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Suemitsu, Maki*; Yamamoto, Yoshihisa*; Togashi, Hideaki*; Enta, Yoshiharu*; Yoshigoe, Akitaka; Teraoka, Yuden
Journal of Vacuum Science and Technology B, 27(1), p.547 - 550, 2009/02
Times Cited Count：4 Percentile：29.68(Engineering, Electrical & Electronic)Initial oxidation processes of the Si(110) surface and the chemical bonding states of silicon atoms in the initial oxides have been investigated by using real-time synchrotron-radiation photoemission spectroscopy. Time evolutions of the Si
(
=1-4) components in the Si 2
spectrum indicates that the Si
component always overwhelms the Si
component during the oxidation up to one monolayer. This is in sharp contrast to the Si(001) surface where Si is always larger than Si. The dominance of the Si component is related to presence of two types of bonds on the Si(110) surface and to their possible different reactivity against insertion of oxygen atoms.
2 surfaceYamamoto, Yoshihisa*; Togashi, Hideaki*; Kato, Atsushi*; Takahashi, Yuya*; Konno, Atsushi*; Teraoka, Yuden; Yoshigoe, Akitaka; Asaoka, Hidehito; Suemitsu, Maki*
Applied Surface Science, 254(19), p.6232 - 6234, 2008/07
Times Cited Count：4 Percentile：21.85(Chemistry, Physical)The room temperature adsorbed state of oxygen molecules on Si(110)-162 surface and the structural change after a mild annealing has been investigated by synchrotron radiation photoemission spectroscopy. As a result, despite the very small dosage of oxygen, Si
and Si components already appear in addition to Si
. This is likely to be caused by a selective adsorption of O
molecules into the vicinity of already oxidized sites. After annealing, we found that binding energy of Si and Si increase and approach to their corresponding peak positions of a thermally-grown oxide, and this increase indicates relaxation of the Si-O bond length and Si-O-Si bond angle of metastable oxygen atoms.
Yamamoto, Yoshihisa*; Togashi, Hideaki*; Konno, Atsushi*; Matsumoto, Mitsutaka*; Kato, Atsushi*; Saito, Eiji*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka
Shingaku Giho, 108(80), p.65 - 70, 2008/06
The growth process of thermal oxides on Si(110) surface and the development of their interfacial bonding structures have been investigated by using real-time synchrotron radiation photoemission spectroscopy. As a result, it was clarified that the Si component in the Si 2p core-level spectra is always much higher than that of Si for 0-1 mono-layer (ML) oxides on Si(110) surface. Observations on the time-evolution of the O 1s core-level spectrum indicates that the autocatalytic-reaction model proposed for the Si(001) oxidation can be also applicable to the Si(110) oxidation.
Yamamoto, Yoshihisa*; Togashi, Hideaki*; Kato, Atsushi*; Suemitsu, Maki*; Narita, Yuzuru*; Teraoka, Yuden; Yoshigoe, Akitaka
Materials Research Society Symposium Proceedings, Vol.1074, p.36 - 40, 2008/00
In this study, we have investigated the bonding structure of ultrathin oxide films on Si(110) surface by real-time SR-PES experiments. Experiments were conducted at surface chemistry end-station settled at BL23SU in SPring-8. The oxidation temperature was 813 K and the O pressure was 1.110
Pa. As a result, we found that one of the surface core-level shifts in Si 2p spectrum, related to the 1st and the 2nd layer Si atoms, decreases rapidly, coincident with the rapid initial development of the O1s spectrum. This indicates high reactivity of the Si(110)-162 reconstructed surface with oxygen molecules.
2 surface by scanning tunneling microscopyTogashi, Hideaki*; Takahashi, Yuya*; Kato, Atsushi*; Konno, Atsushi*; Asaoka, Hidehito; Suemitsu, Maki*
Japanese Journal of Applied Physics, Part 1, 46(5B), p.3239 - 3243, 2007/05
Times Cited Count：13 Percentile：46.87(Physics, Applied)On Si(110) surface, the hole mobility is enhanced as compared with that on Si(001) surface. This surface is also to be used in the next-generation three-dimensional devices. We conducted scanning-tunneling-microscopy (STM) observation on the initial oxidation of Si(110)-162 surface. The present result suggests less occurrence of etching under the oxidation condition. There is a possibility to form an abrupt oxide/Si interface on the Si(110) surface.
2 surfaces by O 1s photoemission spectroscopy using synchrotron radiationSuemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*; Enta, Yoshiharu*
Japanese Journal of Applied Physics, Part 1, 46(4B), p.1888 - 1890, 2007/04
Times Cited Count：12 Percentile：44.48(Physics, Applied)Initial oxidation of Si(110) surface has been investigated by using real-time X-ray photoemission spectroscopy. The time evolution of the O 1s spectrum shows occurrence of rapid oxidation just after the introduction of the oxygen molecules, which is evidenced by the considerable peak intensity corresponding to oxygen exposure of as low as 1.5L (1L=1.3310
Pa s). This initial oxide is dominated by a state with a relatively low binding energy, which is gradually replaced by a state with a relatively high binding energy with the increase of the oxygen exposure, resulting in the low-KE shift of the O 1s peak. Comparison with previously reported O 1s spectra from dry-oxidized Si(111) surface suggests oxidation at or around the adatoms of Si(110)-162 clean surface as a likely oxidation state for this low-binding-energy peak.
2Suemitsu, Maki*; Togashi, Hideaki*; Kato, Atsushi*; Takahashi, Yuya*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Asaoka, Hidehito
Materials Research Society Symposium Proceedings, Vol.996, p.19 - 25, 2007/00
From its high hole mobility, as well as its inevitable usage as an active layer in multi-gated FETs, Si(110) surface is expected to play a crucial role in the next generation CMOS devices. We have investigated the initial oxidation of Si(110) surface by using SR-XPS and STM. Reflecting its atomistic structure of the 162 reconstruction, initial oxidation of Si(110) surface shows a unique behavior which is not observed on other surfaces like (111) and (001).
Suemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*
Shingaku Giho, 106(108), p.61 - 63, 2006/06
no abstracts in English
2 surface by photoemission spectroscopySuemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Enta, Yoshiharu*; Narita, Yuzuru*
ECS Transactions, 3(2), p.311 - 316, 2006/00
Initial thermal oxidation of Si(110) surface has been investigated by using real-time X-ray photoemission spectroscopy with synchrotron radiation. The Si(110) initial oxidation is characterized by presence of a rapid oxidation just after the introduction of gaseous oxygen molecules. Peak separation of the O1s photoemission spectra suggests the presence of at least two distinct oxidation sites on the surface, which may reflect the complicated surface structure of the Si(110)-162 reconstruction.
1 studied by scanning tunneling microscopyTogashi, Hideaki*; Asaoka, Hidehito; Yamazaki, Tatsuya; Suemitsu, Maki*
Japanese Journal of Applied Physics, Part 2, 44(45), p.L1377 - L1380, 2005/10
Times Cited Count：3 Percentile：13.7(Physics, Applied)no abstracts in English
1 surface, 2Togashi, Hideaki*; Suemitsu, Maki*; Asaoka, Hidehito; Yamazaki, Tatsuya
no journal, ,
no abstracts in English
1 surfaceTogashi, Hideaki*; Suemitsu, Maki*; Asaoka, Hidehito; Yamazaki, Tatsuya
no journal, ,
no abstracts in English
Suemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*
no journal, ,
Initial kinetics in dry oxidation of Si(110) surface, a key technology in the next-generation CMOS technology, has been investigated by using synchrotron-radiation photoemission spectroscopy. As a result, the uptake curve of the Si(110) oxide in its high-pressure-low-temperature reaction regime is found to consist of three characteristic time domains, in sharp contrast with the single domain obtained on Si(001). The difference is understood in terms of the different atomistic arrangement on the surface.
Suemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*
no journal, ,
By using real-time photoemission spectroscopy, kinetics of initial oxidation of Si(110)-162 surface has been investigated and is compared with that of Si(100) surface. Dry oxidation of Si(110) shows rapid initial oxidation just after introduction of the oxygen, which is associated with an O1s state with a weaker binding energy. As the oxidation proceeds, another O1s state with a stronger binding energy develops. The rapid initial oxidation is related to oxidation at or around the Si(111)-like Si adatoms, which are reportedly present in the 162 reconstruction of the Si(110) surface.
2 by real-time photoemission spectroscopy, 1Togashi, Hideaki*; Kato, Atsushi*; Yamamoto, Yoshihisa*; Konno, Atsushi*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*
no journal, ,
Initial oxidation processes of Si(110) surface have not been studied although they are important for the next generation device. Now we observed time evolution of oxygen coverage at the Si(110)-162 surface in the initial oxidation region by using real-time photoemission spectroscopy with synchrotron radiation. As a conclusion, rapid initial oxidation processes, in which several tens per cent of the surface was oxidized just after oxygen exposure, were found in experimental conditions of 813 K and oxygen pressure of 1.110 Pa. Such a rapid initial oxidation process has not been observed in the initial oxidation of Si(100)-21 surface. This phenomenon may be related with adatom clusters, which exist periodically on the Si(110)-162 surface. For example, An adatom cluster, which consists of five Si atoms, shares 0.25 ML on the Si(110)-162 reconstruction surface in the pentagon-pair model. This model consistents with the initial oxygen coverage obtained in this experiment.
2 by real-time photoemission spectroscopy, 2Kato, Atsushi*; Togashi, Hideaki*; Yamamoto, Yoshihisa*; Konno, Atsushi*; Narita, Yuzuru*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka
no journal, ,
Initial oxidation processes of ultra-thin oxide layers on Si(110)-162 surfaces have not been studied yet. Making clear the chemical reaction mechanisms is, however, important for device fabrication. We observed time evolution of oxide coverage on the Si(110)-162 surface at room temperature. The O1s photoemission spectrum increased with increasing oxygen dose and the peak position shifted to higher binding energy side at oxygen pressure of 1.110 Pa. This peak shift is responsible to two kinds of peak components and their independent time evolutions. Time evolution of each component, behaviour of Si2p spectrum, and thermal stability of the surface reveal that the oxidation of Si(110) surface has different characters in compared with that of Si(100) surface. These facts can be understood on the basis of adatom clusters on the Si(110) surface.
Suemitsu, Maki*; Kato, Atsushi*; Togashi, Hideaki*; Konno, Atsushi*; Yamamoto, Yoshihisa*; Teraoka, Yuden; Yoshigoe, Akitaka; Narita, Yuzuru*
no journal, ,
no abstracts in English
2 by real-time photoemission spectroscopy, 1Togashi, Hideaki*; Kato, Atsushi*; Yamamoto, Yoshihisa*; Konno, Atsushi*; Narita, Yuzuru*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka; Takahashi, Yuya*; Asaoka, Hidehito
no journal, ,
no abstracts in English
2 by real-time photoemission spectroscopy, 2Kato, Atsushi*; Togashi, Hideaki*; Yamamoto, Yoshihisa*; Konno, Atsushi*; Narita, Yuzuru*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka; Takahashi, Yuya*; Asaoka, Hidehito
no journal, ,
no abstracts in English
2 surface using synchrotron radiation photoelectron spectroscopyKato, Atsushi*; Togashi, Hideaki*; Yamamoto, Yoshihisa*; Konno, Atsushi*; Narita, Yuzuru*; Suemitsu, Maki*; Teraoka, Yuden; Yoshigoe, Akitaka; Takahashi, Yuya*; Asaoka, Hidehito
no journal, ,
no abstracts in English
