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Reshanov, S. A.*; Beljakowa, S.*; Zippelius, B.*; Pensl, G.*; Danno, Katsunori*; Alfieri, G.*; Kimoto, Tsunenobu*; Onoda, Shinobu; Oshima, Takeshi; Yan, F.*; et al.
Materials Science Forum, 645-648, p.423 - 426, 2010/00
n- and p-type 4H-SiC epilayers were irradiated with electrons at 170 keV or 1 MeV. Subsequent annealing (in Ar, 30 min) up to 1700 C was carried out. Defects in the samples were investigated using DLTS (Deep Level Transient Spectroscopy). As a results, for n-type, dominant defects were Z1/Z2 and EH7, and they can observed for both 170 keV- and 1 MeV-irradiated samples. Both defects decreased with increasing temperature up to 1100 C, although they appeared again at 1400 C. Then they disappeared at 1600 C. For p-type, defects named UK1 and HK2 were observed and they were very stable. No significant decrease was observed after 1700 C annealing.
Yan, F.*; Devaty, R. P.*; Choyke, W. J.*; Danno, Katsunori*; Alfieri, G.*; Kimoto, Tsunenobu*; Onoda, Shinobu; Oshima, Takeshi; Reshanov, S. A.*; Beljakowa, S.*; et al.
Materials Science Forum, 645-648, p.419 - 422, 2010/00
Defects in n- and p-type 4H-SiC epitaxial layer were investigated by low temperature photoluminescence spectroscopy (LTPL) and deep level transient spectroscopy (DLTS). Defects were introduced by either 170 keV or 1 MeV electron irradiation into samples at RT. The samples were annealed from 25C to 1700C in 100C steps. As a result of LTPL measurements, L line was observed after irradiation. In previous studies, L line is thought to correlate with Z/Z centers in DLTS measurements. However, in this study, no correlation between L and Z1/Z was observed.