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Mao, W.*; Fujita, Masaya*; Chikada, Takumi*; Yamaguchi, Kenji; Suzuki, Akihiro*; Terai, Takayuki*; Matsuzaki, Hiroyuki*
Surface & Coatings Technology, 283, p.241 - 246, 2015/12
Times Cited Count:3 Percentile:13.89(Materials Science, Coatings & Films)Single-phase nanocrystalline thin films of ErO (440) has been first prepared using Si (100) substrates by ion beam sputter deposition at 973 K at a pressure of 10 Pa and - annealing at 1023 K at a pressure of 10 Pa. Er silicides formed during the deposition are eliminated via the annealing, which results in the single phase and the smooth surface of the ErO thin films. The epitaxial relationship between Si (100) and ErO (110) is clarified by X-ray diffraction and reflection high energy electron diffraction.
Taguchi, Tomitsugu; Yamaguchi, Kenji
Nuclear Instruments and Methods in Physics Research B, 350, p.1 - 5, 2015/05
Times Cited Count:0 Percentile:0.02(Instruments & Instrumentation)SiO nanotubes show potential in applications such as nanoscale electronic and optical devices, bioseparation, biocatalysis, and nanomedicine. As-grown SiO nanotubes in the previous studies always have an amorphous wall, and here we demonstrate the successful synthesis of single-crystal nanotubes for the first time by the heat treatment of SiC nanotubes at 1300 C for 10 h under low-vacuum conditions. According to TEM observations, the single-crystal SiO was -cristobalite. We also demonstrate that single-crystal SiO nanotubes can be transformed into amorphous SiO nanotubes by electron beam irradiation. Moreover, we synthesized a crystalline/amorphous SiO composite nanotube, in which crystalline and amorphous SiO coexisted in different localized regions. In addition, for biomedical applications such as drug delivery systems, controlling the configuration of the open end, the diameter, and capsulation of SiO nanotubes is crucial. We can also obturate, capsulate, and cut a SiO nanotube, as well as modify the inner diameter of the nanotube at a specific, nanometer-sized region using the focused electron beam irradiation technique.
Yamaguchi, Kenji
Shirisaidokei Handotai No Kagaku To Gijutsu, p.113 - 121, 2014/09
This article describes first the basic aspects of sputtering phenomena based on ion beam - solid interactions, followed by introduction of ion beam sputter deposition (IBSD) method for thin film fabrication. The article further introduces the experimental apparatus for IBSD application, equipped with an ion beam irradiation system for sputter-etching of the substrate surface. It is shown that this method is suitable for fabrication of semiconducting iron silicide film on Si substrate. The experimental results revealed that the obtained thin film is highly-oriented and continuous, forming atomically flat interface between film and the substrate.
Shamoto, Shinichi; Kodama, Katsuaki; Imaki, Tadashi*; Nakatani, Takeshi; Oshita, Hidetoshi*; Kaneko, Naokatsu*; Masuko, Kenji*; Sakamoto, Kensaku; Yamaguchi, Kenji; Suzuya, Kentaro; et al.
JPS Conference Proceedings (Internet), 1, p.014011_1 - 014011_5, 2014/03
2D neutron diffraction imaging of an ammonite fossil was carried out at high-intensity total diffractometer NOVA in J-PARC. Observed diffraction profiles consist of calcite, siderite and amorphous structures.
Taguchi, Tomitsugu; Miyazaki, Toshiki*; Iikubo, Satoshi*; Yamaguchi, Kenji
Materials Science & Engineering C, 34, p.29 - 34, 2014/01
Times Cited Count:9 Percentile:20.94(Materials Science, Biomaterials)SiC nanotubes can become candidate reinforcement materials for dental and orthopedic implants due to their light weight and excellent mechanical properties. However, it has not been reported about the development of bioactive SiC materials. In this study, hydroxyapatites were found to on SiC nanotubes treated with NaOH and subsequently HCl solution after soaking in simulated body fluid. On the other hand, hydroxyapatites did not deposit on as-received SiC nanotubes, the SiC nanotubes with NHOH solution treatment and SiC bulk materials with NaOH and subsequently HCl solution treatment. Therefore, we succeeded in the development of bioactive SiC nanotubes by downsizing SiC materials to nanometer size and treating with NaOH and subsequently HCl solutions for the first time.
Yamaguchi, Kenji; Hamamoto, Satoshi*; Hojo, Kiichi
Physica Status Solidi (C), 10(12), p.1699 - 1703, 2013/12
Times Cited Count:0 Percentile:0.01(Nanoscience & Nanotechnology)Effect of substrate treatment conditions, deposition temperature and deposition rate on the crystallinity of -FeSi films formed on Si substrate was investigated. The substrates were treated with Ne ion beams at room temperature and then annealed at 1073 K prior to film fabrication by means of ion beam sputter deposition (IBSD) method. Combinations of experimental parameters which promote the epitaxial relationship of -FeSi (100) // Si (100) were defined. Complicated dependence of these experimental parameters on the film structure indicated that careful optimization of substrate treatment conditions and deposition parameters would enable to obtain -FeSi films with excellent crystalline properties.
Mao, W.*; Chikada, Takumi*; Shimura, Kenichiro*; Suzuki, Akihiro*; Yamaguchi, Kenji; Terai, Takayuki*
Journal of Nuclear Materials, 443(1-3), p.555 - 561, 2013/11
Times Cited Count:3 Percentile:25.73(Materials Science, Multidisciplinary)In this work, calculations based on density functional theory (DFT) and generalized gradient approximation were performed to investigate the structural and electronic properties of the cubic ErO (001) surface and H adsorption processes on this surface. Several stable adsorption sites were identified, and at the most energetically favorable adsorption sites it was found that H bonds with O atoms at the cubic ErO (001) surface with an adsorption energy of 295.68 kJ mol at coverage 1/8 ML, which was inclined to decrease with the increase of H coverage ( 1/4 ML). In addition, the calculations revealed that the dissociative H atom configurations have adsorption energies that are at least 152.64 kJ mol greater than the H molecule configurations on the surface. These results are discussed in regard of the hydrogen isotope permeation behavior in the tritium permeation barrier in a fusion reactor.
Asaoka, Hidehito; Yamazaki, Tatsuya; Yokoyama, Yuta; Yamaguchi, Kenji
Journal of Crystal Growth, 378, p.37 - 40, 2013/09
Times Cited Count:3 Percentile:31.93(Crystallography)We have focused on stress measurements of the reconstructed Si(111) 77 and the H-terminated Si(111) 11 surfaces. In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. At the beginning of Ge wetting layer growth on H-terminated Si(111), the stress gradient drastically changes accompanied by change in the surface structure resulting from the H desorption. Comparison of the surface stress behaviors between Ge wetting layer growth on the H-terminated Si(111) 11 and the Si(111) 77 surfaces reveals that the Si(111) 11 surface releases 1.6 N/m (=J/m), or (1.3 eV/(11 unit cell)), of the surface energy from the strong tensile Si(111) 77 reconstruction.
Asaoka, Hidehito; Yamazaki, Tatsuya*; Yamaguchi, Kenji; Shamoto, Shinichi; Filimonov, S.*; Suemitsu, Maki*
Surface Science, 609, p.157 - 160, 2013/03
Times Cited Count:1 Percentile:4.97(Chemistry, Physical)We have focused on stress measurements during Bi termination of Si(111) and Ge growth on this Bi-mediated Si(111). In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. We find the Bi-terminated Si(111) - surface releases 1.8 N/m (=J/m), or (1.4 eV/(11 unit cell)), of the surface energy from the strong tensile Si(111) 77 reconstruction. Subsequent Ge deposition on the Bi-terminated Si surface develops a compressive stress, which oscillates with a period corresponding to the growth of a single bilayer. The real-time stress measurement provides a direct evidence for this oscillatory stress relaxation in the layer-by-layer growth.
Hamamoto, Satoshi*; Yamaguchi, Kenji; Hojo, Kiichi
Transactions of the Materials Research Society of Japan, 38(1), p.89 - 92, 2013/03
Hamamoto, Satoshi*; Yamaguchi, Kenji; Hojo, Kiichi
Transactions of the Materials Research Society of Japan, 38(1), p.89 - 92, 2013/03
Semiconducting silicides, such as -FeSi, BaSi and MgSi are quite attractive for their potential as optoelectronic, photovoltaic and thermoelectric materials. Authors have shown that thin, uniform and highly-oriented -FeSi films can be fabricated on Si (100) substrates with an atomically flat interface, when the substrates are pre-treated with low-energy ions. Since the use of ion beam introduces irradiation defects to the substrate and the film, semiconducting properties may be affected by such defects. Dependence of the crystalline properties of -FeSifilms on the irradiated fluence of sputter etching (SE) of the substrate was investigated to discuss whether it is possible to obtain high crystalline -FeSi thin film with very low defect concentration.
Mao, W.*; Chikada, Takumi*; Suzuki, Akihiro*; Terai, Takayuki*; Yamaguchi, Kenji
Journal of Plasma and Fusion Research SERIES, Vol.10, p.27 - 32, 2013/02
A tritium permeation barrier (TPB) is strongly required in fusion blankets for the reduction of loss of fuel and radiological hazard. However, the precise tritium permeation mechanism through the TPB coatings has not been clarified yet, because of their complicated crystal structures. To understand the microscopic mechanism, we have not only prepared and characterized nanostructured ceramic ErO thin films, but also studied the energetics and mobility of hydrogen atom in cubic bulk ErO using ab initio density-functional calculations. The estimated diffusion activation energy () of interstitial H is somewhat higher than the diffusion energy barrier observed experimentally at 873 K. It is then considered that diffusion and permeation of hydrogen and its isotopes through the ErO coatings are likely to be dominated by the grain boundary rather than by the grain.
Yamaguchi, Kenji; Esaka, Fumitaka; Sasase, Masato*; Yamamoto, Hiroyuki; Hojo, Kiichi
Transactions of the Materials Research Society of Japan, 37(2), p.245 - 250, 2012/06
"Semiconducting silicides", such as -FeSi, BaSi, MgSi, etc. are composed of elements which are non or less toxic and are naturally abundant, so that they are considered to be ecologically friendly. These materials are being investigated for applications in optoelectronics, photovoltaics, photonics, thermoelectrics, and so on. In order to fabricate silicide films on crystalline Si substrate, sputter-etching (SE) of the substrate with low energy ion beams has been successfully applied. When the conditions are met, a highly-oriented -FeSi (100) film can be grown on Si (100) substrate by means of ion beam sputter deposition method. According to cross-sectional transmission electron microscopy (TEM) observation, the interface of the SE-treated substrate and the film deposited at 973 K is smooth, although some defects are produced as a result of this treatment. On the other hand, a combination of X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) revealed that relatively homogeneous -FeSi surface is formed at this temperature. In order to further improve the film properties with smaller amount of defects, SE-treatment is performed with the ions whose incident energy is below 1 keV. X-ray diffraction (XRD) analysis confirmed that highly-oriented -FeSi (100) film can be also obtained with SE-treatment by 0.8 keV Ne ions, as in the case of 3.0 keV Ne.
Matsumura, Seidai*; Ochiai, Kunihito*; Udono, Haruhiko*; Esaka, Fumitaka; Yamaguchi, Kenji; Yamamoto, Hiroyuki; Hojo, Kiichi
Physics Procedia, 11, p.174 - 176, 2011/02
Times Cited Count:3 Percentile:82.2(Optics)The surface structures on the surface of -FeSi substrate after heat treatment in ultra high vacuum and their influence on homoepitaxial growth were investigated. It was found that the dip structures appeared on the surface of -FeSi (100) substrate after heat treatment above 1023 K, where the evaporation of surface oxide layer (SiO) occurred. The composition of the dip structure was Fe-rich as compared to nominal -FeSi composition (Si/Fe=2). This result indicates that the decomposition from -FeSi to -FeSi would occur on the surface. The surface morphology observed after heat treatment depended on the orientation of the substrate. In addition, homoepitaxial films with smooth surface on -FeSi (111) substrate at the growth temperature of 973 and 1073 K were obtained.
Esaka, Fumitaka; Yamamoto, Hiroyuki; Udono, Haruhiko*; Matsubayashi, Nobuyuki*; Yamaguchi, Kenji; Shamoto, Shinichi; Magara, Masaaki; Kimura, Takaumi
Physics Procedia, 11, p.150 - 153, 2011/02
Times Cited Count:0 Percentile:0.01(Optics)Surface characterization of homoepitaxial -FeSi film on -FeSi(111) substrate has been performed by X-ray photoelectron and X-ray absorption spectroscopy.
Esaka, Fumitaka; Yamamoto, Hiroyuki; Udono, Haruhiko*; Matsubayashi, Nobuyuki*; Yamaguchi, Kenji; Shamoto, Shinichi; Magara, Masaaki; Kimura, Takaumi
Applied Surface Science, 257(7), p.2950 - 2954, 2011/01
Times Cited Count:10 Percentile:42.01(Chemistry, Physical)Chemical state analysis by a combination of X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) using synchrotron radiation is performed for -FeSi single crystals and homoepitaxial -FeSi films. The Si 2p XPS and Fe L-edge XAS spectra imply that the annealing at 1173 K to remove native oxide layers on the crystal induces the formation of FeSi in the surface. The formation of FeSi is also confirmed by Si K-edge XAS analysis. For the homoepitaxial -FeSi films grown on the crystals, the Si K-edge XAS spectra indicate that structurally homogeneous -FeSi films can be grown on the -FeSi single crystals when the substrate temperatures of 973 and 1073 K are applied for molecular beam epitaxy (MBE). Consequently, it is indicated that the combination of XPS and XAS using synchrotron radiation is a useful tool to clarify chemical states nondestructively.
Esaka, Fumitaka; Yamamoto, Hiroyuki; Matsubayashi, Nobuyuki*; Yamada, Yoichi*; Sasase, Masato*; Yamaguchi, Kenji; Shamoto, Shinichi; Magara, Masaaki; Kimura, Takaumi
Applied Surface Science, 256(10), p.3155 - 3159, 2010/03
Times Cited Count:16 Percentile:56.9(Chemistry, Physical)A combination of X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) using synchrotron radiation is applied to clarify surface chemical states of -FeSi films fabricated by an ion-beam sputtering deposition method. The differences in the chemical states of the films fabricated at substrate temperatures of 873, 973 and 1173 K are investigated.
Shimura, Kenichiro*; Yamaguchi, Kenji; Terai, Takayuki*; Yamawaki, Michio*
Journal of Alloys and Compounds, 449(1-2), p.357 - 361, 2008/01
Times Cited Count:0 Percentile:0.01(Chemistry, Physical)no abstracts in English
Sasase, Masato*; Yamaguchi, Kenji; Yamamoto, Hiroyuki; Shamoto, Shinichi; Hojo, Kiichi
Journal of Physics; Conference Series, 100, p.042016_1 - 042016_4, 2008/00
Times Cited Count:3 Percentile:76.2(Nanoscience & Nanotechnology)Defect formation behavior in the -FeSi on Si(100) has been discussed by using cross sectional transmission electron microscope.
Yamada, Yoichi; Yamamoto, Hiroyuki; Oba, Hironori; Sasase, Masato*; Esaka, Fumitaka; Yamaguchi, Kenji; Udono, Haruhiko*; Shamoto, Shinichi; Yokoyama, Atsushi; Hojo, Kiichi
Journal of Physics and Chemistry of Solids, 68(11), p.2204 - 2208, 2007/11
Times Cited Count:6 Percentile:31.31(Chemistry, Multidisciplinary)Si in natural Si has been widely used for a doping source, since Si can be transmuted into P by thermal neutron (Neutron Transmutation Doping, NTD). NTD of nanostructure fabricated from Si-enriched materials can serve as a controlled local doping method with tunable dopant concentration, which cannot be realized by conventional doping methods such as ion implantation. In the present study, Si-enriched thin film has been fabricated in order to demonstrate the local NTD. The Si-enriched film with thickness of 100 nm was deposited on the Si(100) substrate by plasma enhanced chemical vapor deposition using Si-enriched SiF as the source gases. The film contains 7.1 % of Si, which is twice higher than that of natural Si. Possible contaminant, fluorine, is lower than 0.6 at.% determined from X-ray photoelectron spectra. Nanostructure of films and changes of electronic properties by the neutron irradiation will also be discussed.