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Nishikino, Masaharu; Ishino, Masahiko; Ichimaru, Satoshi*; Hatayama, Masatoshi*; Hasegawa, Noboru; Kawachi, Tetsuya
Reza Gakkai Dai-483-Kai Kenkyukai Hokoku; Tanhacho Ryoshi Bimu Hassei To Sono Oyo, p.25 - 28, 2015/12
X-ray ablation has been recently achieved using plasma soft X-ray lasers (SXRLs), laser plasma soft X-rays, and X-ray free electron lasers. In order to study the interactions between picosecond SXRL beams and material and multi-layered structure surfaces were irradiated with SXRL pulse. Following irradiation, the substrate surface was observed using a scanning electron microscope and an atomic force microscope. The surface modifications caused by the SXRL beam were clearly seen. The multi-layered mirror is the important component for the EUV lithography. Then, we have started the damage test of multi-layered structure, and the surface modifications caused by the SXRL pulse irradiations were confirmed.
Koike, Masato; Ishino, Masahiko; Imazono, Takashi; Sano, Kazuo*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Heimann, P. A.*; Gullikson, E. M.*
Spectrochimica Acta, Part B, 64(8), p.756 - 760, 2009/08
Times Cited Count:9 Percentile:42.84(Spectroscopy)W/C and Co/SiO multilayer laminar-type holographic plane gratings (groove density 1/1200 lines /mm) in the 1-8 keV region are developed. For the Co/SiO grating the diffraction efficiencies of 0.41 and 0.47 at 4 and 6 keV, respectively, and for the W/C grating 0.38 at 8 keV are observed. Taking advantage of the outstanding high diffraction efficiencies into practical soft X-ray spectrographs a Mo/SiO multilayer varied-line-spacing (VLS) laminar-type spherical grating (1/2400 lines /mm) is also developed for use with a flat field spectrograph in the region of 1.7 keV. For the Mo/SiO multilayer grating the diffraction efficiencies of 0.05-0.20 at 0.9-1.8 keV are observed. The FWHM's of the measured line profiles of Hf-M (1644.6 eV), Si-K (1740.0 eV),and W-M (1775.4 eV) are 13.7 eV, 8.0 eV, and 8.7 eV, respectively. It shows the validity of multilayer lamina-type gratings in the region.
Tokura, Akio*; Maeda, Fumihiko*; Teraoka, Yuden; Yoshigoe, Akitaka; Takagi, Daisuke*; Homma, Yoshikazu*; Watanabe, Yoshio*; Kobayashi, Yoshihiro*
Carbon, 46(14), p.1903 - 1908, 2008/11
Times Cited Count:18 Percentile:49.92(Chemistry, Physical)We have investigated the adsorption of atomic hydrogen on vertically aligned carbon nanotube using synchrotron-radiation-based core-level photoelectron spectroscopy and Raman spectroscopy. From C1s spectra, we identified a peak component due to CH bonds of carbon atoms in single-walled carbon nanotubes. We also found the suppression of -plasmon excitation, indicating that the hydrogen adsorption deforms the bonding structure. Raman spectra of the single-walled carbon nanotubes indicated that the radial-breathing-mode intensities decreased due to the adsorption-induced bonding-structure deformation. Moreover, the decrease for single-walled carbon nanotubes with small-diameter was more severe than that for large-diameter. Our results strongly suggest that the hydrogen adsorption, which induces the structure deformation from sp to sp bonding, depends on the diameter of SWCNTs.
Koike, Masato; Ishino, Masahiko; Heimann, P. A.*; Imazono, Takashi; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Gullikson, E. M.*; Sano, Kazuo*
AIP Conference Proceedings 879, p.647 - 650, 2007/01
no abstracts in English
Ishino, Masahiko; Heimann, P. A.*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Sano, Kazuo*; Gullikson, E. M.*; Koike, Masato
Applied Optics, 45(26), p.6741 - 6745, 2006/09
Times Cited Count:12 Percentile:49.85(Optics)no abstracts in English
Koike, Masato
X-sen Ketsuzo Kogaku Nyuzu Reta, (23), p.3 - 4, 2006/03
no abstracts in English
Tokura, Akio*; Maeda, Fumihiko*; Takagi, Daisuke*; Homma, Yoshikazu*; Yoshigoe, Akitaka; Teraoka, Yuden; Watanabe, Yoshio*; Kobayashi, Yoshihiro*
no journal, ,
no abstracts in English
Tokura, Akio*; Maeda, Fumihiko*; Teraoka, Yuden; Yoshigoe, Akitaka; Takagi, Daisuke*; Homma, Yoshikazu*; Watanabe, Yoshio*; Kobayashi, Yoshihiro*
no journal, ,
We have investigated the adsorption of atomic hydrogen on vertically aligned SWNT film. The effects of hydrogen adsorption were investigated by photoelectron spectroscopy and Raman spectroscopy. By fitting C 1s core level spectrum, we found the component attributed to hydrogenation of carbon. The suppression of plasmons was also found. These results indicate that hydrogen adsorption induced bonding structure deformation. Raman spectra demonstrate that the radial-breathing-mode intensity of small-diameter SWNTs is more severely decreased than that of large-diameter SWNTs. The G-band/D-band ratio also decreased after the irradiation. These results indicate the disordering of graphene on small-diameter SWNTs is induced more easily. Our results indicate that the adsorption coefficient of hydrogen atoms for SWNTs with small diameter is higher than that for SWNTs with large diameter.
Koike, Masato; Ishino, Masahiko; Heimann, P. A.*; Gullikson, E. M.*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Sano, Kazuo*
no journal, ,
no abstracts in English
Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Heimann, P. A.*; Gullikson, E. M.*; Sasai, Hiroyuki*
no journal, ,
no abstracts in English
Koike, Masato; Ishino, Masahiko; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sano, Kazuo*; Heimann, P. A.*; Gullikson, E. M.*
no journal, ,
no abstracts in English
Ishino, Masahiko; Koike, Masato; Heimann, P. A.*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Sano, Kazuo*; Gullikson, E. M.*
no journal, ,
no abstracts in English
Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Heimann, P. A.*; Gullikson, E. M.*
no journal, ,
no abstracts in English
Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Sasai, Hiroyuki*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Heimann, P. A.*; Gullikson, E. M.*
no journal, ,
no abstracts in English