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imaging device of high spatial resolution ZnO scintillatorNakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Takeda, Kohei*; Nishi, Ryosuke*; Minami, Yuki*; Cadatal-Raduban, M.*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; et al.
Japanese Journal of Applied Physics, 50(12), p.122202_1 - 122202_4, 2011/12
Times Cited Count：10 Percentile：37.91(Physics, Applied)We demonstrate the potential of a hydrothermal method-grown ZnO as a high-spatial resolution imaging device for in-situ soft X-ray laser diagnostics by characterizing the exciton emission patterns. By plotting the emission pattern radii at each position, we estimated the evolution of the beam radius around the focal point. The beam profile of the Ni-like Ag ion plasma laser was estimated from the waist radii as 29 and 21
m, the divergence angle as 7.2 and 11 mrad and the M2 factor as 47 and 50 in the horizontal- and vertical-axis, respectively. Spatial resolution of the magnifier was estimated to be 6m and is expected to improve by optimizing the optics of the magnifier and using a telescope. Our results would enhance the use of ZnO as an imaging device that would play a crucial role in the development and application of soft X-ray light sources.
Tanaka, Momoko; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Oba, Toshiyuki; Kaihori, Takeshi; Ochi, Yoshihiro; et al.
JAEA-Conf 2011-001, p.126 - 128, 2011/03
The spatial resolution of hydrothermal method grown zinc oxide (ZnO) scintillator was evaluated using X-ray laser focused with Fresnel zone plate. The fluorescence image of the ZnO scintillator was measured to be less than 10um using CCD camera coupled with a Schbartzchild expander mirror. The availability of large size ZnO crystal up to 3-inch is quite attractive for future lithography and imaging applications.
Sarukura, Nobuhiko*; Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Ehrentraut, D.*; Fukuda, Tsuguo*; Tanaka, Momoko; Nishikino, Masaharu; Kawachi, Tetsuya
Reza Kenkyu, 39(3), p.193 - 196, 2011/03
Development of light sources in the soft X-ray/X-ray region, such as laser induced plasma emission and XFEL, is in demand for applications in various fields of science, medicine, and industry, among others. To promote this endeavor, development of imaging devices as diagnostic tools in this wavelength region is required. ZnO is a prominent candidate material for high spatial and temporal resolution imaging devices because of its emission at 380 nm, lifetime of less than 1 ns, and availability of large and cheap but high quality crystals. We obtained a single shot image of ZnO emission pattern excited by an X-ray laser at the Advanced Photon Research Center, Japan Atomic Energy Agency. The spatial resolution was estimated to be around 10 m. This result shows that ZnO can be used as a powerful imaging device for applications such as EUV lithography.
Nakazato, Tomoharu*; Shimizu, Toshihiko*; Yamanoi, Kohei*; Sakai, Kohei*; Sarukura, Nobuhiko*; Ehrentraut, D.*; Fukuda, Tsuguo*; Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi*; et al.
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