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Journal Articles

Metal adsorbent for alkaline etching aqua solutions of Si wafer

Tamada, Masao; Ueki, Yuji; Seko, Noriaki; Takeda, Toshihide*; Kawano, Shinichi*

Radiation Physics and Chemistry, 81(8), p.971 - 974, 2012/08

 Times Cited Count:7 Percentile:48.31(Chemistry, Physical)

In the fabrication process of semiconductor, Si wafer surface is etched by strong-alkaline aqua solutions such as 48 % NaOH and KOH. If the etchant is contaminated by Ni and Cu, smalls pits which appeared on Si surface in the process of surface polishing caused poor production yield of the Si wafers. Available commodity adsorbent resins shrink in the high concentration of alkaline aqua solutions and bias flow occurred in the case of their column packing. Hence, novel fibrous adsorbent was synthesized by radiation-induce graft polymerization on nonwoven materials composed of pure polyethylene fibers. The obtained fibrous adsorbent module (TM: Metolate) had practical cost and performance that flow rate is ten times and effective capacity is some tens times higher than commercialized adsorbent resins and fibers.

Journal Articles

Ion exchange fabric synthesized by graft polymerization and its application to ultra-pure water production

Takeda, Toshihide*; Tamada, Masao; Seko, Noriaki; Ueki, Yuji

Radiation Physics and Chemistry, 79(4), p.223 - 226, 2010/04

 Times Cited Count:12 Percentile:62.3(Chemistry, Physical)

Ion exchange fabric (IEF) having the functional group of sulfonic acid was synthesized by radiation grafting of glycidyl methacrylate on a polyethylene nonwoven fabric and subsequent chemical modification. Total organic carbon eluted from the resulting IEF could be reduced to the concentration less than 1 ppb after washing with organic solvents. The obtained IEF was evaluated by 10 ppb Na$$^{+}$$ solution. The column packed IEF, 7 mm in diameter and 20 mm high, could remove the Na$$^{+}$$ at the distribution coefficient of 1.2$$times$$10$$^{7}$$ at liner velocity of 400 m/h. Although the degree of column utilization by adsorbed Na$$^{+}$$ is 3.9%, the breakthrough point reached 2.0$$times$$10$$^{5}$$ at column height of 95 mm. From these results, the IEF synthesized by graft polymerization can be applicable for water purification in ultra pure water production.

Journal Articles

Development of grafting adsorbent for ultra pure water production

Takeda, Toshihide*; Tamada, Masao

JAEA-Review 2006-042, JAEA Takasaki Annual Report 2005, P. 48, 2007/02

The fabric graft-adsorbent can adsorb the metal ions quicker than a commercial resin adsorbent. Additionally, its application to the production of ultra-pure water used in the process of the semiconductor and the liquid crystal is expected to reduce the elution of the total organic carbon. In the present research, the removal characteristic of the sodium ion in extremely low concentration was investigated by using the graft adsorbent of sulfonic acid type which was synthesized by the radiation-induced graft polymerization. The break point of the column evaluation was 660 in the sodium ion concentration of 10,000 ppb. The break point increased as the concentration of sodium ion decreased and became 5,000 at 10 ppm. The graft adsorbent of sulfonic acid type was considered to be promising adsorbent for the graft adsorbent of sulfonic acid type on the point of view of adsorption capacity of sodium ion.

Journal Articles

TRP's (Tokai Reprocessing Plant) coor dination on TRP safeguars improvement plan

; ; ; ; Sugiyama, Toshihide

Proceedings of INMM 39th Annual Meeting, 0 Pages, 1998/07

iaea full-scope safeguards has been carried out from spent fuel reciept to uranium and plutonium product shipments in trp, and so specified problems have occurred for implementation of iaea safegurds. recently iaea rose the new guideline that was strength of safegurds and proposed the safegurds improvement plans for trp in 1995, too. the main proposals are ; provision of more information including design information to iaea, installation of solution measurement and monitoring system for main tanks, implementation of safegurds for main process including waste, evaluations of errors and unmeasured inventory when nrta (near real time material accountancy) would be the conventional accountacy. trp has tackled these improvement items actively. in this paper, it is reported that contents of thes

Journal Articles

nuclear material accounting control of Tokai Reprocessing Plant

; ; ; Sugiyama, Toshihide; *

17TH ANNUAL SYMPOSIUM ON SAFEGUARDS AND NUCLEAR MATERIAL MANAGEMENT, 0 Pages, 1995/05

Nuclear material accounting control in the Tokai Reprocessing Plant is conducted by dividing into three material balance areas. Accounted data are input in the Material Accounting Control System(MACS). Physical Inventory Taking(PIT) has been conducted forty one times, and the material accounting control has been conducted properly by the evaluation of Material Unaccounted For(MUF) that was calculated

Journal Articles

Nuclear material accounting control of Tokai Reprocessing Plant

; ; ; ; Sugiyama, Toshihide

17th SYMPOSIUMU OF SAFEGUARDS AND RESERCH MANEGEMENT, 0 Pages, 1995/05

Material Accounting of Tokai Reprocessing Plant,Japan,is conductedby division into three material balance areas. Nuclear material data from the material accounting are input in the Material Accounting Control Computer System. 41 Physical Inventory Takings have been conducted, and MUF for each PIT has been calculated by the determination of the physical inventory. The MUF has been evaluated by calcula

Oral presentation

Grafting adsorbent for ultra-pure water production

Takeda, Toshihide*; Tamada, Masao

no journal, , 

The fabric graft-adsorbent can adsorb the metal ions quicker than a commercial resin adsorbent. Additionally, its application to the production of ultra-pure water used in the process of the semiconductor and the liquid crystal is expected to reduce the elution of the total organic carbon. In the present research, the removal characteristic of the sodium ion in extremely low concentration was investigated by using the graft adsorbent of sulfonic acid type which was synthesized by the radiation-induced graft polymerization. The break point of the column evaluation was 660 in the sodium ion concentration of 10,000 ppb. The break point increased as the concentration of sodium ion decreased and became 5,000 at 10ppm. The graft adsorbent of sulfonic acid type was considered to be promising adsorbent for the graft adsorbent of sulfonic acid type on the point of view of adsorption capacity of sodium ion.

Oral presentation

Filter for rapid purification of water

Tamada, Masao; Takeda, Toshihide*

no journal, , 

Glycidyl methacrylate (GMA) was grafted onto $$gamma$$-irradiated polyethylene nonwoven fabric which has low leaching of total organic carbon (TOC). The functional group of sulfonic acid was imparted by chemical treatment of grafted fabric. The resulting metal adsorbent removed sodium ion from 10 ppb solution with 400 m/L in linear velocity. This rate is 2000 times faster than that of commercialized adsorbent resins. The breakthrough point was 40,000 in bed volume and the eluted TOC was less than 0.03 ppb. The grafting was carried out by emulsion system to reduce the production cost. As a result, the cost could be reduced into the practical level since suitable dose for grafting was reduced to 50 kGy.

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