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Takei, Satoshi*; Oshima, Akihiro*; Oyama, Tomoko; Ito, Kenta*; Sugahara, Kigen*; Kashiwakura, Miki*; Kozawa, Takahiro*; Tagawa, Seiichi*; Hanabata, Makoto*
Japanese Journal of Applied Physics, 53(11), p.116505_1 - 116505_7, 2014/11
Times Cited Count:10 Percentile:41.38(Physics, Applied)The application of natural linear polysaccharide to green resists was demonstrated for electron beam (EB) and extreme-ultraviolet (EUV) lithography. Because of the water solubility of natural polysaccharides, the water spin-coating and water-developable processes realize an environmentally friendly manufacturing process for next-generation electronic devices. The developed green resist with a weight-average molecular weight of 83,000 and 70 mol % hydroxyl groups was found to have acceptable properties such as spin-coat ability on 200 mm wafers, pillar patterns of 100-400 nm with a high EB sensitivity of 10 C/cm, etch selectivity with a silicon-based middle layer in CF plasma treatment, and high prediction sensitivity to EUV region.
Takei, Satoshi*; Oshima, Akihiro*; Ichikawa, Takumi*; Sekiguchi, Atsushi*; Kashiwakura, Miki*; Kozawa, Takahiro*; Tagawa, Seiichi*; Oyama, Tomoko; Ito, Shoji*; Miyasaka, Hiroshi*
Microelectronic Engineering, 122, p.70 - 76, 2014/06
Times Cited Count:24 Percentile:76.82(Engineering, Electrical & Electronic)Biomass-derived branched sugar resist material was developed for environmentally-friendly electron beam lithography (EBL). The developed resist enables organic solvent-free water-developable process. The resist performance was evaluated using 75 keV EBL system. Lines of 50-200 nm were fabricated with high sensitivity of 7 C/cm. The resist is developable in pure water at 23 C for 60 s, and it has acceptable CF etch selectivity.
Yoshida, Yoichi*; Yang, J.*; Kondo, Takafumi*; Seki, Shuhei*; Kozawa, Takahiro*; Tagawa, Seiichi*; Shibata, Hiromi*; Taguchi, Mitsumasa; Kojima, Takuji; Namba, Hideki
JAEA-Review 2005-001, TIARA Annual Report 2004, p.183 - 185, 2006/01
A heavy-ion-pulse radiolysis technology was developed using a single-photon-counting system. In the system, the ion beam was injected a thin scintillator before irradiating the sample. The light emitted from the scintillator by the ion irradiation was used as analyzing source to detect the absorption of primary species in water. Measurement of time-dependent absorption of hydrated electrons in water was achieved using the system, which demonstrates the usefulness of this technique.
Nagaishi, Ryuji; Kimura, Takaumi; Yoshida, Yoichi*; Kozawa, Takahiro*; Tagawa, Seiichi*
Journal of Physical Chemistry A, 106(39), p.9036 - 9041, 2002/10
Times Cited Count:3 Percentile:8.65(Chemistry, Physical)no abstracts in English