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Journal Articles

Deep defects in 3C-SiC generated by H$$^{+}$$- and He$$^{+}$$-implantation or by irradiation with high-energy electrons

Weidner, M.*; Trapaidze, L.*; Pensl, G.*; Reshanov, S. A.*; Sch$"o$ner, A.*; Ito, Hisayoshi; Oshima, Takeshi; Kimoto, Tsunenobu*

Materials Science Forum, 645-648, p.439 - 442, 2010/00

Intrinsic defects in 3C-SiC generated by implantation of H$$^{+}$$ and He$$^{+}$$ ions or by irradiation of high energy electrons were investigated using DLTS (Deep Level Transient Spectroscopy). The defect parameters and the thermal stability of the observed defects are determined. The dominant DLTS peak was named W6-center and its capture-cross-section was directly measured by variation of the filling pulse length. The charge state of the W6-center is obtained from double-correlated DLTS investigations according to the Poole-Frenkel effect.

Journal Articles

Defect-engineering in SiC by ion implantation and electron irradiation

Pensl, G.*; Ciobanu, F.*; Frank, T.*; Kirmse, D.*; Krieger, M.*; Reshanov, S.*; Schmid, F.*; Weidner, M.*; Oshima, Takeshi; Ito, Hisayoshi; et al.

Microelectronic Engineering, 83(1), p.146 - 149, 2006/01

https://doi.org/10.1016/j.mee.2005.10.040
 Times Cited Count：15 Percentile：59.26(Engineering, Electrical & Electronic)

no abstracts in English

Journal Articles

Negative-U-centers in 4H- and 6H-SiC detected by spectral light excitation

Weidner, M.*; Pensl, G.*; Nagasawa, Hiroyuki*; Sch$"o$ner, A.*; Oshima, Takeshi

Materials Science Forum, 457-460, p.485 - 488, 2004/10

no abstracts in English

Journal Articles

Polytype-dependent vacancy annealing studied by positron annihilation

Kawasuso, Atsuo; Yoshikawa, Masahito; Maekawa, Masaki; Ito, Hisayoshi; Chiba, Toshinobu*; Redmann, F.*; Rehberg, R. K.*; Weidner, M.*; Frank, T.*; Pensl, G.*

Materials Science Forum, 433-436, p.477 - 480, 2003/08

no abstracts in English

Journal Articles

Radiation-induced defects in 4H- and 6H-SiC epilayers studies by positron annihilation and deep-level transient spectroscopy

Kawasuso, Atsuo; Weidner, M.*; Redmann, F.*; Frank, T.*; Krause-Rehberg, R.*; Pensl, G.*; Sperr, P.*; Triftsh$"a$user, W.*; Ito, Hisayoshi

Materials Science Forum, 389-393, p.489 - 492, 2002/05

no abstracts in English

Journal Articles

Annealing behavior of vacancies and Z$$_{1/2}$$ levels in electron-irradiated 4H-SiC studied by positron annihilation and deep-level transient spectroscopy

Kawasuso, Atsuo; Redmann, F.*; Krause-Rehberg, R.*; Weidner, M.*; Frank, T.*; Pensl, G.*; Sperr, P.*; Triftsh$"a$user, W.*; Ito, Hisayoshi

Applied Physics Letters, 79(24), p.3950 - 3952, 2001/12

https://doi.org/10.1063/1.1426259
 Times Cited Count：39 Percentile：79.49(Physics, Applied)

no abstracts in English

Journal Articles

Formation and annihilation of intrinsic-related defect centers in high energy electron-irradiated or ion-implanted 4H- and 6H-silicon carbide

Weidner, M.*; Frank, T.*; Pensl, G.*; Kawasuso, Atsuo; Ito, Hisayoshi; Krause-Rehberg, R.*

Physica B; Condensed Matter, 308-310, p.633 - 636, 2001/12

https://doi.org/10.1016/S0921-4526(01)00772-4
 Times Cited Count：29 Percentile：78.18(Physics, Condensed Matter)

no abstracts in English

Journal Articles

Vacancies in He-implanted 4H and 6H SiC epilayers studied by positron annihilation

Kawasuso, Atsuo; Weidner, M.*; Redmann, F.*; Frank, T.*; Sperr, P.*; Krause-Rehberg, R.*; Triftsh$"a$user, W.*; Pensl, G.*

Physica B; Condensed Matter, 308-310, p.660 - 663, 2001/12

https://doi.org/10.1016/S0921-4526(01)00783-9
 Times Cited Count：13 Percentile：57.94(Physics, Condensed Matter)

no abstracts in English

Journal Articles

Vacancies and deep levels in electron-irradiated 6${it H}$ SiC epilayers studied by positron annihilation and deep level transient spectroscopy

Kawasuso, Atsuo; Redmann, F.*; Krause-Rehberg, R.*; Frank, T.*; Weidner, M.*; Pensl, G.*; Sperr, P.*; Ito, Hisayoshi

Journal of Applied Physics, 90(7), p.3377 - 3382, 2001/10

https://doi.org/10.1063/1.1402144
 Times Cited Count：42 Percentile：81.11(Physics, Applied)

no abstracts in English

Journal Articles

Annealing process of defects in epitaxial SiC induced by He and electron irradiation; Positron annihilation study

Kawasuso, Atsuo; Redmann, F.*; Krause-Rehberg, R.*; Sperr, P.*; Frank, T.*; Weidner, M.*; Pensl, G.*; Ito, Hisayoshi

Materials Science Forum, 353-356, p.537 - 540, 2001/00

no abstracts in English

Journal Articles

Generation and annihilation of intrinsic-related defect centers in 4H/6H-SiC

Frank, T.*; Weidner, M.*; Ito, Hisayoshi; Pensl, G.*

Materials Science Forum, 353-356, p.439 - 442, 2001/00

no abstracts in English

Oral presentation

Shallow and deep defect levels in SiC

Pensl, G.*; Frank, T.*; Reshanov, S.*; Schmid, F.*; Weidner, M.*; Oshima, Takeshi; Ito, Hisayoshi

no journal, , 

no abstracts in English

12 (Records 1-12 displayed on this page)
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