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論文

Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

加田 渉*; 三浦 健太*; 加藤 聖*; 猿谷 良太*; 久保田 篤志*; 佐藤 隆博; 江夏 昌志; 石井 保行; 神谷 富裕; 西川 宏之*; et al.

Nuclear Instruments and Methods in Physics Research B, 348, p.218 - 222, 2015/04

 被引用回数:6 パーセンタイル:51.48(Instruments & Instrumentation)

The Mach-Zehnder (MZ) optical structures were previously fabricated in a Poly-methyl-methacrylate (PMMA) thin film by Proton Beam Writing (PBW). The enhancement of optical transmittance in the structures is, however, required for industrial use. In this study, the MZ optical waveguides have been fabricated in a poly-dimethyl-siloxane (PDMS) thin film which has the higher optical permeability. The PDMS films were spin-coated on a silicon wafer (40 $$times$$ 20 $$times$$ 0.5 mm$$^3$$) with a thickness of approximately 30 $$mu$$m. The MZ waveguides were drawn by a 750 keV proton microbeam of 1$$mu$$m in diameter having the penetration depth of 18 $$mu$$m with fluence of 40-100 nC/mm$$^2$$. The beam writing was carried out combining an electric scanner and a mechanical sample-stage. The observation of the single-mode light propagation of 1.55 $$mu$$m fiber-laser in the MZ waveguides indicated that the optical transmittance have been successfully enhanced using PDMS.

口頭

A Flexible dielectrophoretic device with high-aspect-ratio pillar arrays fabricated by proton beam writing

西川 宏之*; 鮎瀬 銀也*; 時田 寛也*; 内田 諭*; 佐藤 隆博; 石井 保行; 神谷 富裕

no journal, , 

Dielectrophoresis (DEP) has been widely used to trap micro particles and microbes such as E.coli. We previously reported the introduction of the DEP devices with SU-8 high-aspect-pillar arrays on a silicon substrate by proton beam writing (PBW) so as to improve their trapping capability. In this study, new DEP devices with the SU-8 high-aspect-pillar arrays have been fabricated on a polyethylene terephthalate (PET) film to add bendability. The fabrication was performed with proton beams (1.0-1.7 MeV, 1.0 $$mu$$m $$phi$$). The proton fluence to form the pillar on the PET film was determined in the experiments. As a result, the bendable DEP devices with the pillar arrays were successfully developed on the PET films to be widely used in industries.

口頭

Development of Mach-Zehnder optical waveguide embedded in PDMS thin films by proton beam writing

加田 渉*; 三浦 健太*; 猿谷 良太*; 加藤 聖*; 久保田 篤志*; 佐藤 隆博; 江夏 昌志; 石井 保行; 神谷 富裕; 西川 宏之*; et al.

no journal, , 

An optical switch with a Mach-Zehnder (MZ) structure was previously fabricated in a Poly-methyl-methacrylate (PMMA) thin film by proton beam writing (PBW). The extinction ratio of the switch, however, needs to be enhanced by higher optical permeability for industrial use. In this study, the MZ optical waveguides have been fabricated in poly-dimethyl-siloxane (PDMS) thin films, which have higher optical permeability than PMMA. A PDMS film of a thickness of approximately 30 $$mu$$m was spin-coated on a silicon wafer (40 $$times$$ 20 $$times$$ 0.5 mm$$^3$$). The MZ waveguides of 8 $$mu$$m in width and total length of 30 mm were drawn in the film by a 750 keV proton microbeam of 1$$mu$$m in diameter having the penetration depth of 18 $$mu$$m with fluence of 40-100 nC/mm$$^2$$. The drawing of the total length was carried out combining an electric scanner and a mechanical sample-stage. A clear spot of 1.55 $$mu$$m single-mode light was observed propagated through the MZ waveguides, which indicated that the enhanced optical transmittance by the use of PDMS leads to their waveguides with higher extinction ratio.

口頭

Fabrication of Mach-Zehnder optical waveguide structures in PDMS thin films using proton beam writing

狩野 圭佑*; 猿谷 良太*; 川端 駿介*; 新木 潤*; 野口 克也*; 加田 渉*; 三浦 健太*; 加藤 聖*; 佐藤 隆博; 江夏 昌志; et al.

no journal, , 

Proton beam writing (PBW) has been applied to fabricate Mach-Zehnder (MZ) optical waveguides which is expected to be an optical switch with small power consumption, because only one processing of PBW enables us to fabricate such waveguides even inside of plastic materials. Such waveguides were fabricated in thin poly-methyl-methacrylate (PMMA) films by PBW. However, they had low transmittance. In order to fabricate MZ optical waveguides with higher transmittance, PBW was applied to poly-dimethyl-siloxane (PDMS) with higher transparency than PMMA. Thirty-micrometer thick PDMS films formed on silicon wafers were irradiated at different beam fluences using a 750-keV proton microbeam which reaches the half depth of the entire film thickness. The single mode propagation of the fabricated optical waveguide was checked by the 1.55-$$mu$$m light. The observation results showed that the single-mode propagation was detected only for the waveguide fabricated with the fluence of 100 nC/mm$$^2$$ and that the propagated light intensity was higher than that of PMMA. The waveguide structure has been successfully fabricated in thin PDMS films by PBW.

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