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Journal Articles

Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography

Nakazato, Tomoharu*; Furukawa, Yusuke*; Tanaka, Momoko; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi*; Nagashima, Keisuke; Kimura, Toyoaki*; Murakami, Hidetoshi*; Saito, Shigeki*; et al.

Journal of Crystal Growth, 311(3), p.875 - 877, 2009/01

 Times Cited Count:24 Percentile:86.11(Crystallography)

The temperature dependence of scintillation properties of a hydrothermal-method-grown zinc oxide (ZnO) emission is investigated using a nickel-like silver laser emitting at 13.9 nm. A broad peak at 386 nm with a full-width at half-maximum (FWHM) of 15 nm at room temperature (298 K) is obtained. The peak position tends to be blue shifted while the FWHM becomes narrower when the crystal temperature is decreased to 25 K. Streak images fitted by a double exponential decay reveal that the measured emission decay at 105 K was $$tau$$$$_{1}$$ = 0.88 ns and $$tau$$$$_{2}$$ = 2.7 ns. This decay time of a few nanoseconds is suitable for lithographic applications and is sufficiently short for the characterization of laser plasma extreme ultraviolet (EUV) sources with nanosecond durations.

Journal Articles

ZnO as fast scintillators evaluated with Ni-like Ag laser

Furukawa, Yusuke*; Tanaka, Momoko; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nishimura, Hiroaki*; Mima, Kunioki*; Kagamitani, Yuji*; et al.

Reza Kenkyu, 36(APLS), p.1028 - 1030, 2008/12

Optical technologies in extreme ultraviolet (EUV) region have been receiving strong interests for the next generation lithography. Here we report properties of ZnO as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The ZnO sample was irradiated with EUV laser pulses and the fluorescence was measured using a streak camera fitted with a spectrograph. A clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. The prominent peak fluorescence is ideal for EUV detection and further applications including imaging.

Journal Articles

Temperature dependence of scintillation properties for a hydrothermal-method-grown zinc oxide crystal evaluated by nickel-like silver laser pulses

Furukawa, Yusuke*; Tanaka, Momoko; Nakazato, Tomoharu*; Tatsumi, Toshihiro*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Murakami, Hidetoshi*; Saito, Shigeki*; et al.

Journal of the Optical Society of America B, 25(7), p.B118 - B121, 2008/07

 Times Cited Count:24 Percentile:72.57(Optics)

Using EUV laser operated at 13.9 nm ZnO and GaN are shown to be excellent scintillators in this wavelength region. Especially ZnO has short response time of 3 ns and prominent peak fluorescence from excitation at 380 nm.

Journal Articles

Evaluation of fast EUV scintillator using 13.9 nm X-ray laser

Tanaka, Momoko; Furukawa, Hiroyuki*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kagamitani, Yuji*; Ehrentraut, D.*; et al.

Journal of Physics; Conference Series, 112(4), p.042058_1 - 042058_4, 2008/00

 Times Cited Count:1 Percentile:55.15(Physics, Fluids & Plasmas)

Optical technologies in the extreme ultraviolet (EUV) region have been receiving strong interest for the next generation lithography. Efficient and fast scintillators are one of the key devices functioning in the EUV region. In this paper, we report excellent properties of ZnO and GaN as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The sample was irradiated with EUV laser pulses, and the fluorescence spectrum and the fluorescence lifetime were measured using a streak camera fitted with a spectrograph. In the case of ZnO, a clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns. For GaN, a fluorescence peak at 370 nm having slower 5-ns decay time was observed. In this respect, the EUV scintillation properties of ZnO is said to be more favorable than GaN.

Journal Articles

Hydrothermal method grown large-sized zinc oxide single crystal as fast scintillator for future extreme ultraviolet lithography

Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; et al.

Applied Physics Letters, 91(23), p.231117_1 - 231117_3, 2007/12

 Times Cited Count:52 Percentile:84.52(Physics, Applied)

The scintillation properties of a hydrothermal method grown zinc oxide (ZnO) crystal are evaluated for extreme ultraviolet (EUV) laser excitation at 13.9 nm wavelength. The exciton emission lifetime at around 380 nm is determined to be 1.1 ns, almost identical to ultraviolet laser excitation cases. This fast response time is sufficiently short for characterizing EUV lithography light sources having a few nanoseconds duration. The availability of large size ZnO crystal up to 3-inch is quite attractive for future lithography and imaging applications.

Journal Articles

Diagnostics system of JT-60U

Sugie, Tatsuo; Hatae, Takaki; Koide, Yoshihiko; Fujita, Takaaki; Kusama, Yoshinori; Nishitani, Takeo; Isayama, Akihiko; Sato, Masayasu; Shinohara, Koji; Asakura, Nobuyuki; et al.

Fusion Science and Technology (JT-60 Special Issue), 42(2-3), p.482 - 511, 2002/09

 Times Cited Count:6 Percentile:3.03(Nuclear Science & Technology)

The diagnostic system of JT-60U (JT-60upgrade) is composed of about 50 individual diagnostic devices. Recently, the detailed radial profile measurements of plasma parameters have been improved, so that the internal structure of plasmas has been explored. The understanding of plasma confinement has been enhanced by density and temperature fluctuation measurements using a mm-wave reflectometer and electron cyclotron emission measurements respectively. In addition, the real-time control experiments of electron density, neutron yield, radiated power and electron temperature gradient have been carried out successfully by corresponding diagnostic devices. These measurements and the real time control contribute to improving plasma performance. Diagnostic devices for next generation fusion devices such as a CO2 laser interferometer/polarimeter and a CO2 laser collective Thomson scattering system have been developed.

Journal Articles

Hydrogen-methanol production system using nuclear process heat

; Omoto, Akira*; *; *; *; *; *; *; *; *; et al.

Enerugi, Shigen Gakkai Dai-11-Kai Kenkyu Happyokai Koen Rombunshu, p.33 - 38, 1992/00

no abstracts in English

JAEA Reports

Examination on the safety criteria in safety assessment of fuel and core of the High Temperature Engineering Test Reactor(HTTR) under abnormal conditions

Hayashi, Kimio; Shiozawa, Shusaku; Shindo, Masami; Iyoku, Tatsuo; *; Kikuchi, Takayuki; Sawa, Kazuhiro; Nakagawa, Shigeaki; Kashimura, Satoru; ; et al.

JAERI-M 91-140, 61 Pages, 1991/09

JAERI-M-91-140.pdf:2.38MB

no abstracts in English

Oral presentation

Effects of $$gamma$$-ray irradiation on electrical characteristics of SiC schottky barrier diode

Kinoshita, Akimasa*; Tanaka, Yasunori*; Tanaka, Tomoyuki*; Fukuda, Kenji*; Arai, Kazuo*; Oshima, Takeshi; Hishiki, Shigeomi

no journal, , 

no abstracts in English

Oral presentation

Photoluminescence of ZnO by EUV laser

Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; Mima, Kunioki*; Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; et al.

no journal, , 

Zinc oxide (ZnO) has previously been reported to be a potential light-emitting diode materia. We measured the time-resolved emission spectrum of a ZnO crystal for extreme ultraviolet (EUV) laser excitation at 13.9 nm wavelength and compared with UV excitation case. The emission lifetime was determined to be 2.6 ns. This value was not changed even for ultraviolet laser excitation. In the context of the nanosecond regime in the EUV region, ZnO crystal promises to be a feasible scintillation material.

Oral presentation

Time-resolved spectroscopy of solid-state materials using an EUV laser

Sarukura, Nobuhiko*; Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Nishimura, Hiroaki*; Mima, Kunioki*; Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; et al.

no journal, , 

Optical technologies in the extreme ultraviolet (EUV) region have been receiving strong interest for the next generation lithography. Here we report properties of ZnO and GaN as scintillators in the EUV region, and to demonstrate the feasibility of using a Ni-like Ag EUV laser operated at 13.9-nm to evaluate these properties. The sample was irradiated with EUV laser pulses and the fluorescence were measured using a streak camera fitted with a spectrograph. In the case of ZnO, a clear, excitonic, fluorescence peak was observed at around 380 nm with a decay lifetime of 3 ns, as shown in Fig. 1. The prominent peak fluorescence is ideal for EUV detection and further applications including imaging. For GaN, a fluorescence peak at 370 nm having slower 5-ns decay time was observed. In this respect, the EUV scintillation properties of ZnO is said to be more favorable than GaN.

11 (Records 1-11 displayed on this page)
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