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Kamiya, Tomihiro; Takano, Katsuyoshi; Ishii, Yasuyuki; Sato, Takahiro; Oikawa, Masakazu*; Okubo, Takeru; Haga, Junji*; Nishikawa, Hiroyuki*; Furuta, Yusuke*; Uchiya, Naoyuki*; et al.
Nuclear Instruments and Methods in Physics Research B, 267(12-13), p.2317 - 2320, 2009/06
Times Cited Count：7 Percentile：47.15(Instruments & Instrumentation)Kamiya, Tomihiro; Nishikawa, Hiroyuki*; Sato, Takahiro; Haga, Junji; Oikawa, Masakazu*; Ishii, Yasuyuki; Okubo, Takeru; Uchiya, Naoyuki; Furuta, Yusuke*
Applied Radiation and Isotopes, 67(3), p.488 - 491, 2009/03
Times Cited Count：4 Percentile：30.49(Chemistry, Inorganic & Nuclear)Development of a mask-less ion beam lithography technique for fabricating micro- or nano-meter sized structures has been started at the microbeam systems in the ion accelerator facility of JAEA Takasaki (TIARA) in collaboration with Shibaura Institute of Technology. In order to obtain a high precision measure for microbeam size estimation and lens system optimization, or for improvement of spatial resolution down to 100 nm level, we applied this lithography technique itself combined with the electroplating process to make a Ni relief pattern as an optimum resolution standard to be used in secondary electron imaging. In this work, using this standard, the smallest beam size could be obtained. This paper also discuses on the scattering of ions in the materials influenced to the resolution using a Monte Carlo simulation code.
Uchiya, Naoyuki*; Furuta, Yusuke*; Nishikawa, Hiroyuki*; Watanabe, Toru*; Haga, Junji; Sato, Takahiro; Oikawa, Masakazu; Ishii, Yasuyuki; Kamiya, Tomihiro
Microsystem Technologies, 14(9-11), p.1537 - 1540, 2008/10
Times Cited Count：17 Percentile：64.34(Engineering, Electrical & Electronic)Ishii, Yasuyuki; Okubo, Takeru; Haga, Junji*; Adachi, Shigeto*; Yoshida, Eiji*
Proceedings of the Symposium on Accelerator and Related Technology for Application, Vol.10, p.9 - 10, 2008/06
no abstracts in English
Sakai, Takuro; Sato, Takahiro; Ishii, Yasuyuki; Oikawa, Masakazu*; Shimada, Hirofumi*; Haga, Junji*
Dai-18-Kai Tandemu Kasokuki Oyobi Sono Shuhen Gijutsu No Kenkyukai Hokokushu, p.73 - 76, 2005/10
no abstracts in English
Uchiya, Naoyuki*; Harada, Takuya*; Nishikawa, Hiroyuki*; Haga, Junji; Sakai, Takuro; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro
no journal, ,
no abstracts in English
Uchiya, Naoyuki*; Harada, Takuya*; Murai, Masato*; Nishikawa, Hiroyuki*; Haga, Junji; Sato, Takahiro; Oikawa, Masakazu*; Sakai, Takuro; Ishii, Yasuyuki; Fukuda, Mitsuhiro*; et al.
no journal, ,
no abstracts in English
Furuta, Yusuke*; Uchiya, Naoyuki*; Nishikawa, Hiroyuki*; Haga, Junji; Oikawa, Masakazu*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro
no journal, ,
no abstracts in English
Ishii, Yasuyuki; Okubo, Takeru; Haga, Junji; Kobayashi, Akira*; Adachi, Shigeto*
no journal, ,
no abstracts in English
Uchiya, Naoyuki; Furuta, Yusuke*; Nishikawa, Hiroyuki*; Haga, Junji; Sato, Takahiro; Oikawa, Masakazu*; Okubo, Takeru; Ishii, Yasuyuki; Kamiya, Tomihiro; Yamamoto, Shunya
no journal, ,
no abstracts in English
Sato, Takahiro; Oikawa, Masakazu*; Haga, Junji
no journal, ,
The image reconstruction technique of X-ray CT was applied to in-air micro-PIXE to measure three-dimensional distribution of the trace elements in a sample. In this study, the polyethylene fiber containing some kinds of metal was used as a sample, and three-dimensional distribution was measured by rotating the sample.
Ishii, Yasuyuki; Okubo, Takeru; Haga, Junji; Kobayashi, Akira*; Adachi, Shigeto*
no journal, ,
no abstracts in English
Tsuji, Toshiyuki*; Kobayashi, Akira*; Yoshida, Eiji*; Ichihara, Chikara*; Adachi, Shigeto*; Ishii, Yasuyuki; Haga, Junji
no journal, ,
no abstracts in English
Shimizu, Yasuo*; Dobashi, Kunio*; Kusakabe, Takahiko*; Nagamine, Takeaki*; Oikawa, Masakazu*; Sato, Takahiro; Haga, Junji*; Okubo, Takeru; Ishii, Yasuyuki; Kamiya, Tomihiro; et al.
no journal, ,
no abstracts in English
