotron radiation photoelectron spectroscopy and RHEED-AES

Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka; Teraoka, Yuden; Yamauchi, Yasuhiro*; Mizuno, Yoshiyuki*; Tonda, Hideki*; Homma, Teiichi*

Applied Surface Science, 216(1-4), p.395 - 401, 2003/06

https://doi.org/10.1016/S0169-4332(03)00453-7

Times Cited Count：19 Percentile：64.48(Chemistry, Physical)

Real-time in-situ observation using photoelectron spectroscopy for elementary processes of Ti(0001) oxidation by O $_{2}$ molecules has been performed at the surface reaction analysis apparatus installed at the BL23SU in the SPring-8. And the real-time observation has been also performed by RHEED-AES methods at Tohoku University. The partial pressure region of oxygen was from 2x10 $^{-7}$ Torr to 8x10 $^{-8}$ Torr. The surface temperature was 473 K and 673 K. The variation from clean Ti surface toward TiO $_{2}$ was comfirmed by observation of Ti-2p and O-1s photoelectron spectra. Reflected electron intensity and O-KLL Auger electron intensity oscillated in the RHEED-AES measurements. These facts revealed that the surface morphological change of the oxidized Ti(0001) surface was associated not only with a disappearance of the surface metallic layer but also with a change of the oxidation state.

Journal Articles

Coexistence of passive and active oxidation for O $_{2}$ /Si(001) system observed by SiO mass spectrometry and synchrotron radiation photoemission spectroscopy

Teraoka, Yuden; Moritani, Kosuke; Yoshigoe, Akitaka

Applied Surface Science, 216(1-4), p.8 - 14, 2003/06

https://doi.org/10.1016/S0169-4332(03)00479-3

Times Cited Count：6 Percentile：34.50(Chemistry, Physical)

The experiments concerning the oxidation of Si(001) were performed at the surface reaction analysis apparatus, installed at the beamline BL23SU in the SPring-8. The SiO desorb remarkably at surface temperature of 1000 K. The desorption yield increased with increasing the incident energy of O $_{2}$ . On the other hand, the desorption yield increased with decreasing the incident energy in the temperature region lower than 1000 K. Oxygen uptake curves observed by O-1s photoemission measurements corresponded to the SiO desorption features. These facts reveal that the passive oxidation coexists with the SiO desorption in the temperature region from 900 K to 1000 K.

Journal Articles

Real time observation of initial thermal oxidation using O $_{2}$ gas on Si(0 0 1) surface by means of synchrotron radiation Si-2p photoemission spectroscopy

Yoshigoe, Akitaka; Moritani, Kosuke; Teraoka, Yuden

Applied Surface Science, 216(1-4), p.388 - 394, 2003/06

https://doi.org/10.1016/S0169-4332(03)00451-3

Times Cited Count：9 Percentile：44.73(Chemistry, Physical)

It is well known that the initial Si(0 0 1) oxidation by O $_{2}$ gas is an important reaction system because it is usually used to form gate-oxide films on MOSFET. With decreasing the size of ULSI, it is necessary to control the surface reaction with atomic scales. In this study, we report observation of thermal oxidation using O $_{2}$ gas on Si(0 0 1) surface by means of synchrotron radiation photoemission spectroscopy at the soft x-ray beamline, BL23SU, in the SPring-8. We clarified the chemisorption processes of O $_{2}$ on Si(0 0 1) surface over 773K regions at the initial oxidation stages from the results of Si2p core-level shifts. The fundamental understanding of surface reaction is expected to contribute the development of the future nanotechnology.

Journal Articles

Structure and optical properties of germanium implanted with carbon ions

Wei, P.; Xu, Y.; Nagata, Shinji*; Narumi, Kazumasa; Naramoto, Hiroshi

Nuclear Instruments and Methods in Physics Research B, 206(1-4), p.233 - 236, 2003/05

https://doi.org/10.1016/S0168-583X(03)00738-9

Times Cited Count：6 Percentile：42.28(Instruments & Instrumentation)

no abstracts in English

Journal Articles

Time-resolved photoelectron spectroscopy of oxidation on the Ti(0001) surface

Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka; Teraoka, Yuden; Mizuno, Yoshiyuki*; Tonda, Hideki*; Homma, Teiichi*

Nuclear Instruments and Methods in Physics Research B, 200, p.376 - 381, 2003/01

https://doi.org/10.1016/S0168-583X(02)01726-3

Times Cited Count：10 Percentile：54.92(Instruments & Instrumentation)

no abstracts in English

Journal Articles

X-ray-induced ion desorption from solid surfaces

Baba, Yuji

Trends in Vacuum Science & Technology, Vol.5, p.45 - 74, 2002/10

This article reviews recent works on the ion desorption from solid surfaces induced by the irradiation of soft X-rays ranging from 100 eV to 3 keV. The data presented here are focused on the positive ion desorption from adsorbed, condensed, and solid molecules following the core-level excitations. The element-specific and site-specific fragment-ion desorptions are clearly realized, when we tune the photon energy at the core-to-valence resonance regions. The specificity of the ion desorption more clearly shows up following the deep-core excitations, i.e., 1s4p resonant excitations in third-row elements, rather than the shallow-core excitations. Since the main decay channels after the core-level excitation are the Auger transitions, the Auger decay spectra excited by the photons around the core-level thresholds are also presented for some of the adsorbed systems. The mechanism of the observed highly specific ion desorption is discussed on the basis of the photon-energy dependencies of the electron and ion yields and the analysis of the Auger decay spectra.

Journal Articles

Reaction dynamics of Si(001) oxidation at room temperature induced by supersonic O $_{2}$ molecular beams

Teraoka, Yuden; Yoshigoe, Akitaka

Hyomen Kagaku, 23(9), p.553 - 561, 2002/09

https://doi.org/10.1380/jsssj.23.553

no abstracts in English

JAEA Reports

Spectroscopic measurements of laser crystals doped with Yb $^{3+}$ ions, 1; Production of a spectroscopic system and measured absorption spectrum

Sugiyama, Akira; Fukuyama, Hiroyasu

JAERI-Tech 2002-057, 27 Pages, 2002/07

JAERI-Tech-2002-057.pdf:1.25MB

no abstracts in English

JAEA Reports

Calibration test of -energy analysis system for fuel and fission gas behavior during High Temperature Engineering Test Reactor operation

Ueta, Shohei; Tobita, Tsutomu*; Takahashi, Masashi*; Sawa, Kazuhiro

JAERI-Tech 2002-055, 24 Pages, 2002/07

JAERI-Tech-2002-055.pdf:1.04MB

no abstracts in English

Journal Articles

Chraracterization of iron hydroxides in a weathered rock surface by visible microspectroscopy

Nagano, Tetsushi; Isobe, Hiroshi*; Nakashima, Satoru*; Ashizaki, Midori*

Applied Spectroscopy, 56(5), p.651 - 657, 2002/05

https://doi.org/10.1366/0003702021955222

Times Cited Count：11 Percentile：51.96(Instruments & Instrumentation)

no abstracts in English

Journal Articles

Development of a plutonium air monitor for emergency environmental monitoring

Kinouchi, Nobuyuki; Oishi, Tetsuya; Noguchi, Hiroshi; Yoshida, Makoto; Kato, Shohei; Ito, Katsuhito*

Radioisotopes, 51(2), p.71 - 77, 2002/02

https://doi.org/10.3769/radioisotopes.51.71

We have developed an air monitor which is possible to measure rapidly and sensitively the concentration of plutonium for the environmental monitoring at an accident of a nuclear reprocessing plant. The monitor is designed to collect airborne plutonium by drawing the ambient air through a filter and to detect the activity by alpha spectroscopy. The following two methods are equipped with the monitor: continuous measurement at atomospheric pressure and batch measurement at vacuum. The description of the air monitor and the results of performance test are reported.

Journal Articles

A Model for the structure of the SOS-regulated UmuD $_{2}$ protein

Sutton, M. D.*; Guzzo, A.*; Narumi, Issei; Costanzo, M.*; Altenbach, C.*; Ferentz, A. E.*; Hubbell, W. L.*; Walker, G. C.*

DNA Repair, 1(1), p.77 - 93, 2002/01

UmuD $_{2}$ protein is a regulatory subunit of DNA polymerase V. This protein forms a complex with UmuC protein, a catalytic subunit of DNA polymerase V, and plays a important role in error-prone translesion DNA synthesis, which serves as the mechanistic basis for most DNA-damaging agent and UV light mutagenesis. In this paper, based on the results of a combination of experimental studies, we have developed a refined model for the structure of the UmuD $_{2}$ homodimer. Implications of the structural change of UmuD $_{2}$ protein with respect to its roles in managing the action of DNA polymease V are discussed.

Journal Articles